JPH0749039Y2 - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ

Info

Publication number
JPH0749039Y2
JPH0749039Y2 JP1987123099U JP12309987U JPH0749039Y2 JP H0749039 Y2 JPH0749039 Y2 JP H0749039Y2 JP 1987123099 U JP1987123099 U JP 1987123099U JP 12309987 U JP12309987 U JP 12309987U JP H0749039 Y2 JPH0749039 Y2 JP H0749039Y2
Authority
JP
Japan
Prior art keywords
annular permanent
rotor
permanent magnets
holding cylinder
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987123099U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6429289U (enrdf_load_stackoverflow
Inventor
晴繁 大澤
仁 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP1987123099U priority Critical patent/JPH0749039Y2/ja
Publication of JPS6429289U publication Critical patent/JPS6429289U/ja
Application granted granted Critical
Publication of JPH0749039Y2 publication Critical patent/JPH0749039Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1987123099U 1987-08-13 1987-08-13 ターボ分子ポンプ Expired - Lifetime JPH0749039Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987123099U JPH0749039Y2 (ja) 1987-08-13 1987-08-13 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987123099U JPH0749039Y2 (ja) 1987-08-13 1987-08-13 ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6429289U JPS6429289U (enrdf_load_stackoverflow) 1989-02-21
JPH0749039Y2 true JPH0749039Y2 (ja) 1995-11-13

Family

ID=31371639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987123099U Expired - Lifetime JPH0749039Y2 (ja) 1987-08-13 1987-08-13 ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH0749039Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020112080A (ja) * 2019-01-10 2020-07-27 エドワーズ株式会社 真空ポンプ
US12009726B2 (en) * 2019-05-24 2024-06-11 Shimadzu Corporation Vacuum pump and magnetic-bearing-integrated motor

Also Published As

Publication number Publication date
JPS6429289U (enrdf_load_stackoverflow) 1989-02-21

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