JPH0748574Y2 - 搬送装置 - Google Patents

搬送装置

Info

Publication number
JPH0748574Y2
JPH0748574Y2 JP1989099179U JP9917989U JPH0748574Y2 JP H0748574 Y2 JPH0748574 Y2 JP H0748574Y2 JP 1989099179 U JP1989099179 U JP 1989099179U JP 9917989 U JP9917989 U JP 9917989U JP H0748574 Y2 JPH0748574 Y2 JP H0748574Y2
Authority
JP
Japan
Prior art keywords
cylinders
article
suction
outlet
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989099179U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0338843U (en, 2012
Inventor
実 山田
Original Assignee
石川島播磨重工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 石川島播磨重工業株式会社 filed Critical 石川島播磨重工業株式会社
Priority to JP1989099179U priority Critical patent/JPH0748574Y2/ja
Publication of JPH0338843U publication Critical patent/JPH0338843U/ja
Application granted granted Critical
Publication of JPH0748574Y2 publication Critical patent/JPH0748574Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
JP1989099179U 1989-08-25 1989-08-25 搬送装置 Expired - Lifetime JPH0748574Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989099179U JPH0748574Y2 (ja) 1989-08-25 1989-08-25 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989099179U JPH0748574Y2 (ja) 1989-08-25 1989-08-25 搬送装置

Publications (2)

Publication Number Publication Date
JPH0338843U JPH0338843U (en, 2012) 1991-04-15
JPH0748574Y2 true JPH0748574Y2 (ja) 1995-11-08

Family

ID=31648237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989099179U Expired - Lifetime JPH0748574Y2 (ja) 1989-08-25 1989-08-25 搬送装置

Country Status (1)

Country Link
JP (1) JPH0748574Y2 (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4554397B2 (ja) * 2005-02-23 2010-09-29 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP4998047B2 (ja) * 2007-03-29 2012-08-15 パナソニック株式会社 空気清浄機
KR101405780B1 (ko) * 2011-11-02 2014-06-17 성균관대학교산학협력단 이송방향 전환이 가능한 기판이송장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS514034Y2 (en, 2012) * 1971-08-27 1976-02-04
JPS5016679U (en, 2012) * 1973-04-28 1975-02-21
JPS592733U (ja) * 1982-06-28 1984-01-09 株式会社日立製作所 エアベアリング搬送装置

Also Published As

Publication number Publication date
JPH0338843U (en, 2012) 1991-04-15

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