JPH0747867Y2 - 金属マスクにおける目合せ装置 - Google Patents
金属マスクにおける目合せ装置Info
- Publication number
- JPH0747867Y2 JPH0747867Y2 JP9552488U JP9552488U JPH0747867Y2 JP H0747867 Y2 JPH0747867 Y2 JP H0747867Y2 JP 9552488 U JP9552488 U JP 9552488U JP 9552488 U JP9552488 U JP 9552488U JP H0747867 Y2 JPH0747867 Y2 JP H0747867Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- metal mask
- mask
- holding plate
- permanent magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 69
- 239000002184 metal Substances 0.000 title claims description 69
- 239000000696 magnetic material Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 description 22
- 239000000758 substrate Substances 0.000 description 21
- 229910000679 solder Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9552488U JPH0747867Y2 (ja) | 1988-07-19 | 1988-07-19 | 金属マスクにおける目合せ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9552488U JPH0747867Y2 (ja) | 1988-07-19 | 1988-07-19 | 金属マスクにおける目合せ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0217835U JPH0217835U (enrdf_load_stackoverflow) | 1990-02-06 |
| JPH0747867Y2 true JPH0747867Y2 (ja) | 1995-11-01 |
Family
ID=31320192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9552488U Expired - Lifetime JPH0747867Y2 (ja) | 1988-07-19 | 1988-07-19 | 金属マスクにおける目合せ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0747867Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-07-19 JP JP9552488U patent/JPH0747867Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0217835U (enrdf_load_stackoverflow) | 1990-02-06 |
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