JPH074553Y2 - 測光装置 - Google Patents

測光装置

Info

Publication number
JPH074553Y2
JPH074553Y2 JP1985080606U JP8060685U JPH074553Y2 JP H074553 Y2 JPH074553 Y2 JP H074553Y2 JP 1985080606 U JP1985080606 U JP 1985080606U JP 8060685 U JP8060685 U JP 8060685U JP H074553 Y2 JPH074553 Y2 JP H074553Y2
Authority
JP
Japan
Prior art keywords
output
signal
circuit
photodiode
comparison
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985080606U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61195428U (US20070167544A1-20070719-C00007.png
Inventor
直樹 野口
有利 米田
一朗 浅野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP1985080606U priority Critical patent/JPH074553Y2/ja
Publication of JPS61195428U publication Critical patent/JPS61195428U/ja
Application granted granted Critical
Publication of JPH074553Y2 publication Critical patent/JPH074553Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP1985080606U 1985-05-29 1985-05-29 測光装置 Expired - Lifetime JPH074553Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985080606U JPH074553Y2 (ja) 1985-05-29 1985-05-29 測光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985080606U JPH074553Y2 (ja) 1985-05-29 1985-05-29 測光装置

Publications (2)

Publication Number Publication Date
JPS61195428U JPS61195428U (US20070167544A1-20070719-C00007.png) 1986-12-05
JPH074553Y2 true JPH074553Y2 (ja) 1995-02-01

Family

ID=30626613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985080606U Expired - Lifetime JPH074553Y2 (ja) 1985-05-29 1985-05-29 測光装置

Country Status (1)

Country Link
JP (1) JPH074553Y2 (US20070167544A1-20070719-C00007.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009216411A (ja) * 2008-03-07 2009-09-24 Advanced Mask Inspection Technology Kk 試料検査装置及び試料検査方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50118990U (US20070167544A1-20070719-C00007.png) * 1974-03-12 1975-09-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009216411A (ja) * 2008-03-07 2009-09-24 Advanced Mask Inspection Technology Kk 試料検査装置及び試料検査方法

Also Published As

Publication number Publication date
JPS61195428U (US20070167544A1-20070719-C00007.png) 1986-12-05

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