JPH074553Y2 - 測光装置 - Google Patents
測光装置Info
- Publication number
- JPH074553Y2 JPH074553Y2 JP1985080606U JP8060685U JPH074553Y2 JP H074553 Y2 JPH074553 Y2 JP H074553Y2 JP 1985080606 U JP1985080606 U JP 1985080606U JP 8060685 U JP8060685 U JP 8060685U JP H074553 Y2 JPH074553 Y2 JP H074553Y2
- Authority
- JP
- Japan
- Prior art keywords
- output
- signal
- circuit
- photodiode
- comparison
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985080606U JPH074553Y2 (ja) | 1985-05-29 | 1985-05-29 | 測光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985080606U JPH074553Y2 (ja) | 1985-05-29 | 1985-05-29 | 測光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61195428U JPS61195428U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-12-05 |
| JPH074553Y2 true JPH074553Y2 (ja) | 1995-02-01 |
Family
ID=30626613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985080606U Expired - Lifetime JPH074553Y2 (ja) | 1985-05-29 | 1985-05-29 | 測光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH074553Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009216411A (ja) * | 2008-03-07 | 2009-09-24 | Advanced Mask Inspection Technology Kk | 試料検査装置及び試料検査方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50118990U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-03-12 | 1975-09-29 |
-
1985
- 1985-05-29 JP JP1985080606U patent/JPH074553Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009216411A (ja) * | 2008-03-07 | 2009-09-24 | Advanced Mask Inspection Technology Kk | 試料検査装置及び試料検査方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61195428U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-12-05 |