JPH0744992Y2 - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPH0744992Y2
JPH0744992Y2 JP6513289U JP6513289U JPH0744992Y2 JP H0744992 Y2 JPH0744992 Y2 JP H0744992Y2 JP 6513289 U JP6513289 U JP 6513289U JP 6513289 U JP6513289 U JP 6513289U JP H0744992 Y2 JPH0744992 Y2 JP H0744992Y2
Authority
JP
Japan
Prior art keywords
pressure
pressure chamber
diaphragms
semiconductor
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP6513289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH034242U (cs
Inventor
克明 安井
雄治 岸本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6513289U priority Critical patent/JPH0744992Y2/ja
Publication of JPH034242U publication Critical patent/JPH034242U/ja
Application granted granted Critical
Publication of JPH0744992Y2 publication Critical patent/JPH0744992Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP6513289U 1989-06-02 1989-06-02 圧力センサ Expired - Fee Related JPH0744992Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6513289U JPH0744992Y2 (ja) 1989-06-02 1989-06-02 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6513289U JPH0744992Y2 (ja) 1989-06-02 1989-06-02 圧力センサ

Publications (2)

Publication Number Publication Date
JPH034242U JPH034242U (cs) 1991-01-17
JPH0744992Y2 true JPH0744992Y2 (ja) 1995-10-11

Family

ID=31596691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6513289U Expired - Fee Related JPH0744992Y2 (ja) 1989-06-02 1989-06-02 圧力センサ

Country Status (1)

Country Link
JP (1) JPH0744992Y2 (cs)

Also Published As

Publication number Publication date
JPH034242U (cs) 1991-01-17

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees