JPH0744016Y2 - 遠心式基板乾燥装置の基板クランプ装置 - Google Patents

遠心式基板乾燥装置の基板クランプ装置

Info

Publication number
JPH0744016Y2
JPH0744016Y2 JP6824890U JP6824890U JPH0744016Y2 JP H0744016 Y2 JPH0744016 Y2 JP H0744016Y2 JP 6824890 U JP6824890 U JP 6824890U JP 6824890 U JP6824890 U JP 6824890U JP H0744016 Y2 JPH0744016 Y2 JP H0744016Y2
Authority
JP
Japan
Prior art keywords
substrate
link
rotor
arm
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6824890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0426532U (enrdf_load_stackoverflow
Inventor
賢司 杉本
浩一郎 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP6824890U priority Critical patent/JPH0744016Y2/ja
Publication of JPH0426532U publication Critical patent/JPH0426532U/ja
Application granted granted Critical
Publication of JPH0744016Y2 publication Critical patent/JPH0744016Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP6824890U 1990-06-26 1990-06-26 遠心式基板乾燥装置の基板クランプ装置 Expired - Lifetime JPH0744016Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6824890U JPH0744016Y2 (ja) 1990-06-26 1990-06-26 遠心式基板乾燥装置の基板クランプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6824890U JPH0744016Y2 (ja) 1990-06-26 1990-06-26 遠心式基板乾燥装置の基板クランプ装置

Publications (2)

Publication Number Publication Date
JPH0426532U JPH0426532U (enrdf_load_stackoverflow) 1992-03-03
JPH0744016Y2 true JPH0744016Y2 (ja) 1995-10-09

Family

ID=31602518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6824890U Expired - Lifetime JPH0744016Y2 (ja) 1990-06-26 1990-06-26 遠心式基板乾燥装置の基板クランプ装置

Country Status (1)

Country Link
JP (1) JPH0744016Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2955910B2 (ja) * 1992-09-25 1999-10-04 大日本スクリーン製造株式会社 横軸回転式基板乾燥装置

Also Published As

Publication number Publication date
JPH0426532U (enrdf_load_stackoverflow) 1992-03-03

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