JPH0742529Y2 - 浸漬型基板処理装置の薬液導入弁 - Google Patents
浸漬型基板処理装置の薬液導入弁Info
- Publication number
- JPH0742529Y2 JPH0742529Y2 JP9363491U JP9363491U JPH0742529Y2 JP H0742529 Y2 JPH0742529 Y2 JP H0742529Y2 JP 9363491 U JP9363491 U JP 9363491U JP 9363491 U JP9363491 U JP 9363491U JP H0742529 Y2 JPH0742529 Y2 JP H0742529Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- chemical liquid
- pure water
- chemical
- substrate processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 title claims description 104
- 239000000758 substrate Substances 0.000 title claims description 42
- 238000007654 immersion Methods 0.000 title claims description 13
- 239000007788 liquid Substances 0.000 claims description 101
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 66
- 239000003814 drug Substances 0.000 description 9
- 238000004381 surface treatment Methods 0.000 description 9
- 230000006866 deterioration Effects 0.000 description 5
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 229940079593 drug Drugs 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 235000014366 other mixer Nutrition 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9363491U JPH0742529Y2 (ja) | 1990-10-19 | 1991-10-18 | 浸漬型基板処理装置の薬液導入弁 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2-109823 | 1990-10-19 | ||
| JP10982390 | 1990-10-19 | ||
| JP9363491U JPH0742529Y2 (ja) | 1990-10-19 | 1991-10-18 | 浸漬型基板処理装置の薬液導入弁 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0499267U JPH0499267U (OSRAM) | 1992-08-27 |
| JPH0742529Y2 true JPH0742529Y2 (ja) | 1995-10-04 |
Family
ID=31948775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9363491U Expired - Lifetime JPH0742529Y2 (ja) | 1990-10-19 | 1991-10-18 | 浸漬型基板処理装置の薬液導入弁 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0742529Y2 (OSRAM) |
-
1991
- 1991-10-18 JP JP9363491U patent/JPH0742529Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0499267U (OSRAM) | 1992-08-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |