JPH0499267U - - Google Patents
Info
- Publication number
- JPH0499267U JPH0499267U JP9363491U JP9363491U JPH0499267U JP H0499267 U JPH0499267 U JP H0499267U JP 9363491 U JP9363491 U JP 9363491U JP 9363491 U JP9363491 U JP 9363491U JP H0499267 U JPH0499267 U JP H0499267U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9363491U JPH0742529Y2 (ja) | 1990-10-19 | 1991-10-18 | 浸漬型基板処理装置の薬液導入弁 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2-109823 | 1990-10-19 | ||
| JP10982390 | 1990-10-19 | ||
| JP9363491U JPH0742529Y2 (ja) | 1990-10-19 | 1991-10-18 | 浸漬型基板処理装置の薬液導入弁 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0499267U true JPH0499267U (OSRAM) | 1992-08-27 |
| JPH0742529Y2 JPH0742529Y2 (ja) | 1995-10-04 |
Family
ID=31948775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9363491U Expired - Lifetime JPH0742529Y2 (ja) | 1990-10-19 | 1991-10-18 | 浸漬型基板処理装置の薬液導入弁 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0742529Y2 (OSRAM) |
-
1991
- 1991-10-18 JP JP9363491U patent/JPH0742529Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0742529Y2 (ja) | 1995-10-04 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |