JPH0740522Y2 - 真空成膜装置のビューイングポート - Google Patents

真空成膜装置のビューイングポート

Info

Publication number
JPH0740522Y2
JPH0740522Y2 JP1990061900U JP6190090U JPH0740522Y2 JP H0740522 Y2 JPH0740522 Y2 JP H0740522Y2 JP 1990061900 U JP1990061900 U JP 1990061900U JP 6190090 U JP6190090 U JP 6190090U JP H0740522 Y2 JPH0740522 Y2 JP H0740522Y2
Authority
JP
Japan
Prior art keywords
shutter
viewing port
vacuum
chamber
shutter plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990061900U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0421557U (enrdf_load_stackoverflow
Inventor
信彦 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1990061900U priority Critical patent/JPH0740522Y2/ja
Publication of JPH0421557U publication Critical patent/JPH0421557U/ja
Application granted granted Critical
Publication of JPH0740522Y2 publication Critical patent/JPH0740522Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP1990061900U 1990-06-12 1990-06-12 真空成膜装置のビューイングポート Expired - Fee Related JPH0740522Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990061900U JPH0740522Y2 (ja) 1990-06-12 1990-06-12 真空成膜装置のビューイングポート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990061900U JPH0740522Y2 (ja) 1990-06-12 1990-06-12 真空成膜装置のビューイングポート

Publications (2)

Publication Number Publication Date
JPH0421557U JPH0421557U (enrdf_load_stackoverflow) 1992-02-24
JPH0740522Y2 true JPH0740522Y2 (ja) 1995-09-20

Family

ID=31590566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990061900U Expired - Fee Related JPH0740522Y2 (ja) 1990-06-12 1990-06-12 真空成膜装置のビューイングポート

Country Status (1)

Country Link
JP (1) JPH0740522Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10244144A (ja) * 1997-03-04 1998-09-14 Sumitomo Electric Ind Ltd 圧力隔壁
JP6447033B2 (ja) * 2014-11-12 2019-01-09 三菱瓦斯化学株式会社 内部観察用サイトグラスの曇り防止装置、撹拌処理システム及び内部観察用サイトグラスの曇り防止方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03197673A (ja) * 1989-12-26 1991-08-29 Nec Corp 半導体装置の製造装置

Also Published As

Publication number Publication date
JPH0421557U (enrdf_load_stackoverflow) 1992-02-24

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