JPH0739084Y2 - スピンドル装置 - Google Patents

スピンドル装置

Info

Publication number
JPH0739084Y2
JPH0739084Y2 JP11377089U JP11377089U JPH0739084Y2 JP H0739084 Y2 JPH0739084 Y2 JP H0739084Y2 JP 11377089 U JP11377089 U JP 11377089U JP 11377089 U JP11377089 U JP 11377089U JP H0739084 Y2 JPH0739084 Y2 JP H0739084Y2
Authority
JP
Japan
Prior art keywords
suction
turntable
annular
passage
disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11377089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352855U (US20090177143A1-20090709-C00008.png
Inventor
繁樹 小川
紀男 伊藤
Original Assignee
エヌティエヌ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エヌティエヌ株式会社 filed Critical エヌティエヌ株式会社
Priority to JP11377089U priority Critical patent/JPH0739084Y2/ja
Publication of JPH0352855U publication Critical patent/JPH0352855U/ja
Application granted granted Critical
Publication of JPH0739084Y2 publication Critical patent/JPH0739084Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
JP11377089U 1989-09-27 1989-09-27 スピンドル装置 Expired - Lifetime JPH0739084Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11377089U JPH0739084Y2 (ja) 1989-09-27 1989-09-27 スピンドル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11377089U JPH0739084Y2 (ja) 1989-09-27 1989-09-27 スピンドル装置

Publications (2)

Publication Number Publication Date
JPH0352855U JPH0352855U (US20090177143A1-20090709-C00008.png) 1991-05-22
JPH0739084Y2 true JPH0739084Y2 (ja) 1995-09-06

Family

ID=31662173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11377089U Expired - Lifetime JPH0739084Y2 (ja) 1989-09-27 1989-09-27 スピンドル装置

Country Status (1)

Country Link
JP (1) JPH0739084Y2 (US20090177143A1-20090709-C00008.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7071182B2 (ja) * 2018-03-22 2022-05-18 株式会社ディスコ 軸ユニット及び栓機構

Also Published As

Publication number Publication date
JPH0352855U (US20090177143A1-20090709-C00008.png) 1991-05-22

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