JPH0737312Y2 - 遠心乾燥装置 - Google Patents
遠心乾燥装置Info
- Publication number
- JPH0737312Y2 JPH0737312Y2 JP1985021038U JP2103885U JPH0737312Y2 JP H0737312 Y2 JPH0737312 Y2 JP H0737312Y2 JP 1985021038 U JP1985021038 U JP 1985021038U JP 2103885 U JP2103885 U JP 2103885U JP H0737312 Y2 JPH0737312 Y2 JP H0737312Y2
- Authority
- JP
- Japan
- Prior art keywords
- cradle
- rotating frame
- arm
- centrifugal
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001035 drying Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 10
- 239000000463 material Substances 0.000 description 6
- 238000005192 partition Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985021038U JPH0737312Y2 (ja) | 1985-02-16 | 1985-02-16 | 遠心乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985021038U JPH0737312Y2 (ja) | 1985-02-16 | 1985-02-16 | 遠心乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61138242U JPS61138242U (en, 2012) | 1986-08-27 |
| JPH0737312Y2 true JPH0737312Y2 (ja) | 1995-08-23 |
Family
ID=30512077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985021038U Expired - Lifetime JPH0737312Y2 (ja) | 1985-02-16 | 1985-02-16 | 遠心乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737312Y2 (en, 2012) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5991731U (ja) * | 1982-12-13 | 1984-06-21 | 日本電気株式会社 | ウエハ−収納容器固定用箱の起立装置 |
-
1985
- 1985-02-16 JP JP1985021038U patent/JPH0737312Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61138242U (en, 2012) | 1986-08-27 |
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