JPH0737310Y2 - 熱処理炉 - Google Patents
熱処理炉Info
- Publication number
- JPH0737310Y2 JPH0737310Y2 JP1987033687U JP3368787U JPH0737310Y2 JP H0737310 Y2 JPH0737310 Y2 JP H0737310Y2 JP 1987033687 U JP1987033687 U JP 1987033687U JP 3368787 U JP3368787 U JP 3368787U JP H0737310 Y2 JPH0737310 Y2 JP H0737310Y2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- core tube
- heat treatment
- treatment furnace
- annular body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987033687U JPH0737310Y2 (ja) | 1987-03-05 | 1987-03-05 | 熱処理炉 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987033687U JPH0737310Y2 (ja) | 1987-03-05 | 1987-03-05 | 熱処理炉 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63140620U JPS63140620U (enrdf_load_stackoverflow) | 1988-09-16 |
JPH0737310Y2 true JPH0737310Y2 (ja) | 1995-08-23 |
Family
ID=30841528
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987033687U Expired - Lifetime JPH0737310Y2 (ja) | 1987-03-05 | 1987-03-05 | 熱処理炉 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0737310Y2 (enrdf_load_stackoverflow) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5426664A (en) * | 1977-07-29 | 1979-02-28 | Nec Corp | Tool for heat treatment of semiconductor wafer |
JPS59119031U (ja) * | 1983-02-01 | 1984-08-11 | セイコーインスツルメンツ株式会社 | 拡散装置 |
-
1987
- 1987-03-05 JP JP1987033687U patent/JPH0737310Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63140620U (enrdf_load_stackoverflow) | 1988-09-16 |
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