JPH0735396Y2 - ウエハカセット搬送箱 - Google Patents
ウエハカセット搬送箱Info
- Publication number
- JPH0735396Y2 JPH0735396Y2 JP1989007244U JP724489U JPH0735396Y2 JP H0735396 Y2 JPH0735396 Y2 JP H0735396Y2 JP 1989007244 U JP1989007244 U JP 1989007244U JP 724489 U JP724489 U JP 724489U JP H0735396 Y2 JPH0735396 Y2 JP H0735396Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- clean gas
- transfer box
- main body
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Packages (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007244U JPH0735396Y2 (ja) | 1989-01-25 | 1989-01-25 | ウエハカセット搬送箱 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989007244U JPH0735396Y2 (ja) | 1989-01-25 | 1989-01-25 | ウエハカセット搬送箱 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0298640U JPH0298640U (cs) | 1990-08-06 |
| JPH0735396Y2 true JPH0735396Y2 (ja) | 1995-08-09 |
Family
ID=31212092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989007244U Expired - Lifetime JPH0735396Y2 (ja) | 1989-01-25 | 1989-01-25 | ウエハカセット搬送箱 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735396Y2 (cs) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003007813A (ja) * | 2001-06-20 | 2003-01-10 | Nec Corp | 半導体ウエハの保管ボックス、運搬装置、運搬方法及び保管倉庫 |
| CN103662424B (zh) * | 2012-09-21 | 2016-06-08 | 上海航天精密机械研究所 | 一种带减振、密封贮运的包装箱 |
| JP6689673B2 (ja) * | 2016-05-25 | 2020-04-28 | 信越ポリマー株式会社 | 基板収納容器の管理システム |
| JP6689672B2 (ja) * | 2016-05-25 | 2020-04-28 | 信越ポリマー株式会社 | 基板収納容器及びその管理システム並びに基板収納容器の管理方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55134239A (en) * | 1979-04-04 | 1980-10-18 | Toshiba Corp | Clean box |
| JPS6218317U (cs) * | 1985-07-18 | 1987-02-03 |
-
1989
- 1989-01-25 JP JP1989007244U patent/JPH0735396Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0298640U (cs) | 1990-08-06 |
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