JPH07335715A - Cassette bringing-in/bringing-out method for board treating device and its device - Google Patents

Abstract

PURPOSE:To provide a cassette bringing-in/bringing-out method of a board treating device which further enhances a more compact device and the throughput of treating at the same time and its device. CONSTITUTION:When each of cassettes C1 and C2 is brought in, the first cassette C1 and the second cassette C2 from a preprocess are loaded on loading mounts 11a and 11b and first and second cassette support mechanisms 21 and 22 lift up a cassette receiving mount 33 and support the bottom of each cassette and lift up each cassette from the loading mounts 11a and 11b at first and turn horizontally the cassette receiving mount 33, thereby converting the direction of the U end face of each cassette. Furthermore, the spacing of each of the cassette supporting mechanisms 21 and 22 is reduced and transferred simultaneously by driving a conveyer 37 so that each cassette may be conveyed on the loading mounts 12a and 12b simultaneously. Each cassette on the loading mounts 12a and 12b is simultaneously brought into the device by means of a cassette delivery device.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to two cassettes (first and second cassettes) in which a plurality of substrates are housed, from the front process of the substrate processing apparatus to the first and second cassette delivery positions, Carrying in the substrate processing apparatus through the first and second cassette loading / unloading positions, or from the substrate processing apparatus through the first and second cassette loading / unloading positions and the first and second cassette delivery positions to the substrate processing apparatus The present invention relates to a cassette loading / unloading method and device of a substrate processing apparatus for unloading to a subsequent process, and particularly to a first and second cassette loading / unloading position between a first / second cassette delivery position and a first / second cassette loading / unloading position. The present invention relates to a method and a device for conveying two cassettes.

[0002]

2. Description of the Related Art The structure of a conventional cassette loading / unloading device of this type of substrate processing apparatus will be described with reference to FIG.
FIG. 30 is a schematic diagram of a conventional substrate processing apparatus for carrying a cassette in /
It is a top view which shows schematic structure of a carrying-out apparatus.

In the figure, reference numeral 1 indicates a substrate processing apparatus. Although illustration of the inside of the apparatus is omitted, the substrate processing apparatus 1 is
Two cassettes (first cassette C1, second cassette C
2) which receives the above-mentioned 2) and performs a predetermined process (for example, cleaning and drying process) on the plurality of substrates respectively stored in the first and second cassettes C1 and C2.

As shown in FIG. 31, each cassette C1 and C2 has a U end surface U and an H end surface H, and each substrate (semiconductor wafer) W housed in each cassette C1 and C2 is The processing surface SP is housed so that the processing surface SP faces the U end surface U side.

Returning to FIG. 30, an interface stage 2 is attached outside the substrate processing apparatus 1. The interface stage 2 includes a first cassette C1.
Positions i1, I / O1, o1 for mounting the second cassette C2 and positions i2, I / O2, o2 for mounting the second cassette C2
Is provided.

I1 and i2 are positions for receiving and placing the cassettes C1 and C2, which have been conveyed from the previous process, in a procedure described later.

The I / O1 and I / O2 are provided in front of the loading / unloading port 3 of the substrate processing apparatus 1 and have the above i1 and i2.
1st, 2nd before being processed by this device 1
The cassettes C1 and C2 are loaded into the device 1 or the device 1
This is a position for carrying out the processed first and second cassettes C1 and C2 from the inside. The substrate processing apparatus 1 has an I /
The first and second cassettes C1 and C2 of O1 and I / O2 are simultaneously loaded into the device 1, and the I / O from inside the device 1 is carried out.
1, I / O2 is provided with a cassette delivery device (not shown) for simultaneously carrying out the first and second cassettes C1 and C2.

Further, o1 and o2 are I / O1 and I / O, respectively.
The first and second cassettes C that have been processed and have been transported from 2.
1 and C2 for transporting the cassettes C1 and C2 to the subsequent process,
This is the position to deliver C2.

The interface stage 2 is provided with a transfer device (not shown) for transferring the first and second cassettes C1 and C2 between the respective positions of the interface stage 2. This transfer device is the first cassette C of i1.
1 to I / O1 and the second cassette C2 of i2 to I / O2
In addition, the first cassette C1 of the I / O1 can be transported to o1 and the second cassette C2 of the I / O2 can be transported to o2, and one cassette can be transported by one transportation.

Further, this carrying device is provided with each cassette C1,
It is constructed so that the direction of the U end surface U of C2 can be changed. This is usually done as shown in FIG.
The orientation of the U end surface U of each cassette C1, C2 in 1, i2, o1, o2 is as follows.
GV ”) is directed to the side opposite to the substrate processing apparatus 1 for the convenience of cassette transfer operation, while I / O1 and I / O2
The orientation of the U end surface U of each of the cassettes C1 and C2 in FIG.
As shown in 0, it is 9 with respect to the orientation of the U end surface U of each cassette C1, C2 in i1, i2, o1, o2.
This is because it is necessary to change the angle of 0 °, and it is necessary to change the direction of the U end surface U between these positions.

[0011] Here, the loading / unloading of the cassette by the conventional device
The carry-out method (procedure) will be described below separately for automatic and manual.

[A] Procedure of automatic loading / unloading This automatic loading / unloading is carried out by the cassette C1 from the previous process to the i1 and i2 of the interface stage 2 of the apparatus 1.
Transport of C2 and interface stage 2 of this device 1
The transport of the cassettes C1 and C2 from step o1 and o2 to the subsequent step is performed by AGV. Further, this AGV places the first and second cassettes C1 and C2 on i1 and i2 at substantially the same time, and at the same time, the first and second cassettes C of o1 and o2 are placed.
It is configured to receive 1 and C2 substantially at the same time.

(A) First, the procedure of automatic loading will be described. By AGV, the first and second cassette C from the previous process
1, C2 are placed on i1 and i2 at substantially the same time. The transfer device causes the second cassette C2 of i2 to perform I / O.
While being transported to 2, the direction of the U end surface U of the second cassette C2 is changed. By the transfer device, the first cassette C1 of i1 is I / O
While being transported to 1, the direction of the U end surface U of the first cassette C1 is changed. By the cassette delivery device, the first and second cassettes C1 and C2 of I / O1 and I / O2 are loaded into the device 1 substantially at the same time.

(B) Next, the procedure of automatic carry-out will be described. By the cassette delivery device, the first and second cassettes C1 and C2 are unloaded from the device 1 to the I / O1 and I / O2 at substantially the same time. The transfer device causes the second cassette C2 of I / O2 to
While being conveyed to 2, the direction of the U end surface U of the second cassette C2 is changed (to face the side opposite to the device 1). By the transfer device, the first cassette C1 of I / O1
While being transported to 1, the direction of the U end surface U of the first cassette C1 is changed (to face the side opposite to the device 1). The first and second cassettes C1 and C2 of o1 and o2 are AG
It is received by the V at about the same time and conveyed to the subsequent process.

[B] Procedure of Manual Loading / Unloading This manual loading / unloading is carried out by placing the first and second cassettes C1 and C2 on i1 and i2 and o1 and o2 by stopping the AGV as described above. First and second cassettes C1 and C from
The operator takes out 2. Here, in order to manage the process of the line, the arrangement of the cassettes carried in / out of the apparatus 1 must be such that the first cassette C1 is on the R side and the second cassette C2 is on the L side, as shown in FIG. . Therefore, I / O1
The first cassette C1 for the I / O2 and the second cassette C for the I / O2
2 must be placed. Therefore, i1 is the first
The cassette C1 and the second cassette C2 need to be placed on i2. In the automatic processing described above, each device is controlled by the host computer that controls the line, so that the first cassette C1 is placed on i1 and the second cassette C2 is placed on i2 without fail. However, at the time of manual operation, the cassettes C1 and C2 are manually placed on the i1 and i2, so that errors are likely to occur. Therefore, in the manual loading, for example, the work is simplified by placing the cassettes one by one via i1. In addition, even during unloading, the first and second cassettes C1 and C2 are transferred to the subsequent process.
In order to make sure that the cassettes are delivered without mistake, the work is simplified by taking out the cassettes one by one via o2.

(A) First, the manual loading procedure will be described. The operator inserts the second cassette C2 from the previous process into i
Placed on 1. The second cassette C2 of i1 is transported to i2 by the transport device. By the operator, the first cassette C1 from the previous process is
Placed on 1. The transfer device causes the second cassette C2 of i2 to perform I / O.
While being transported to 2, the direction of the U end surface U of the second cassette C2 is changed. By the transfer device, the first cassette C1 of i1 is I / O
While being transported to 1, the direction of the U end surface U of the first cassette C1 is changed. By the cassette delivery device, the first and second cassettes C1 and C2 of I / O1 and I / O2 are loaded into the device 1 substantially at the same time.

(B) Next, the procedure of manual carry-out will be described. By the cassette delivery device, the first and second cassettes C1 and C2 are unloaded from the device 1 to the I / O1 and I / O2 at substantially the same time. The transfer device causes the second cassette C2 of I / O2 to
While being conveyed to 2, the direction of the U end surface U of the second cassette C2 is changed (to face the side opposite to the device 1). By the transfer device, the first cassette C1 of I / O1
While being transported to 1, the direction of the U end surface U of the first cassette C1 is changed (to face the side opposite to the device 1). The operator removes the second cassette C2 of o2. The first cassette C1 of o1 is transferred to o2 by the transfer device. The operator removes the first cassette C1 of o2.

[0018]

However, the conventional example having such a structure has the following problems. For example, the device 1 is a cleaning device and the received 2
When the individual cassettes C1 and C2 are simultaneously immersed in the cleaning tank, as shown in FIGS. 32 (a) and 32 (b), each cassette C
The smaller the interval pt between C1 and C2 is, the smaller the volume of the cleaning tank SB can be made, and the apparatus 1 can be made compact. Further, also in the substrate processing apparatus other than the cleaning apparatus, the smaller the interval pt between the cassettes C1 and C2 is, for example, as shown in FIGS. , C2, the area of the transport path HR can be reduced, and the apparatus can be made compact.

Here, the cassettes C1 and C2 in the apparatus 1 are
The interval pt depends on the interval between the cassettes C1 and C2 when they are placed on the I / O1 and I / O2, and in FIG. The interval between the cassettes C1 and C2 when the cassettes are placed is the same as the interval between the cassettes C1 and C2 when the cassettes are placed on the i1 and i2, and the cassettes C1 and C2 when placed on the i1 and i2.
Is set to the distance between the cassettes C1 and C2 when the cassette is delivered to and from the AGV. Therefore, FIG.
In the case of the above device, the interval pt between the cassettes C1 and C2 in the device 1 depends on the interval between the cassettes C1 and C2 when the cassette is delivered to and from the AGV. But,
Each cassette C at the time of delivery of the cassette with this AGV
Since the distance between C1 and C2 is usually set to be large, the device 1 cannot be made compact.

Therefore, as shown in FIG. 33, i1, i2
If the gap between the cassettes C1 and C2 when placed on the I / O1 and I / O2 is made smaller than the gap between the cassettes C1 and C2 when placed on the device 1, Can be made compact. At this time, the transfer device transfers the first cassette C1 from i1 to I / O.
1 (or from the I / O1 to the o1), the moving amount L1 and the second cassette C2 from the i2 to the I / O2.
The respective cassettes C1 and C2 are transported with a different moving amount L2 when they are transported to (or transported from I / O2 to o2).

Another problem is that the conventional carrier device can carry only one cassette at a time, so that, for example, when carrying in a cassette, i1, i2
The cassettes C1 and C2 placed on the I / O1 and I / O
When carrying the second cassette C2 from O2 to I /
Transport to O2, return transport device from I / O2 to i1,
It is necessary to carry the cassette twice such as carrying the first cassette C1 to the I / O1 (the above-mentioned automatic loading procedure, manual loading procedure,
) Further, when the cassettes C1 and C2 placed on the I / O1 and I / O2 are also conveyed to o1 and o2, the cassette must be conveyed twice in the same manner (the automatic unloading described above). Procedure, manual export procedure,),
The throughput of processing as a loading / unloading device for two cassettes is poor.

Therefore, in order to improve the processing throughput, it is conceivable that, for example, two conventional transporting devices are arranged in parallel to transport the first and second cassettes C1 and C2 at the same time.

However, two conventional conveying devices are installed side by side,
When simultaneously transporting the first and second cassettes C1 and C2,
Since the amount of movement of the cassettes C1 and C2 during conveyance is the same, it is impossible to make the apparatus compact.

That is, in the configuration of the conventional device, there is a contradictory problem that the throughput of the process is reduced in order to make the device compact, and if the throughput of the process is improved, the device cannot be made compact.

The present invention has been made in view of the above circumstances, and makes it possible to make the substrate processing apparatus compact and improve the throughput of the processing. It is an object to provide a method and an apparatus thereof.

[0026]

The present invention has the following constitution in order to achieve such an object. That is, according to the first aspect of the present invention, the first and second cassette delivery positions are provided between the pre-process and post-process of the substrate processing apparatus and the first cassette delivery position and the second cassette delivery position of the interface stage. And a first cassette loading / unloading position before loading / unloading of the substrate processing apparatus,
Between the second cassette loading / unloading position and between the first and second cassette loading / unloading positions and the substrate processing apparatus,
A cassette loading / unloading method of a substrate processing apparatus for respectively delivering a first cassette and a second cassette accommodating a plurality of substrates, the method comprising the steps of:
Between the second cassette delivery position, the cassette delivery process of delivering the first and second cassettes substantially simultaneously, and the first and second cassette delivery positions and the first and second cassette loading / unloading positions. Between the first and second cassette loading / unloading positions and the substrate processing apparatus, and a cassette transporting process in which the first and second cassettes are transported substantially simultaneously.
A cassette loading / unloading step of loading / unloading the first and second cassettes substantially at the same time, and a step of displacing a gap between the first and second cassettes in the cassette transporting step; And changing the direction of the side surface (hereinafter, referred to as “U end surface”) of the second cassette to which the processing surface of each substrate housed in each cassette is directed.

Further, the invention according to claim 2 is the method for loading / unloading a cassette of the substrate processing apparatus according to claim 1, wherein the cassette delivery step includes the preceding step or the following step, and the first or second step. Between the second cassette delivery position and one of the second cassette delivery positions, the process of delivering the second cassette and the first cassette independently is performed twice, and the first delivery and the second delivery are performed. In addition, the second or first cassette at the first or second cassette delivery position is moved between the first cassette delivery position and the second cassette delivery position.

Further, in the invention described in claim 3, the substrate processing apparatus is carried in between the first stage delivery position and the second cassette delivery position of the interface stage and the pre-process or post-process of the process by the substrate processing apparatus. / Receiving a first cassette and a second cassette containing a plurality of substrates between the first cassette carry-in / carry-out position before the carry-out port and the second cassette carry-in / carry-out position and the substrate processing apparatus, respectively In the cassette loading / unloading device of the substrate processing apparatus that transfers the first and second cassettes between the first and second cassette delivery positions and the first and second cassette loading / unloading positions while passing Supporting the first cassette,
First cassette support means for changing the direction of the U end surface of the cassette, second cassette support means for supporting the second cassette and changing the direction of the U end surface of the cassette, and the first cassette support. Means and the second cassette support means between the first and second cassette delivery positions and the first and second cassette loading / unloading positions,
It is provided with a moving means for moving at substantially the same time, and a gap displacing means for displacing the gap between the first cassette supporting means and the second cassette supporting means.

According to a fourth aspect of the present invention, in the cassette loading / unloading device of the substrate processing apparatus according to the third aspect, the moving means is the first and second cassette supporting means, and Either one of the first cassette and the second cassette is configured to be able to be conveyed between the first cassette delivery position and the second cassette delivery position.

[0030]

The method according to claim 1 mainly corresponds to the automatic loading / unloading method, and its operation is as follows. First, when the first and second cassettes are carried in, the first and second cassettes are delivered from the previous process to the first and second cassette delivery positions substantially at the same time, and then the first and second cassette delivery positions are transferred. The first and second cassettes are transported to the first and second cassette loading / unloading positions substantially at the same time, the distance between the first and second cassettes is displaced, and the U end surface of each cassette is changed. Then, carry in the first and second cassettes /
The first and second cassettes at the carry-out position are carried into the substrate processing apparatus. In addition, when the first and second cassettes are transported,
The displacement of the distance between the second cassettes and the conversion of the U-end surface of each cassette means that the first and second cassettes are transferred to the first and second cassette transfer positions, and then the first and second cassettes are loaded and unloaded. The process is performed in an appropriate order from the unloading position to the loading of the first and second cassettes into the substrate processing apparatus.

Further, the unloading of the first and second cassettes is carried out from the inside of the substrate processing apparatus to the loading / unloading positions of the first and second cassettes.
The first and second cassettes are unloaded almost simultaneously, and then the first and second
The first and second cassettes at the second cassette loading / unloading position are
The first and second cassettes are transferred to the delivery position almost at the same time, the distance between the first and second cassettes is displaced, and the U-end surface of each cassette is changed. Then, the first and second cassettes are delivered from the delivery positions of the first and second cassettes to the subsequent process substantially at the same time.

The method according to claim 2 mainly corresponds to the manual loading / unloading method, and the first or second cassette delivery position between the preceding step or the following step and the first or second cassette delivery position. The delivery of the second cassette is performed via either one of the first and second cassette delivery positions.

For example, when carrying in via the first cassette delivery position, first the second cassette is delivered from the first cassette delivery position, and then the second cassette is moved to the second cassette delivery position. Then, the first cassette is delivered from the first cassette delivery position. In addition,
When carrying in via the second cassette delivery position,
The first cassette is delivered first.

Further, for example, when the first cassette is carried out through the delivery position, the first cassette is first
The second cassette is transferred from the cassette transfer position, then the second cassette is moved to the first cassette transfer position, and the second cassette is transferred to the second cassette.
The cassette is delivered from the first cassette delivery position.
In addition, when it is carried out through the second cassette delivery position, it is delivered first from the second cassette.

The invention according to claim 3 is an apparatus for suitably carrying out the method according to claim 1, and its operation is as follows. First, in carrying in the first and second cassettes, the first and second cassettes transferred from the previous process to the first and second cassette transfer positions at substantially the same time are transferred to the first and second cassettes.
The cassette supporting means supports and then the moving means transfers the first and second cassette supporting means into / out of the first and second cassettes.
The first and second cassettes supported by the first and second cassette supporting means are moved to the carry-out position at substantially the same time and moved from the first and second cassette transfer positions to the first and second cassette carry-in / carry-out positions at substantially the same time. The first and second cassette supporting means are conveyed, and the distance between the first and second cassette supporting means is displaced by the distance displacing means.
The distance between the first and second cassettes supported by the second cassette supporting means is displaced, and the U-end surface of each cassette supported is also changed by the first and second cassette supporting means.

The unloading of the first and second cassettes is carried out from the inside of the substrate processing apparatus to the unloading / unloading positions of the first and second cassettes.
The first and second cassettes are unloaded almost simultaneously, and then the first and second
The first and second cassettes at the second cassette loading / unloading position are
The first and second cassette support means support the first and second cassette support means, and the moving means moves the first and second cassette support means to the first and second cassette delivery positions substantially simultaneously to support the first and second cassettes. The first and second cassettes supported by the means,
The second cassette carry-in / carry-out position is conveyed to the first and second cassette delivery positions substantially at the same time, and the gap between the first and second cassette support means is displaced by the gap displacement means.
The gap between the first and second cassettes supported by the first and second cassette supporting means is displaced, and the U-end surface of each cassette to be supported is also converted by the first and second cassette supporting means.

The invention according to claim 4 is an apparatus for suitably carrying out the method according to claim 2, and its operation is as follows. For example, when carrying in via the first cassette delivery position, first, the second cassette delivered via the first cassette delivery position is supported by the first or second cassette support means and moved. The second cassette is moved to the second cassette delivery position by moving the cassette support means to the second cassette delivery position by the means, and then the first cassette delivered from the first cassette delivery position to another. Is supported by the cassette supporting means.

Further, for example, in the case of carrying out through the first cassette delivery position, first the first cassette is delivered from the first cassette delivery position, and then to the first or second cassette support means. After being supported and the second cassette is transported from the second cassette delivery position to the first cassette delivery position, the second cassette is delivered from the first cassette delivery position.

[0039]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing a schematic configuration of a cassette loading / unloading device of a substrate processing apparatus according to a first embodiment of the present invention.

In the figure, reference numeral 1 indicates a substrate processing apparatus. Although the detailed structure of the inside of the apparatus is omitted, the substrate processing apparatus 1 receives two cassettes (first cassette C1 and second cassette C2), and these first and second cassettes C are received.
This is a device for performing a predetermined process (for example, cleaning and drying process) on a plurality of substrates respectively stored in C1 and C2. Each of the cassettes C1 and C2 is shown in FIG.
It has the same configuration as described in 1.

An interface stage 2 is attached outside the substrate processing apparatus 1. The interface stage 2 is provided with mounting tables 11a, 12a, 13a for mounting the first cassette C1 and mounting tables 11b, 12b, 13b for mounting the second cassette C2.

The mounting tables 11a and 11b are provided at the positions i1 and i2 of the conventional apparatus for receiving and mounting the respective cassettes C1 and C2 which have been transported from the previous process by the procedure described later. Is. In addition, this mounting table 1
The interval pt1 between 1a and 11b is from AGV to each cassette C
It is set in accordance with the interval between the cassettes C1 and C2 when receiving 1 and C2.

The mounting tables 12a and 12b are located at the positions I / O1 and I / O2 (the substrate processing apparatus 1) of the conventional apparatus shown in FIG.
(Before the loading / unloading port 3) of the
a, 11b, the first and second cassettes C1 and C2 before being processed in the present apparatus 1 are carried into the apparatus 1, or the first and second cassettes C1 that have been processed from the apparatus 1 are C
It is for carrying out 2. The substrate processing apparatus 1
Includes the first and second cassettes C of the mounting tables 12a and 12b.
1 and C2 are simultaneously loaded into the device 1, and the device 1
From the inside, the first and second cassettes C are placed on the mounting tables 12a and 12b.
Cassette delivery device 5 for simultaneously carrying out 1 and C2
0 is provided, which will be described later. In addition, the space pt2 between the mounting tables 12a and 12b is set to the device 1
Is set in accordance with the distance between the cassettes C1 and C2 when the cassettes C1 and C2 are transferred between the cassettes C1 and C2.
The distance between a and 13b) is set smaller than pt1.

Further, the mounting tables 13a and 13b are provided at the positions o1 and o2 of the conventional apparatus, and the mounting tables 12a and 12b are
12b, the processed first and second cassettes C1 and C2 are transferred to respective cassettes C in order to be transferred to a subsequent process.
This is for placing the respective cassettes C1 and C2 when delivering the first and the second C2. In addition, this mounting table 13a, 1
The interval pt1 of 3b is set according to the interval of the cassettes C1 and C2 when the cassettes C1 and C2 are delivered to the AGV, and the interval pt of the mounting tables 11a and 11b described above is set.
It is set to the same as 1.

The mounting tables 11a and 13a are placed at the first cassette delivery position in the present invention.
b corresponds to the second cassette delivery position in the present invention, and the mounting tables 12a and 12b correspond to the first and second cassette loading / unloading positions in the present invention, respectively.

Further, the interface stage 2 includes
Each mounting table 11a, 11b, 12a, 12b, 13a, 1
A groove 14 communicating with 3b is provided, and a groove 15a communicating with the mounting table 12a and the inside of the apparatus 1 and the mounting table 12 are provided.
A groove 15b is provided that connects b with the inside of the device 1.
Each of these grooves 14, 15a, 15b will be described later.

Next, the structure of the transfer device provided on the interface stage 2 will be described with reference to FIGS. 2 is a cross-sectional view taken along the line AA of FIG. 1, and FIG. 3 is a plan view showing the configuration of the carrying device. Note that in FIG. 3, a part of the guide shaft 35a is omitted.

Each mounting table 11a, 11b, 12a, 12
A first cassette support mechanism 21 and a second cassette support mechanism 22 are provided below b, 13a, 13b.
In the first cassette support mechanism 21, a shaft 32 that is extendable and retractable and is rotatable by a drive unit 31 is projected, and a cassette pedestal 33 that receives a bottom portion of the first cassette C1 is attached to a tip end portion of the shaft 32. It is the composition that was set. The base end of the shaft 32 is connected to the rotary actuator 312 in the elevating frame 311 in the drive unit 31. By rotating the shaft 32 by the rotary actuator 312 and horizontally rotating the cassette pedestal 33, the orientation of the U end surface U of the first cassette C1 received by the cassette pedestal 33 can be changed. ing. The elevating frame 311 is guided by an elevating guide 313 and is configured to be vertically movable in the Z direction by expanding and contracting a rod 314a of the cylinder 314. This allows the cassette cradle 3
3 can be moved up and down in the Z direction via the shaft 32, and the first cassette C1 received by the cassette receiving table 33 can be moved up and down in the Z direction. The configuration of the second cassette support mechanism 22 is similar to that of the first cassette support mechanism 21.

The first cassette support mechanism 21 and the second cassette support mechanism 22 are connected to the support base 23 via a link mechanism 34, and are connected to two guide shafts 35a, 35b extending in the X direction. It is slidably supported.

The link mechanism 34 includes pedestals 41a, 4 which support the lower end portions of the first and second cassette support mechanisms 21, 22, respectively.
1b is slidably supported by guide shafts 42a and 42b attached to the support base 23 along the X direction, and each base 4
The links 1a and 41b are connected to each other by a link 43 so that they can come into contact with and separate from each other, and a cylinder 44 is configured to move one support mechanism (the second cassette support mechanism 22 in the figure) in the X direction. That is, the rod 44 of the cylinder 44
By contracting / expanding a, the mounts 41a and 41b come into contact with and separate from each other via the link 43, whereby
The distance between the first and second cassette supporting mechanisms 21 and 22, that is, the first and second cassettes C1 and C2 received by the cassette receiving bases 33 and 33 of the first and second cassette supporting mechanisms 1 and 22, respectively. The distance can be changed, and the distance pt1 between the mounting tables 11a and 11b and the mounting table 13a can be changed.
Interval pt1 of 13b and interval p of the mounting tables 12a and 12b
It is possible to absorb the difference in spacing from t2.

The support base 23 is attached to a conveyor 37 driven by a motor 36. By driving the conveyor 37, the support base 23, that is, the first and second cassette support mechanisms 21 and 22 is guided. Shafts 35a, 35b
And is moved in synchronization with the X direction. The drive range of the guide shafts 35a, 35b and the conveyor 37 is, as shown in FIG. 2, the first and second cassette support mechanisms 2.
1 and 22 are set in a range in which they can be located below the mounting tables 11a and 11b, and in a state where the first and second cassette support mechanisms 21 and 22 can be located below the mounting tables 13a and 13b. . Further, reference numeral ST in the drawing indicates a support base 23.
It is a stopper that abuts against and regulates its movement.

According to this carrying device, for example, the mounting table 1
Below the 1a and 11b, the first and second cassette support mechanisms 2
1, 22 to move the cassette support 33, 33 of each cassette support mechanism 21, 22 in the Z direction,
the first and second cassettes C1 placed on a and 11b,
U end surface U of each cassette C1, C2 lifted by lifting C2 and horizontally rotating each cassette pedestal 33, 33
Of the cassette C1,
The interval of C2 is shortened, the conveyor 37 is driven, and each cassette support mechanism 21 and 22 is simultaneously moved to the mounting bases 12a and 12b, where the cassette receiving bases 33 and 33 are lowered in the Z direction and conveyed. Place the cassettes C1 and C2 on the mounting table 1
It can be placed on 2a, 12b. When the cassette support mechanisms 21 and 22 are moved with the cassettes C1 and C2 being lifted, the cassette support mechanisms 21 and 2 are moved.
The two shafts 32, 32 move through the groove 14 penetrating between the respective mounting tables. The transport of the cassettes C1 and C2 mounted on the mounting tables 12a and 12b to the mounting tables 13a and 13b can be performed in the same manner as described above (however, the interval between the cassettes C1 and C2 is increased). .

The first and second cassette support mechanisms 2 described above
Reference numerals 1 and 22 correspond to the first and second cassette supporting means of the present invention, the link mechanism 34 corresponds to the distance displacing means of the present invention, and the conveyor 37 corresponds to the moving means of the present invention.

Next, the structure of the cassette delivery device provided in the apparatus 1 will be described with reference to FIG. FIG. 4 is a perspective view showing the configuration of the cassette delivery device.

As shown in FIG. 4, this cassette delivery device 50 has a base 51 provided with a shaft 52 which is expandable and contractible in the Z direction, and an arm support 53 is attached to the upper part of the shaft 52. A reciprocating movable member 55 is provided along a groove 54 on the upper surface of 53, and a proximal end portion of an “U” -shaped arm 56 is attached to the movable member 55, and a first end portion of each arm 56 is The first cassette receiving portion 57 that receives the bottom portion of the one cassette C1 and the second cassette receiving portion 58 that receives the bottom portion of the second cassette C2 are attached.

For example, when loading the cassettes C1 and C2 mounted on the mounting tables 12a and 12b into the apparatus 1,
The shaft 52 is contracted in the Z direction, the moving member 55 is moved to the P1 side to extend the arm 56, and each cassette receiving portion 57,
58 is positioned below the mounting tables 12a and 12b, and then the shaft 52 is extended in the Z direction so that each cassette receiving portion 57,
On cassette 58, each cassette C1, C2 is received. At this time, the arm 56 ascends through the grooves 15a and 15b, so that interference between the arm 56 and the interface stage 2 can be avoided. Then, the moving member 55 is moved to the P2 side to contract the arm 56, and each cassette receiving portion 57, 5
The cassettes C1 and C2 received at 8 are carried into the apparatus 1. Further, when the cassettes C1 and C2 are carried out from the apparatus 1 to the mounting tables 12a and 12b, the operation is the reverse of the above-described carrying-in.

Next, a method (procedure) for loading / unloading each of the cassettes C1 and C2 using the apparatus of the above-described embodiment will be described separately for the cases of claims 1 and 2.

[A] Carrying in / delivering by the method according to claim 1
How to carry out. The method according to claim 1 mainly corresponds to an automatic loading / unloading method using an AGV. (A) First, the procedure of (automatic) loading will be described with reference to the flowchart of FIG. 5, the operation explanatory diagrams of FIGS. 6 and 7, and the like.

First, by AGV, the first from the previous step,
As shown in FIG. 6A, the second cassettes C1 and C2 are
Simultaneously placed on the placing tables 11a and 11b (step S
1).

Next, as shown in FIG. 6B, the directions of the U end surfaces U of the cassettes C1 and C2 are simultaneously or arbitrarily changed (step S2). When arbitrarily changing the U-end surface U, first, as shown in FIG. 7A, the cassette holder 33 of the first cassette support mechanism 21 is moved to the Z position.
7B, the first cassette C1 is lifted from the mounting table 11a, and then, as shown in FIG. 7B, the cassette receiving table 33 is horizontally swung to orient the U end surface U of the first cassette C1. , Change the direction when loading into the device 1,
Then, as shown in FIG. 7C, the cassette receiving portion 33 is lowered in the Z direction to such an extent that the first cassette C1 slightly floats from the mounting table 11a. In addition, in FIGS. 7A to 7C,
The first cassette C1 is lifted higher than the second cassette C2 to change the U-end surface U. This is to avoid interference with the second cassette C2 when the first cassette C1 horizontally turns. is there. Therefore, the mounting tables 11a, 11
The distance p between the first and second cassettes C1 and C1 placed on b
When t1 is set wide enough so as not to interfere with the second cassette C2 when the first cassette C1 is horizontally swung, as shown in FIGS. The U-end surface U of the first cassette C1 may be converted while the cassette C1 is lifted to a level slightly above the mounting table 11a. Next, the conversion of the U end surface U of the second cassette C2 is performed by the same procedure as in the case of the first cassette C1, that is, FIG. 7 (a) to (c) or FIG. 7 (d),
(E) (First and second mounted on the mounting tables 11a and 11b
This is performed when the interval pt1 between the cassettes C1 and C1 is set wide). U end surface U of each cassette C1 and C2
When each of the cassettes C1 and C2 is converted,
As shown in FIG. 7F, it is in a state of being slightly floated from each of the mounting tables 11a and 11b.

Further, when the U end surface U is converted at the same time, first, as shown in FIG. 7G, the first cassette support mechanism 21 slightly lifts the first cassette C1 from the mounting table 11a and the second cassette The cassette support mechanism 22 is
The second cassette C2 is lifted to a position higher than the first cassette C1 floated from the mounting table 11a. Next, FIG.
As shown in (h), the cassette pedestals 33, 33 of the cassette supporting mechanisms 21, 22 are horizontally swiveled to simultaneously change the directions of the U end surfaces U of the cassettes C1, C. Then, as shown in FIG. 7I, the second cassette C2 is lowered to the height of the first cassette C1. Note that FIG.
In (g) to (i), the U-end surface U is changed by lifting the second cassette C2 higher than the first cassette C1. This is to avoid the interference of the cassettes C1 and C2. Therefore, the distance pt1 between the first and second cassettes C1 and C1 mounted on the mounting tables 11a and 11b is such that both cassettes C1 and C2 do not interfere even if the cassettes C1 and C2 are horizontally swung simultaneously. If the setting is wide, as shown in FIGS. 7 (j) and 7 (k), the cassettes C1 and C2 are lifted so that they are slightly floating above the mounting tables 11a and 11b. The U end surface U may be converted at the same time.

In the case of FIGS. 7A to 7C, the first cassette support mechanism 21 is moved up and down by changing the height of the first cassette C1 in two steps. 2, instead of the cylinders 314 for raising and lowering the cassette holder 33 provided in the first cassette support mechanism 21 of FIG. 2, two cylinders having different strokes are connected in series, and the rod of one cylinder is expanded and contracted. As shown in FIGS. 7 (a) and 7 (b), the first cassette C1 can be moved up and down to a high position, and the rod of the other cylinder is expanded / contracted so that the first cassette C1 can be moved as shown in FIG. 7 (c).
This can be realized by raising and lowering 1 from the mounting table to a position slightly receiving the same. Further, by configuring the second cassette support mechanism 22 in the same manner, the height of the second cassette C2 can be changed in two stages to move up and down (see FIGS. 7G to 7I).

By the way, the orientation of the U end surface U of each cassette C1 and C2 when it is carried into the apparatus 1 may vary depending on the apparatus 1, for example, in the case of FIGS. 8 (a) and 8 (b). If available, each cassette C at the time of conversion of each U end surface U
1 and C2 have the same horizontal turning direction, but in the case of FIGS. 8C and 8D, the horizontal turning of each cassette C1 and C2 at the time of conversion of each U end surface U, for example. The direction of is reversed.

The directions of the U end surfaces U of the cassettes C1 and C2 are changed, and the cassettes C1 and C2 are mounted on the mounting table 11a,
Next, as shown in FIG. 6C, the cassettes C1 and C2 are separated from each other by a distance from the mounting table 12.
The distance is reduced to a space (pt2) that can be placed on a and 12b (step S3). This is performed by contracting the rod 44a of the cylinder 44 of the link mechanism 34 of the transfer device to reduce the distance between the cassette supporting mechanisms 21 and 22. When the rod 44a of the cylinder 44 of the link mechanism 34 is extended, the cassettes C1 and C2 at the interval of pt1 can be received by the cassette receiving trays 33 and 33 of the cassette supporting mechanisms 21 and 22, and the rod 44 of the cylinder 44 can contract. When you do, pt
2 cassettes C1 and C2 at intervals of 2 are provided for each cassette support mechanism 2
The link mechanism 34 is configured so that it can be received by the cassette receiving trays 33 and 33 of Nos. 1 and 22, respectively.

Next, as shown in FIG. 6D, the cassettes C1 and C2 are simultaneously conveyed to the mounting tables 12a and 12b (step S4). This drives the conveyor 37 to move the cassette support mechanisms 21 and 22 at the same time, move the cassettes C1 and C2 above the mounting tables 12a and 12b, and then move the cassettes C1 and C1. The cassettes C1 and C2 are moved down in the Z direction to load the respective mounting tables 12a and 12b
It is carried out by placing it on. In addition, each cassette C
When 1 and C2 are placed on the respective mounting tables 12a and 12b, the respective cassette support mechanisms 21 and 22 are moved from that position to, for example, the mounting tables 11a and 11b side and retracted.

Finally, as shown in FIG. 6 (e), the cassette delivery device 50 simultaneously carries in the cassettes C1 and C2 placed on the mounting tables 12a and 12b into the device 1 (step S5).

In the above method, each cassette C1,
After changing the direction of the U end surface U of C2, the gap between the cassettes C1 and C2 is displaced, and then the cassettes C1 and C2 are displaced.
Although C2 is simultaneously conveyed to the mounting tables 12a and 12b, the order of steps S2 to S4 may be changed as appropriate. For example,
After the cassettes C1 and C2 are simultaneously conveyed to the mounting tables 12a and 12b, the directions of the U end surfaces U of the cassettes C1 and C2 may be changed, and the distance between the cassettes C1 and C2 may be displaced after that. (Steps S4-S2-S3), after changing the direction of the U end surface U of each of the cassettes C1 and C2,
The cassettes C1 and C2 may be simultaneously conveyed to the mounting tables 12a and 12b, and then the distance between the cassettes C1 and C2 may be displaced (steps S2-S4-S3).

Further, (steps S3-S2-S4),
(Step S3-S4-S2), (Step S4-S3
-S2) may be performed in this order, but in these cases, the U-end surface U of each cassette C1, C2 is
Prior to the change of the direction, the distance between the cassettes C1 and C2 is displaced. Therefore, each cassette C1, C2
Of the U end surface U of each cassette C1, C2
Is performed in a state in which the interval between the cassettes C1 and C2 is narrow (pt2), and when the cassettes C1 and C2 are horizontally turned when the direction of the U end surface U of the cassettes C1 and C2 is changed.
1 and C2 easily interfere with each other, so that the cassettes C1 and C2
It is preferable to perform the procedure in which the direction of the U end surface U of each cassette C1 and C2 is changed prior to the displacement of the space.

Further, in the above-described method, the steps S3 and S4 are performed after (or before) the direction change of the U end surface U of the first and second cassettes C1 and C2. However, for example, the direction of the U end surface U of the first cassette C1 is changed, and then each cassette C
1 and C2 are simultaneously conveyed to the mounting tables 12a and 12b, and then the direction of the U end surface U of the second cassette C2 is changed. , C2, the process of step S3 or / and S4 may be interposed between the conversion of the U end surface U of C2.

It should be noted that this can be modified in the same manner for manual loading described later and for each embodiment described later (both automatic and manual).

(B) Next, the procedure of (automatic) carry-out will be described with reference to the flowchart of FIG. 9 and the operation explanatory diagram of FIG. First, as shown in FIG. 10A, the cassette delivery device 50 includes a cassette C1 that has been processed from the inside of the device 1.
C2 is simultaneously carried out to the mounting tables 12a and 12b (step S11).

Next, as shown in FIG. 10B, the space between the cassettes C1 and C2 is expanded to the space (pt1) at which the cassettes C1 and C2 can be mounted on the mounting tables 13a and 13b (step S12). This is because the first and second cassette support mechanisms 21 and 22 lift the respective cassettes C1 and C2 from the mounting tables 12a and 12b, and conversely to the above-described automatic loading step S3, the cylinder 44 of the link mechanism 34 of the transfer device. Rod 44a is extended. When the cassettes C1 and C2 are lifted from the mounting tables 12a and 12b, the rod 44a of the cylinder 44 of the link mechanism 34 of the transfer device is in a contracted state.

Next, the direction of the U end surface U of each of the cassettes C1 and C2 is switched to the side opposite to the device 1 (step S1).
3). This conversion of the U end surface U is the same as the above-described automatic loading step S2 (each operation in FIG. 7).

Next, as shown in FIG. 10D, the cassettes C1 and C2 are simultaneously conveyed to the mounting tables 13a and 13b (step S14). This is performed by driving the conveyor 37, as in step S4 of the automatic loading described above.

Finally, as shown in FIG. 10 (e), the first and second cassettes C1 and C2 of the mounting tables 13a and 13b are
At the same time, it is received by the AGV and conveyed to the subsequent process (step S15).

Even in the automatic carry-out procedure, the order of the steps S12 to S14 may be appropriately changed as in the case of the automatic carry-in. It should be noted that this can be similarly modified in the manual unloading described below and the unloading (both automatic and manual) of each embodiment described below.

In addition, step S1 at the time of automatic loading described above.
The step S15 at the time of automatic unloading is the steps S2 to S4 at the time of automatic loading and the steps S12 to S14 at the time of automatic unloading in the cassette delivery process in the invention described in claim 1. The step S5 at the time of automatic loading and the step S11 at the time of automatic loading described above in the cassette carrying process in the invention of item 1 respectively correspond to the cassette loading / unloading process in the invention of claim 1.

As described above, in the automatic loading / unloading process of the apparatus of this embodiment, the mounting table 11a, the loading table 11a of each cassette C1, C2,
Since the transfer from 11b to the mounting tables 12a and 12b and the transfer from the mounting tables 12a and 12b to the mounting tables 13a and 13b are performed at the same time, the throughput of processing is improved as compared with the conventional apparatus. In addition, since the distance between the cassettes C1 and C2 can be changed, the cassettes C1 and C2 to be loaded into and unloaded from the apparatus 1 can be operated independently of the distance between the cassettes C1 and C2 when delivering the cassettes C1 and C2 by AGV. The interval can be reduced, and the device 1 can be made compact.

[B] Carrying in / delivering by the method according to claim 2
How to carry out. The method according to claim 2 mainly corresponds to a manual loading / unloading method by an operator. (A) First, the (manual) loading procedure will be described with reference to the flowchart of FIG. 11 and the operation explanatory diagrams of FIGS. 12 and 13.

First, the operator inserts the second cassette C2 from the previous step into the mounting table 11 as shown in FIG. 12 (a).
It is placed on a (step S21).

Next, as shown in FIG. 12B, the second cassette C2 mounted on the mounting table 11a is transferred to the mounting table 11b.
And is mounted on the mounting table 11b (step S2
2). As shown in FIG. 13A, this is because the cassette receiving table 33 of the first cassette supporting mechanism 21 is lifted in the Z direction to slightly float the second cassette C2 from the mounting table 11a.
As shown in FIG. 13B, the conveyor 37 is driven to move the second cassette C2 above the mounting table 11b, and, as shown in FIG. 13C, the cassette of the first cassette support mechanism 21. This is performed by lowering the receiving table 33 in the Z direction and mounting the second cassette C2 on the mounting table 11b. In addition,
When this operation is completed, as shown in FIG. 13D, the cassette receiving portions 33, 3 of the cassette supporting mechanisms 21, 22 are formed.
3 is positioned below the mounting tables 11a and 11b,
The cassette support mechanisms 21 and 22 are returned to their original positions.

Next, as shown in FIG. 12 (c), the operator places the first cassette C1 from the previous step on the mounting table 11
It is placed on a (step S23).

Next, the U end surfaces U of the cassettes C1 and C2 placed on the mounting tables 11a and 11b are changed (step S24), and the distance between the cassettes C1 and C2 is displaced to pt2 (step S25). , The cassettes C1 and C2 are simultaneously conveyed to the mounting tables 12a and 12b (step S26),
The cassettes C1 and C2 of the mounting tables 12a and 12b are installed in the device 1
It is carried in at the same time (step S27), but this is carried out by the above-mentioned automatic carrying-in steps S2 to S5 (FIG. 5, FIG.
6 (b) to (e)), detailed description thereof is omitted here.

In the above description, the operator is configured to deliver the cassettes C1 and C2 one by one via the mounting table 11a, but the cassettes C1 and C2 may be transferred via the mounting table 11b. The apparatus of the present embodiment can be applied even when it is configured to deliver one by one.

The procedure in this case is the above-mentioned steps S21-S21.
Instead of S23, first, the operator mounts the first cassette C1 from the previous step on the mounting table 11b as shown in FIG. 14A, and then as shown in FIG. 14B. To
The first cassette C1 placed on the placing table 11b is moved to the placing table 11a and placed on the placing table 11a, and then the second cassette C2 from the previous step is changed by the operator as shown in FIG.
As shown in (c), it will be mounted on the mounting table 11b.

The operation of the first cassette C1 mounted on the mounting table 11b being moved to the mounting table 11a and mounted on the mounting table 11a is performed by the conveyor 37 as shown in FIG. 15 (a). By driving, the first cassette supporting mechanism 21 is moved to the lower side of the mounting table 11b, and then the cassette receiving table 33 of the first cassette supporting mechanism 21 is moved to the Z position as shown in FIG.
15C, the first cassette C1 is slightly floated from the mounting table 11b, and then the conveyor 37 is driven to move the first cassette C1 above the mounting table 11a, as shown in FIG. Then, as shown in FIG. 15D, the cassette receiving table 33 of the first cassette supporting mechanism 21 is lowered in the Z direction to mount the first cassette C1 on the mounting table 11a.

In FIG. 2, the conveyor 37 is extended and the stopper ST on the right side is further shifted to the right side so that the second cassette support mechanism 22 moves the range of movement of each cassette support mechanism 21 and 22 on the mounting table 11a. As shown in FIG. 16A, the operation of moving the first cassette C1 configured to be able to move to the lower side and mounted on the mounting table 11b to the mounting table 11a and mounting it on the mounting table 11a is performed as shown in FIG. , The cassette receiving table 33 of the second cassette supporting mechanism 22 is lifted in the Z direction to slightly lift the first cassette C1 from the mounting table 11b,
Next, as shown in FIG. 16 (b), the conveyor 37 is driven to move the first cassette C1 to above the mounting table 11a, and as shown in FIG. 16 (c), the second cassette support mechanism. Lower the cassette holder 33 of 22 in the Z direction,
The first cassette C1 may be mounted on the mounting table 11a. At this time, after the operation of FIG. 16 (c) is completed, as shown in FIG. 16 (d), the cassette receiving portions 33, 33 of the cassette supporting mechanisms 21, 22 are moved to the mounting table 11 respectively.
Each cassette support mechanism 21 and 22 is returned to the original position so that it may be located below a and 11b.

(B) Next, the procedure of (manual) unloading is shown in FIG.
The flowchart will be described with reference to the flowchart of FIG. First, the processed cassette C1 from the inside of the device 1,
C2 is carried out to the mounting tables 12a and 12b at the same time (step S31), and then the interval between the cassettes C1 and C2 is expanded to an interval (pt1) that can be mounted on the mounting tables 13a and 13b (step S32). , U of each cassette C1 and C2
The direction of the end surface U is changed to the side opposite to the device 1 (step S33), and the cassettes C1 and C2 are placed on the mounting table 13
It is carried to the a and 13b at the same time (step S34), which is the above-mentioned automatic carrying-out step S11-S11.
Since it is the same as S14 (see FIGS. 9 and 10A to 10D), detailed description thereof will be omitted.

The operation of step S34 is completed, that is,
As shown in FIG. 18 (a), in a state in which the cassettes C1 and C2 are placed on the mounting tables 13a and 13b, respectively, the operator mounts the second cassette C2 as shown in FIG. 18 (b). It is taken out from the table 13b (step S3
5).

Next, as shown in FIG. 18C, the first cassette C1 mounted on the mounting table 13a is replaced by the mounting table 1
It moves to 3b and is mounted on the mounting base 13b (step S36). For example, the conveyor 37 is driven to move the second cassette support mechanism 22 to the lower side of the mounting table 13a, and the cassette support 33 of the second cassette support mechanism 22 is moved to the Z position.
Direction, the first cassette C1 is slightly floated from the mounting table 13a, and the conveyor 37 is driven to drive the first cassette C1.
Is moved above the mounting table 13b, and the cassette receiving table 33 of the second cassette supporting mechanism 22 is lowered in the Z direction to mount the first cassette C1 on the mounting table 13b. In addition, the first cassette support mechanism 21 is mounted on the mounting table 13b.
When it is configured to be able to move to the lower part of the table, the cassette receiving table 33 of the first cassette supporting mechanism 21 is raised in the Z direction below the mounting table 13a, and the first cassette C1 is slightly lifted from the mounting table 13a. First, drive conveyor 37
The cassette C1 is moved above the mounting table 13b, and the cassette receiving table 33 of the first cassette supporting mechanism 21 is moved to Z
It is also possible to descend in the direction and mount the first cassette C1 on the mounting table 13b.

Finally, by the operator, the first cassette C1
Is taken out from the mounting table 13b as shown in FIG. 18 (d) (step S37).

In the above description, the operator takes out the cassettes C1 and C2 one by one through the mounting table 13b, but the cassettes C1 and C2 are separated by one through the mounting table 13a. The apparatus of this embodiment can be applied even when the apparatus is configured to take out one by one.

The procedure in this case is the above-mentioned steps S35 to S35.
Instead of S37, firstly, by the operator, the first cassette C
1 is taken out from the mounting table 13a, and then the mounting table 13b
The second cassette C2 mounted on the mounting table 13a is moved to the mounting table 13a and mounted on the mounting table 13a.
The second cassette C2 is taken out from the mounting table 13a. Further, the movement operation of the second cassette C2 in this case can be performed by appropriately using the first cassette support mechanism 21 or the second cassette support mechanism 22.

Incidentally, the above-mentioned step S2 at the time of manual loading.
1 to S23 and steps S35 to 37 at the time of this manual carry-out
And corresponds to the cassette delivery process in the invention described in claim 2.

As described above, in the apparatus of this embodiment, the throughput of the process can be improved and the apparatus can be made compact even in the manual loading / unloading, as in the case of the automatic loading / unloading.

In the carrying apparatus of the above-described embodiment, the gap displacing means is constituted by the link mechanism 34, and the cassette supporting mechanisms 21 and 22 are brought into contact with and separated from each other so that the gap between the cassettes C1 and C2 is displaced. However, for example, one cassette support mechanism 21 (or 22) is fixed to the support base 23, and the other cassette support mechanism 22 (or 21) is fixed to the support base 23 by contraction / extension of the rod of the cylinder. Alternatively, the cassette supporting mechanism 21 (or 22) may be brought into contact with or separated from the cassette supporting mechanism 21 (or 22) to displace the space between the cassettes C1 and C2.

Next, the configuration of the second embodiment device of the present invention will be described with reference to FIG. FIG. 19 is a plan view showing the configuration of the second embodiment device.

The apparatus of the second embodiment comprises the mounting tables 11a, 1
1b, 12a, 12b, 13a, 13b are eliminated, i
1, i2, o1, o2 each cassette C1, C2 delivery to and from the AGV, and I / O1, I / O2 cassette delivery device each cassette C1, C2 delivery, each cassette support mechanism 21, 22 cassette cradle 3
It is configured so as to be placed and carried on Nos. 3 and 33.

That is, each cassette support mechanism 21, 22
With the cassette pedestals 33 of 33 positioned above the interface stage 2,
A shaft 32 of 1, 22 is configured to be movable through the groove 14. The groove 14 is provided between the cassette support 33 of the second cassette support mechanism 22 and the cassette support 33 of the first cassette support mechanism 21 at o1 and o2, respectively. 21, 22
Are provided so that they can move in synchronization.

Also, the cassette delivery device 6 of this embodiment
0 is configured as shown in FIG. The cassette delivery device 50 according to the first embodiment has the cassettes C1 and C
In contrast to carrying in / out cassettes by supporting the bottom part of the cassette 2, the cassette delivery device 60 has
The brim T of 1 and C2 is gripped by the hanger 66 to carry in / out the cassette.

Specifically, a shaft 62 that can move up and down in the Z direction is attached to a base 61, an arm support 63 is attached to the upper part of the shaft 62, and the arm support 6 is also attached.
3, a movable member 64 movable in the Y direction is attached,
Further, a base end portion of the arm 65 is attached to the moving member 64, and a drive portion 67 to which two sets of openable and closable hangers 66 are attached is attached to a tip end portion of the arm 65.

In the carrying-in operation of the cassette delivery device 60, the shaft 62 is raised in the Z direction and the arm 65 is extended so that each cassette C located in I / O1 and I / O2 can be moved.
1, move the drive unit 67 above C2, and move each hanger 6
In a state where 6 is opened, the shaft 62 is lowered in the Z direction to lower each hanger 66, and each hanger 66 is moved to each cassette C.
The hangers 66 are closed in a state where they are located on the sides of the brims T of C1 and C2 and the brims T of the cassettes C1 and C2 are gripped by the hangers 66. Then, the shaft 62 is raised in the Z direction, the arm 65 is contracted, and the cassettes C1 and C2 are carried into the apparatus 1. When carrying out the cassettes C1 and C2, the procedure is the reverse of the above-mentioned carrying-in.

The other construction of the second embodiment device is the same as that of the above-mentioned first embodiment device, and therefore detailed description thereof is omitted here.

Next, a method of loading / unloading a cassette by the apparatus of the second embodiment will be briefly described. In automatic loading, first, as shown in FIG. 21, each cassette support mechanism 21, 2
2 is located at i1 and i2, the cassettes C1 and C2 are moved to the cassette support mechanisms 21 and 21 by the AGV.
The cassette holders 33, 33 of 22 are mounted. Next, the direction of the U end surface of each cassette C1 and C2 is changed, and the distance between each cassette C1 and C2 is reduced to pt2.
The cassettes C1 and C2 are simultaneously transported to I / O1 and I / O2. Then, the state of being mounted on the cassette pedestals 33, 33 of the respective cassette support mechanisms 21, 22 (see FIG. 21)
Then, each of the cassettes C1 and C2 is a cassette delivery device 60.
It is carried into the device 1 by.

In the automatic unloading, first, as shown in FIG. 21, the cassette supporting mechanisms 21 and 22 are connected to the I / O 1
Cassette delivery device 6 in the state of being located at I / O2
0, the cassettes C1 and C2 are placed on the cassette receiving trays 33 and 33 of the cassette supporting mechanisms 21 and 22, respectively. Next, the distance between the cassettes C1 and C2 is expanded to pt1, the direction of the U end surfaces of the cassettes C1 and C2 is changed, and the cassettes C1 and C2 are simultaneously conveyed to o1 and o2. Then, the state of being mounted on the cassette pedestals 33, 33 of the respective cassette support mechanisms 21, 22 (see FIG. 21)
Then, the cassettes C1 and C2 are taken out by the AGV.

In the case of manual loading, first, as shown in FIG.
22B, with the second cassette support mechanism 22 positioned at i1, as shown in FIG. 22B, the operator inserts the cassette cradle 33 of the second cassette support mechanism 22 through i1. The second cassette C2 is placed on top of it, and then, as shown in FIG.
2 to move the first and second cassette support mechanisms 21 and 22.
22D, the operator places the first cassette C1 on the cassette pedestal 33 of the first cassette support mechanism 21 via i1 as shown in FIG. 22 (d). To be done. After that, the cassettes C1 and C2 are loaded into the apparatus 1 in the same manner as the automatic loading described above.

In the manual unloading, as in the automatic unloading described above, as shown in FIG.
In the state where the distance between 1 and C2 is expanded to pt1 and the U end surface is converted and conveyed to o1 and o2, as shown in FIG. The second cassette C2 placed by the operator
O2, and then, as shown in FIG. 23 (c), each cassette support mechanism 21, 22 is moved to the first position.
2 with the cassette support mechanism 21 positioned at o2.
As shown in FIG. 3 (d), the first cassette C1 placed on the cassette receiving stand 33 of the first cassette support mechanism 21 is taken out by the operator via o2.

Also in this second embodiment device, the same effect as that of the first embodiment device can be obtained. When the cassettes C1 and C2 do not interfere with each other during the horizontal swing of the cassettes C1 and C2 in the above-mentioned conversion of the U end surfaces of the cassettes C1 and C2 for loading / unloading, the state shown in FIG. , The U-end surface of each cassette C1, C2 can be converted,
Further, in this embodiment, since it is not necessary to mount the cassettes C1 and C2 on the mounting table, the cassette supporting mechanisms 21 and 2
2, it is not necessary to provide a mechanism for moving the cassette receiving trays 33, 33 up and down in the Z direction.

Further, in the above description, at the time of manual loading, the cassettes C1 and C2 are delivered via i1.
When the cassettes C1 and C2 are delivered via i2, as shown in FIG. 24 (a), the first cassette support mechanism 21 is positioned at i2 as shown in FIG. 24 (b). Then, the operator inserts the first cassette C1 onto the cassette pedestal 33 of the first cassette support mechanism 21 via i2.
24. Next, as shown in FIG. 24C, the cassette supporting mechanisms 21, 22 are moved to position the first and second cassette supporting mechanisms 21, 22 at i1 and i2. Then, as shown in FIG. 24D, an operator places the second cassette C2 on the cassette pedestal 33 of the second cassette support mechanism 22 via i2. Therefore, in this case, as shown in FIG. 25A, the groove 14 may be provided so that the first cassette support mechanism 21 can be positioned up to i1, and the groove 14 in the X direction of the interface stage 2 as compared with FIG. The size of can be reduced.

Further, in the above description, each cassette C1 and C2 is taken out through o2 at the time of manual carry-out, but when each cassette C1 and C2 is taken out through o1, FIG. ), Each cassette C1, C2
26 is conveyed to o1 and o2, as shown in FIG. 26B, the cassette holder 33 of the first cassette support mechanism 21.
The first cassette C1 placed on the
26C, the cassette supporting mechanisms 21 and 22 are moved to position the second cassette supporting mechanism 22 at o1 as shown in FIG.
As shown in (d), the second cassette C2 placed on the cassette pedestal 33 of the second cassette support mechanism 22 is taken out by the operator via o1. Therefore, in this case, as shown in FIG. 25B, the groove 14 may be provided so that the second cassette support mechanism 22 can be positioned up to o2. The size of can be reduced.

Further, as shown in FIG. 27, the mounting tables 12a and 12 are attached to the I / O1 and I / O2 of the apparatus of the second embodiment.
b, each mounting table 12a, 12b and the device 1 are provided.
You may provide the groove 15a, 15b which connects with the inside. In this case, the cassette delivery device 50 of the first embodiment device is used as the cassette delivery device.

Next, the configuration of the third embodiment device of the present invention will be described with reference to FIG. FIG. 28 (a) is a plan view showing the configuration around i1 and i2 of the third embodiment device.
FIG. 8B is a plan view showing a configuration around o1 and o2 of the third embodiment device.

In the third embodiment, the mounting table 1 is placed on i2.
1b is provided, and a mounting table 13a is provided at o1. In addition, the I / O1 and I / O2 have mounting tables 12a and 1
2b may or may not be provided.

For example, each cassette C1, C via i1
In the case of manual loading for delivery of 2, the first cassette support mechanism is first moved with each cassette support mechanism 21, 22 being positioned at i1 and i2. The second cassette C2 is received by the cassette pedestal 33 of 21 and then the respective cassette support mechanisms 21, 2
2 is moved to position the first cassette support mechanism 21 at i2, and the second cassette C2 is mounted on the mounting table 11b. Then, the cassette support mechanisms 21, 22 are moved to move the first,
The second cassette support mechanisms 21 and 22 are again positioned at i1 and i2, and the cassette pedestal 33 of the second cassette support mechanism 22 is positioned.
Is moved in the Z direction to move the second cassette C of the mounting table 11b.
2 is lifted from the mounting table 11b, and the cassette receiving stand 33 of the first cassette supporting mechanism 21 located at i1.
Then, the first cassette C1 is received. In this way, since the second cassette C2 received earlier can be placed on the temporary placement table 11b, each cassette support mechanism 21, 22 can freely move even after receiving the second cassette C2. In the second embodiment, in the case of manual loading in which the cassettes C1 and C2 are delivered via i1, it is necessary to position the second cassette support mechanism 22 at i1, and therefore the dimension of the interface stage 2 in the X direction. However, in the third embodiment, such inconvenience is avoided.

In addition, the cassettes C1 and C2 are connected via o2.
In the case of manual unloading for removing the cassettes, first, the spacing is expanded to pt1 and the cassettes C1 and C having U-end surfaces are changed.
2 is transported to o1 and o2, and then the second
After the cassette C2 is taken out, the first cassette C supported by the cassette receiving table 33 of the first cassette supporting mechanism 21.
1 is once placed on the placing table 13a, and each cassette support mechanism 2
In a state in which the first and second cassettes 22 are moved to position the second cassette support mechanism 22 at o1, the first cassette C1 is lifted from the mounting table 13a by the cassette support 33 of the second cassette support mechanism 22, and each cassette support mechanism 21 and 22 are moved to position the first and second cassette support mechanisms 21 and 22 at o1 and o2, and in this state, the first cassette C1 is placed on the cassette pedestal 33 of the second cassette support mechanism 22 through o2. Taken from. In this way, since the first cassette C1 to be taken out later can be placed on the temporary placement table 13a, when the first cassette C1 is moved to o2, each cassette support mechanism 2
1, 22 can move freely. In the second embodiment, o
In the case of manual unloading of the cassettes C1 and C2 via the second cassette 2, it is necessary to position the first cassette support mechanism 21 at o2.
Although the dimension in the direction becomes large, such inconvenience is avoided in this third embodiment.

Incidentally, these things have the same effect when the mounting tables 11a and 11b are provided on the i1 and i2 as in the first embodiment.

In addition to the above-mentioned respective embodiments, for example, the mounting table 11b may be provided only for i2 or the mounting table 13a may be provided only for o1, or i1, i2, o1, and o2.
The mounting tables 11a, 11b, 13a, 13b are provided on the
The O1 and I / O2 may not be provided with a mounting table.

Next, the configuration of the apparatus of the fourth embodiment of the present invention will be described with reference to FIG. FIG. 29 is a plan view showing the configuration of the fourth embodiment device.

The first to third embodiments described above are the same as the first,
Two sets of second cassette delivery positions (i1, i1 and o1, o
2) is provided to load / unload the first and second cassettes C1 and C2.
One set of second cassette delivery position (i / o1, i / o2)
Is a device for loading and unloading the first and second cassettes C1 and C2. That is, the present embodiment can be applied to an apparatus in which the carry-in port and the carry-out port of the substrate processing apparatus 1 are different.

It should be noted that each cassette delivery position i / o1, i
/ O2 is provided with mounting tables 16a and 16b, and
The interface stage 2 is equipped with the transfer device described in the first embodiment.

For example, when carrying in the respective cassettes C1 and C2, the respective cassettes C1 and C2 are received by i / o1 and i / o2, the U end surfaces of the respective cassettes C1 and C2 are converted, and the interval is set to pt2. Shrink the cassettes C1 and C2 to I
/ O1 and I / O2 at the same time, and are loaded into the apparatus 1 at the same time. In addition, since other detailed procedures for automatic loading and manual loading are the same as those in the above-described first embodiment,
Detailed description here is omitted.

When carrying out the cassettes C1 and C2, the cassettes C1 and C2 are transferred from the apparatus 1 to the I / O1,
Carry out to I / O2 at the same time, widen the interval to pt1, convert the U-end surface of each cassette C1, C2,
1 and C2 are simultaneously conveyed to i / o1 and i / o2, and the cassettes C1 and C2 are taken out. In addition, other automatic delivery,
The detailed procedure at the time of manual carry-out is the same as in the case of the above-described first embodiment, and therefore detailed description thereof is omitted here.

Further, with the construction of the apparatus of the fourth embodiment, loading / unloading of the respective cassettes C1 and C2, that is, the respective cassettes C1 and C2 from the previous step [i / o1, i / o
2], [I / O1, I / O], and the cassettes C1 and C2 are transferred from the inside of the device 1 to [I / O
Of course, it is also possible to carry it out to a subsequent process via O1, I / O], [i / o1, i / o2].

Also in the apparatus of the fourth embodiment, as in the second and third embodiments and their modifications, the mounting table 16a,
16b, 17a, 17b may not be provided, or the mounting tables 16a, 16b, 17a, 17b may be selectively provided. The carrying-in / carrying-out procedure in that case is performed as described in each of the embodiments and its modification.

[0125]

As is apparent from the above description, according to the method described in claim 1, mainly in automatic loading / unloading, the first and second cassette delivery positions and the first and second cassette loading / unloading positions. Since the first and second cassettes are transported to and from the unloading position substantially at the same time, the processing sleep is improved, and the intervals between the cassettes are displaced, so that the cassettes such as the automatic transporting device can be easily delivered at the time of delivery. Since the interval between the cassettes carried into the device can be arbitrarily set without depending on the interval between the cassettes, the device can be made compact.

According to the method described in claim 2, mainly in manual loading / unloading, the processing throughput is improved as in the case of claim 1, and the apparatus can be made compact.

According to the apparatus described in claim 3, the method described in claim 1 can be suitably implemented.

According to the invention described in claim 4, it is possible to preferably carry out the method described in claim 2.

[Brief description of drawings]

FIG. 1 is a plan view showing a schematic configuration of a cassette loading / unloading device of a substrate processing apparatus according to a first embodiment of the present invention.

FIG. 2 is a sectional view taken along the line AA of FIG.

FIG. 3 is a plan view showing a configuration of a transfer device.

FIG. 4 is a perspective view showing a configuration of a cassette delivery device.

FIG. 5 is a flowchart showing a procedure of automatic loading of the apparatus of the first embodiment.

FIG. 6 is a diagram for explaining a procedure at the time of automatic loading of the first embodiment device.

FIG. 7 is a diagram for explaining a procedure at the time of automatic loading of the first embodiment device.

FIG. 8 is a diagram showing the orientation of the U-end surface of each cassette that is taken into the apparatus.

FIG. 9 is a flowchart showing a procedure for automatically carrying out the apparatus of the first embodiment.

FIG. 10 is a diagram for explaining a procedure when the apparatus of the first embodiment is automatically carried out.

FIG. 11 is a flowchart showing a procedure for manually loading the apparatus of the first embodiment.

FIG. 12 is a view for explaining the procedure at the time of manual loading of the first embodiment device.

FIG. 13 is a view for explaining the procedure at the time of manual loading of the first embodiment device.

FIG. 14 is a view for explaining the procedure at the time of manual loading of the apparatus of the first embodiment.

FIG. 15 is a view for explaining the procedure at the time of manual loading of the first embodiment device.

FIG. 16 is a view for explaining the procedure at the time of manual loading of the apparatus of the first embodiment.

FIG. 17 is a flowchart showing a procedure for manually carrying out the apparatus of the first embodiment.

FIG. 18 is a diagram for explaining a procedure for manually carrying out the apparatus according to the first embodiment.

FIG. 19 is a plan view showing the configuration of the second embodiment device.

FIG. 20 is a diagram showing the configuration of a cassette delivery device of the second embodiment device.

FIG. 21 is a view for explaining the procedure of automatic loading / unloading of the apparatus of the second embodiment.

FIG. 22 is a view for explaining the procedure at the time of manual loading of the second embodiment device.

FIG. 23 is a diagram for explaining a procedure for manually carrying out the apparatus of the second embodiment.

FIG. 24 is a view for explaining the procedure at the time of manual loading of the second embodiment device.

FIG. 25 is a plan view showing the configuration of a modified example of the second embodiment device.

FIG. 26 is a view for explaining the procedure at the time of manually carrying out the apparatus of the second embodiment.

FIG. 27 is a plan view showing the configuration of a modified example of the second embodiment device.

FIG. 28 is a plan view showing the configuration of the third embodiment device.

FIG. 29 is a plan view showing the configuration of the fourth example device.

FIG. 30 is a plan view showing a schematic configuration of a conventional device.

FIG. 31 is a perspective view showing a configuration of a cassette.

FIG. 32 is a diagram for explaining a problem of the conventional device.

FIG. 33 is a diagram for explaining a problem of the conventional device.

[Explanation of symbols]

 1 ... Substrate processing device 2 ... Interface stage 3 ... Cassette loading / unloading port 21 ... First cassette support mechanism 22 ... Second cassette support mechanism 23 ... Support stand 31 ... Drive part 32 ... Shaft 33 ... Cassette stand 34 ... Link mechanism 36 ... Motor 37 ... Conveyor 50, 60 ... Cassette delivery device C1 ... First cassette C2 ... Second cassette

Claims (4)

[Claims] 1. A pre-process or post-process of processing by a substrate processing apparatus and a first cassette delivery position and a second cassette delivery position of an interface stage, and the first and second cassette delivery positions of the substrate processing apparatus. Before the loading / unloading port, a plurality of sheets are provided between the first cassette loading / unloading position and the second cassette loading / unloading position, and between the first and second cassette loading / unloading positions and the substrate processing apparatus. A cassette loading / unloading method of a substrate processing apparatus for respectively delivering a first cassette and a second cassette in which substrates are stored, the method comprising: between the preceding step or the following step and the first and second cassette delivery positions. A cassette delivery process for delivering the first and second cassettes substantially at the same time, and the first delivery between the first and second cassette delivery positions and the first and second cassette loading / unloading positions. A cassette carrying process for carrying the second cassette substantially at the same time, and a cassette carrying the first and second cassettes at substantially the same time between the first and second cassette carrying-in / carrying-out positions and the substrate processing apparatus. A step of displacing the gap between the first and second cassettes, and a step of processing each substrate stored in each cassette of the first and second cassettes, The side to which the surface faces (hereinafter referred to as the "U end surface")
And a step of changing the direction of the substrate processing apparatus.
How to carry out. 2. The cassette loading / unloading method for a substrate processing apparatus according to claim 1, wherein the cassette delivery process includes one of the pre-process and post-process and the first or second cassette delivery position. The process of independently delivering the second cassette and the first cassette to the cassette delivery position is performed twice, and the first cassette delivery position and the first cassette delivery position are set between the first delivery and the second delivery. A cassette loading / unloading method for a substrate processing apparatus, wherein the second or first cassette at the first or second cassette delivery position is moved between the two cassette delivery positions. 3. A first cassette loading before a loading / unloading port of the substrate processing apparatus between a pre-process or a post-process of processing by the substrate processing apparatus and a first cassette delivery position or a second cassette delivery position of the interface stage. / Unloading position,
Between the second cassette loading / unloading position and the inside of the substrate processing apparatus, the first cassette and the second cassette storing a plurality of substrates are respectively transferred, and the first and second cassettes are transferred.
In a cassette loading / unloading device of a substrate processing apparatus that transports the first and second cassettes between a cassette delivery position and the first and second cassette loading / unloading positions, the first cassette is supported, First cassette support means for changing the direction of the U end surface of the cassette; second cassette support means for supporting the second cassette and changing the direction of the U end surface of the cassette; and the first cassette support. Moving means for moving the means and the second cassette supporting means substantially at the same time between the first and second cassette delivery positions and the first and second cassette loading / unloading positions; and the first cassette. A cassette loading / unloading apparatus for a substrate processing apparatus, comprising: a gap displacing unit that displaces a gap between a supporting unit and the second cassette supporting unit. 4. The cassette loading / unloading apparatus of the substrate processing apparatus according to claim 3, wherein the moving means is the first and second cassette supporting means,
A cassette loading / unloading device for a substrate processing apparatus, characterized in that either one of the first cassette and the second cassette can be transported between the first cassette delivery position and the second cassette delivery position. .