JPH073308Y2 - 一体形差圧センサ - Google Patents

一体形差圧センサ

Info

Publication number
JPH073308Y2
JPH073308Y2 JP11576988U JP11576988U JPH073308Y2 JP H073308 Y2 JPH073308 Y2 JP H073308Y2 JP 11576988 U JP11576988 U JP 11576988U JP 11576988 U JP11576988 U JP 11576988U JP H073308 Y2 JPH073308 Y2 JP H073308Y2
Authority
JP
Japan
Prior art keywords
orifice
measurement
diaphragm
silicon chip
differential pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11576988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237342U (US07534539-20090519-C00280.png
Inventor
佐一郎 森田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP11576988U priority Critical patent/JPH073308Y2/ja
Publication of JPH0237342U publication Critical patent/JPH0237342U/ja
Application granted granted Critical
Publication of JPH073308Y2 publication Critical patent/JPH073308Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)
JP11576988U 1988-09-02 1988-09-02 一体形差圧センサ Expired - Lifetime JPH073308Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11576988U JPH073308Y2 (ja) 1988-09-02 1988-09-02 一体形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11576988U JPH073308Y2 (ja) 1988-09-02 1988-09-02 一体形差圧センサ

Publications (2)

Publication Number Publication Date
JPH0237342U JPH0237342U (US07534539-20090519-C00280.png) 1990-03-12
JPH073308Y2 true JPH073308Y2 (ja) 1995-01-30

Family

ID=31357718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11576988U Expired - Lifetime JPH073308Y2 (ja) 1988-09-02 1988-09-02 一体形差圧センサ

Country Status (1)

Country Link
JP (1) JPH073308Y2 (US07534539-20090519-C00280.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5926009B2 (ja) * 2011-06-30 2016-05-25 株式会社キッツ 流量計測機能付きボールバルブとその自動ボールバルブ

Also Published As

Publication number Publication date
JPH0237342U (US07534539-20090519-C00280.png) 1990-03-12

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