JPH0731125Y2 - 剪断形半導体歪みゲージ - Google Patents

剪断形半導体歪みゲージ

Info

Publication number
JPH0731125Y2
JPH0731125Y2 JP1446889U JP1446889U JPH0731125Y2 JP H0731125 Y2 JPH0731125 Y2 JP H0731125Y2 JP 1446889 U JP1446889 U JP 1446889U JP 1446889 U JP1446889 U JP 1446889U JP H0731125 Y2 JPH0731125 Y2 JP H0731125Y2
Authority
JP
Japan
Prior art keywords
output
type semiconductor
strain gauge
shear type
semiconductor strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1446889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02105108U (cs
Inventor
聡 福原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1446889U priority Critical patent/JPH0731125Y2/ja
Publication of JPH02105108U publication Critical patent/JPH02105108U/ja
Application granted granted Critical
Publication of JPH0731125Y2 publication Critical patent/JPH0731125Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
JP1446889U 1989-02-09 1989-02-09 剪断形半導体歪みゲージ Expired - Lifetime JPH0731125Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1446889U JPH0731125Y2 (ja) 1989-02-09 1989-02-09 剪断形半導体歪みゲージ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1446889U JPH0731125Y2 (ja) 1989-02-09 1989-02-09 剪断形半導体歪みゲージ

Publications (2)

Publication Number Publication Date
JPH02105108U JPH02105108U (cs) 1990-08-21
JPH0731125Y2 true JPH0731125Y2 (ja) 1995-07-19

Family

ID=31225695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1446889U Expired - Lifetime JPH0731125Y2 (ja) 1989-02-09 1989-02-09 剪断形半導体歪みゲージ

Country Status (1)

Country Link
JP (1) JPH0731125Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2500331B2 (ja) * 1991-06-13 1996-05-29 工業技術院長 微小変位検出器

Also Published As

Publication number Publication date
JPH02105108U (cs) 1990-08-21

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