JPH0730682Y2 - スパッタリング成膜装置用の基板搬送トレイ - Google Patents

スパッタリング成膜装置用の基板搬送トレイ

Info

Publication number
JPH0730682Y2
JPH0730682Y2 JP1989087822U JP8782289U JPH0730682Y2 JP H0730682 Y2 JPH0730682 Y2 JP H0730682Y2 JP 1989087822 U JP1989087822 U JP 1989087822U JP 8782289 U JP8782289 U JP 8782289U JP H0730682 Y2 JPH0730682 Y2 JP H0730682Y2
Authority
JP
Japan
Prior art keywords
insulator
substrate
tray
holder
tray body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989087822U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0330258U (US20100268047A1-20101021-C00003.png
Inventor
稔 山岸
岳雄 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP1989087822U priority Critical patent/JPH0730682Y2/ja
Publication of JPH0330258U publication Critical patent/JPH0330258U/ja
Application granted granted Critical
Publication of JPH0730682Y2 publication Critical patent/JPH0730682Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP1989087822U 1989-07-26 1989-07-26 スパッタリング成膜装置用の基板搬送トレイ Expired - Fee Related JPH0730682Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989087822U JPH0730682Y2 (ja) 1989-07-26 1989-07-26 スパッタリング成膜装置用の基板搬送トレイ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989087822U JPH0730682Y2 (ja) 1989-07-26 1989-07-26 スパッタリング成膜装置用の基板搬送トレイ

Publications (2)

Publication Number Publication Date
JPH0330258U JPH0330258U (US20100268047A1-20101021-C00003.png) 1991-03-25
JPH0730682Y2 true JPH0730682Y2 (ja) 1995-07-12

Family

ID=31637461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989087822U Expired - Fee Related JPH0730682Y2 (ja) 1989-07-26 1989-07-26 スパッタリング成膜装置用の基板搬送トレイ

Country Status (1)

Country Link
JP (1) JPH0730682Y2 (US20100268047A1-20101021-C00003.png)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS555587A (en) * 1978-06-29 1980-01-16 Mitsubishi Electric Corp Automatic ghost rejection circuit
JPS5675572A (en) * 1979-11-22 1981-06-22 Fujitsu Ltd Sputtering device
JPS58469U (ja) * 1981-06-24 1983-01-05 株式会社日立製作所 基板保持具

Also Published As

Publication number Publication date
JPH0330258U (US20100268047A1-20101021-C00003.png) 1991-03-25

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