JPH07306153A - Visual inspection device for substrate - Google Patents
Visual inspection device for substrateInfo
- Publication number
- JPH07306153A JPH07306153A JP9871294A JP9871294A JPH07306153A JP H07306153 A JPH07306153 A JP H07306153A JP 9871294 A JP9871294 A JP 9871294A JP 9871294 A JP9871294 A JP 9871294A JP H07306153 A JPH07306153 A JP H07306153A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holding
- holding member
- arm
- holding arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば、半導体ウエハ
やガラス基板等の基板に光源から光を当て、基板の面上
のキズ、ヨゴレ等の外観の欠陥を目視で観察することに
より基板の外観を検査するための装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention illuminates a substrate such as a semiconductor wafer or a glass substrate from a light source and visually observes defects such as scratches and stains on the surface of the substrate to visually check the substrate. The present invention relates to a device for inspecting appearance.
【０００２】[0002]
【従来の技術】この種の装置としては、例えば特開平５
−１０９８４９号公報に開示されたものが知られてい
る。この装置は、複数の基板を互いに所定間隔を有して
水平に収納するキャリアと、基板の目視検査を行う検査
装置と、この検査装置を操作する操作部とにより構成さ
れている。そして、この検査装置には、水平方向に移動
してキュリアから基板を取出すと共に、少なくとも２軸
を中心として基板を回動させるための保持アームが設け
られている。この基板は、この保持アーム上に吸着保持
され、保持アームが回動機構により回動されている間に
外観が検査される。2. Description of the Related Art As an apparatus of this type, for example, Japanese Patent Laid-Open No.
The one disclosed in Japanese Patent Publication No. 109849 is known. This apparatus is composed of a carrier that horizontally accommodates a plurality of substrates at a predetermined interval, an inspection device that visually inspects the substrates, and an operation unit that operates the inspection device. The inspection apparatus is provided with a holding arm for moving the substrate in the horizontal direction to take out the substrate from the curia and rotating the substrate about at least two axes. The substrate is suction-held on the holding arm, and the appearance is inspected while the holding arm is being rotated by the rotating mechanism.
【０００３】前記保持アームは、基部から１対のアーム
部が互いに所定間隔を有して平行に延出したコ字状の平
坦な板状保持部と、この板状保持部と回転機構とを接続
するように保持部から延出した接続部とを有する。そし
て、板状保持部には、この上に基板を吸着保持するため
の３つの吸着機構が三角形の頂点位置に設けられてい
る。これら吸着機構は、夫々のアーム部の先端部近く
と、基部の中心部とに、夫々位置している。この吸着機
構は、具体的には、板状保持部の上面に形成された吸着
孔であり、保持アームの裏面に設けられた吸引通路を介
して真空ポンプに接続されている。このような構成の保
持アームにおいては、この上面に基板の裏面を吸着機構
により吸着することにより基板を保持し、保持アームの
移動に伴って基板も移動される。The holding arm comprises a U-shaped flat plate-like holding part in which a pair of arm parts extend in parallel from a base part at a predetermined interval, and the plate-like holding part and a rotating mechanism. And a connecting portion extending from the holding portion so as to be connected. Then, the plate-like holding portion is provided with three suction mechanisms for sucking and holding the substrate thereon at the apex positions of the triangles. These suction mechanisms are located near the tip of each arm and in the center of the base. Specifically, the suction mechanism is a suction hole formed on the upper surface of the plate-shaped holding portion, and is connected to a vacuum pump via a suction passage provided on the back surface of the holding arm. In the holding arm having such a structure, the back surface of the substrate is held on the upper surface by the suction mechanism to hold the substrate, and the substrate is also moved as the holding arm moves.
【０００４】[0004]
【発明が解決しようとする課題】上記構成の保持アーム
では、ＬＣＤ基板のような大型で重量のある基板に対し
ては保持能力が弱く、検査中に基板が動いたり脱落した
りして、基板にキズができたり損傷したりする恐れがあ
る。。また、基板の上面に続いて裏面も検査する場合に
は、裏面を上にする必要がある。このために、上面の検
査の後、吸着機構の吸着機能をいったん解除し、検査者
が基板を裏返しにして保持アーム上に載置し、再び吸着
機能を再開させている。しかし、このような操作は手間
を要するので、回動機構により保持アームを１８０°回
動させて基板を反転させて裏面を検査することも考えら
れるが、この場合には、前述したように、保持能力が弱
いので、基板が脱落する恐れがある。The holding arm having the above-described structure has a weak holding ability for a large and heavy substrate such as an LCD substrate, and the substrate may move or drop during the inspection, and It may be scratched or damaged. . Further, when inspecting the back surface after the top surface of the substrate, it is necessary to place the back surface upward. For this reason, after the inspection of the upper surface, the suction function of the suction mechanism is temporarily released, the inspector places the substrate inside out on the holding arm, and restarts the suction function. However, since such an operation requires time and labor, it is conceivable to rotate the holding arm 180 ° by the rotating mechanism to invert the substrate and inspect the back surface. In this case, as described above, Since the holding capacity is weak, the substrate may fall off.
【０００５】従って、本発明は上記課題に着目して案出
されたものであり、大型で重量のある基板でも確実に保
持することができ、また、裏面を観察するために、基板
を１８０°回動させても、基板が脱落する恐れのない、
基板を保持するための保持アームを備えた基板外観検査
装置を提供することである。Therefore, the present invention has been made in view of the above problems, and can reliably hold even a large and heavy substrate, and in order to observe the back surface, the substrate is 180 °. Even if it is rotated, the board does not fall off,
An object of the present invention is to provide a substrate visual inspection device including a holding arm for holding a substrate.
【０００６】[0006]
【課題を解決するための手段】本発明に係わる請求項１
に記載の基板外観検査装置は、検査される基板を保持す
る保持部材と、この保持部材の基端部に設けられ、この
保持部材を２軸を中心として夫々回動させる回動機構と
を具備し、保持部材に載置された基板の面方向の位置決
めをする規制手段と、保持部材が回動機構により回動さ
れているときに、基板が、この基板の面に対して垂直並
びに水平方向に移動するのを阻止する保持手段とを具備
し、前記規制手段は、少なくとも１つが前記保持部材に
基板の面に対して水平方向に移動可能に設けられた複数
の規制部材を有し、規制部材間で基板を挟持して位置決
めすることを特徴とする。Claim 1 according to the present invention
The board appearance inspection apparatus described in (1) comprises a holding member that holds the board to be inspected, and a rotating mechanism that is provided at the base end of the holding member and that rotates the holding member around two axes. Then, when the holding member is rotated by the rotation mechanism and the restricting means for positioning the substrate placed on the holding member in the surface direction, the substrate is vertically and horizontally oriented with respect to the surface of the substrate. Holding means for preventing the movement of the holding means, and the regulating means has a plurality of regulating members, at least one of which is provided on the holding member so as to be movable in the horizontal direction with respect to the surface of the substrate. It is characterized in that the substrate is sandwiched between the members and positioned.
【０００７】また、請求項２に記載の基板外観検査装置
は、請求項１の基板外観検査装置で、前記移動可能な規
制部材は、基板の上面と当接して基板の保持部材からの
脱落を防止する水平突出部を有することを特徴とする。A board appearance inspection apparatus according to a second aspect of the present invention is the board appearance inspection apparatus according to the first aspect, wherein the movable restricting member comes into contact with an upper surface of the board to prevent the board from dropping from the holding member. It is characterized by having a horizontal protrusion to prevent it.
【０００８】さらに、請求項３に記載の基板外観検査装
置は、請求項１もしくは２の基板外観検査装置で、前記
保持部材は、基板より僅かに小さいディメンションの開
口を有し、この開口を閉塞するようにして基板の周縁部
が保持部材に支持されることを特徴とする。Further, the board appearance inspection apparatus according to claim 3 is the board appearance inspection apparatus according to claim 1 or 2, wherein the holding member has an opening having a dimension slightly smaller than that of the board, and the opening is closed. In this way, the peripheral portion of the substrate is supported by the holding member.
【０００９】そして、請求項４に記載の基板外観検査装
置は、請求項３の基板外観検査装置で、前記保持部材
は、基板の周縁部を保持するように開口の周縁部に沿っ
配設された複数の吸着機構を有することを特徴とする。A board appearance inspection apparatus according to a fourth aspect is the board appearance inspection apparatus according to the third aspect, wherein the holding member is arranged along the peripheral edge portion of the opening so as to hold the peripheral edge portion of the substrate. It has a plurality of adsorbing mechanisms.
【００１０】[0010]
【作用】請求項１の基板外観検査装置においては、基板
を保持部材上に載置した後に、規制部材を水平方向に移
動させて基板の端面に当接させ、もし基板が所定位置に
ないときには、この基板を押して、組をなす保持部材と
の間で基板を挟持する。この結果、基板は所定位置に位
置決めされる。この位置決めされた基板は、保持手段に
より、保持部材により保持され、検査のための移動中に
動いたり、脱落したりすることがない。In the substrate visual inspection apparatus according to the present invention, after the substrate is placed on the holding member, the regulating member is moved in the horizontal direction to abut the end face of the substrate. If the substrate is not in the predetermined position, , The substrate is pressed to sandwich the substrate between the pair of holding members. As a result, the substrate is positioned at the predetermined position. The positioned substrate is held by the holding member by the holding means, and does not move or drop during the movement for inspection.
【００１１】また、請求項２の基板外観検査装置におい
ては、さらに、水平突出部により基板がその上面でも保
持されているので、基板を反転させても脱落する恐れが
ない。 そして、請求項３の基板外観検査装置において
は、基板の裏面を検査するために、保持アームを１８０
°回動させても、開口を介して基板の裏面が検査できる
ので、保持アームが検査の邪魔になるようなことがな
い。Further, in the substrate visual inspection apparatus according to the second aspect, since the substrate is also held on the upper surface thereof by the horizontal protruding portion, there is no fear that it will fall out even when the substrate is inverted. Further, in the board appearance inspecting apparatus of claim 3, the holding arm is provided with 180 in order to inspect the back surface of the board.
Even if rotated, the back surface of the substrate can be inspected through the opening, so that the holding arm does not interfere with the inspection.
【００１２】さらに、請求項４の基板外観検査装置にお
いては、有効領域以外である基板の周縁部を保持するこ
とにより、検査に邪魔とならずに、より確実に基板を保
持することができる。Further, in the board appearance inspection apparatus according to the fourth aspect, by holding the peripheral portion of the board other than the effective area, the board can be held more reliably without disturbing the inspection.
【００１３】[0013]
【実施例】以下に、添付図面を参照して、本発明の一実
施例に係わる基板外観検査装置を説明する。尚、この実
施例において、保持アーム（保持部材）以外は前記特開
平５−１０９８４９号公報に開示されたものと実質的に
同じなので、以下に保持アームについてのみ説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A board appearance inspection apparatus according to an embodiment of the present invention will be described below with reference to the accompanying drawings. In this embodiment, except for the holding arm (holding member), it is substantially the same as that disclosed in Japanese Patent Laid-Open No. 109849/1993, so only the holding arm will be described below.
【００１４】平板状の保持アーム３は、図１の（ａ）に
示すように、基板２を保持する矩形状の保持部３ａと、
この保持部３ａの一端側から延出し、保持部３ａを図示
しない回動機構に接続するための接続部３ｂとを有す
る。この回動機構は、保持部３ａを図示の一点鎖線で示
す中心軸を中心として矢印ａで示すように垂直面に沿っ
て回動させる機能と、接続部３ｂの基部を通り、前記中
心線と直交して水平に延びる回動軸を中心として矢印ｂ
で示すように垂直面に沿って回動させる機能とを有す
る。また、この保持アーム３は、図示しない搬送ロボッ
トの移動アームにより基板の受渡しを果たすときに移動
アームが挿入される凹所３ｃを他端側上面に有する。こ
の保持アーム３は、前記一点鎖線で示す中心軸に沿っ
て、図示しない駆動機構により移動され得る。The plate-shaped holding arm 3 has a rectangular holding portion 3a for holding the substrate 2, as shown in FIG.
It has a connecting portion 3b extending from one end side of the holding portion 3a for connecting the holding portion 3a to a rotation mechanism (not shown). This rotation mechanism has a function of rotating the holding portion 3a along a vertical plane as shown by an arrow a around a center axis shown by a dashed line in the figure, and passes through the base portion of the connection portion 3b and the center line. An arrow b centered on a rotation axis extending orthogonally and horizontally
It has a function of rotating along a vertical plane as shown in FIG. In addition, the holding arm 3 has a recess 3c on the other end side surface into which the moving arm of the transfer robot (not shown) is inserted when the substrate is delivered. The holding arm 3 can be moved by a drive mechanism (not shown) along the central axis shown by the chain line.
【００１５】前記保持部３ａの中心には、上面から下面
へと貫通した矩形の開口４が形成されており、この結
果、保持部３ａは矩形の枠状となっている。この開口４
は、保持する基板よりも、好ましくは、僅かに小さいデ
ィメンションを有し、この開口４の周縁部上に基板２の
周縁部が載置されて、開口４が基板により閉塞されてい
る。A rectangular opening 4 is formed in the center of the holding portion 3a so as to penetrate from the upper surface to the lower surface, and as a result, the holding portion 3a has a rectangular frame shape. This opening 4
Has a dimension slightly smaller than that of the substrate to be held, the peripheral edge of the substrate 2 is placed on the peripheral edge of the opening 4, and the opening 4 is closed by the substrate.
【００１６】前記保持部３ａの開口周縁部には、これに
沿って複数の吸着機構（保持手段）５が配置されてい
る。この実施例では、これら吸着機構５は、基板２の各
辺に対して２つづつ、合計８つが互いに所定間隔を有し
て設けられているが、このような数に限定されることは
ない。例えば、基板が大型化並びに重量化するのに従っ
て多くすることが望ましい。これら吸着機構５は、保持
部３ａの上面に形成された吸引孔よりなり、図示しない
真空ポンプに、保持アームに設けられた吸引通路を介し
て接続されている。このような構成並びに配置の吸着機
構５では、真空ポンプにより吸引通路を真空にすること
により、吸引孔の所で、基板２の裏面の周縁部を吸着し
て、基板２を保持することができる。A plurality of suction mechanisms (holding means) 5 are arranged along the periphery of the opening of the holding portion 3a. In this embodiment, two suction mechanisms 5 are provided for each side of the substrate 2, that is, eight suction mechanisms 5 are provided at a predetermined interval from each other, but the number is not limited to this. . For example, it is desirable to increase the number as the substrate becomes larger and heavier. These suction mechanisms 5 are suction holes formed on the upper surface of the holding portion 3a, and are connected to a vacuum pump (not shown) via a suction passage provided in the holding arm. In the suction mechanism 5 having such a configuration and arrangement, the suction passage is evacuated by the vacuum pump to suck the peripheral portion of the back surface of the substrate 2 at the suction hole and hold the substrate 2. .
【００１７】さらに、この実施例の保持アーム３は、基
板２を挟持して位置決め並びに保持するための規制手段
を具備する。この規制手段は、可動規制部材６ａ，７
ａ，８ａと固定規制部材６ｂ，７ｂ，８ｂ，８ｂとによ
り構成され、組みをなす可動規制部材と固定規制部材
（６ａと６ｂ、７ａと７ｂ、及び８ａと８ｂ，８ｂ）と
で基板２を水平方向に位置決めし挟持することにより基
板２を保持可能となっている。Further, the holding arm 3 of this embodiment is provided with a regulating means for sandwiching the substrate 2 to position and hold it. This restricting means includes movable restricting members 6a, 7
a, 8a and fixed regulation members 6b, 7b, 8b, 8b, the movable regulation member and fixed regulation members (6a and 6b, 7a and 7b, and 8a and 8b, 8b), which form a set, form the substrate 2 The substrate 2 can be held by positioning and pinching in the horizontal direction.
【００１８】前記固定規制部材６ｂ，７ｂ，８ｂ，８ｂ
は保持部３ａの上面に固定された円柱ピンにより夫々構
成されている。また、可動規制部材６ａ，７ａ，８ａ
は、前記固定規制部材６ｂ，７ｂ，８ｂ，８ｂと、基板
２を挟んで対向するようにして、保持部３ａの上面に形
成された長孔９から夫々突出されている。これら長孔９
は、基板の長辺に対向するものは、基板の短辺と平行に
延出し、また、基板の短辺に対向するものは基板２の長
辺と平行に延出し、夫々の延出端は開口４の近くで終端
している。The fixing restriction members 6b, 7b, 8b, 8b
Are each constituted by a cylindrical pin fixed to the upper surface of the holding portion 3a. Further, the movable regulating members 6a, 7a, 8a
Are respectively protruded from the long holes 9 formed on the upper surface of the holding portion 3a so as to face the fixing regulation members 6b, 7b, 8b, 8b with the substrate 2 interposed therebetween. These long holes 9
Means that those which face the long side of the substrate extend in parallel to the short sides of the substrate, and those which face the short side of the substrate extend parallel to the long sides of the substrate 2, and the respective extension ends are It terminates near the opening 4.
【００１９】前記可動規制部材６ａ，７ａ，８ａは、図
中矢印Ａ方向に、夫々長孔９に沿って移動可能に設けら
れたピンの形態をしている。また、これら可動規制部材
を自動的に移動可能に設定するために、例えば、この部
材の基端部にクランクアームの一端が接続され、この他
端にはエアシリンダーのピストンが接続されている。こ
の場合には、エアシリンダーへのエアの供給により、可
動部材はクランクアームを介して移動される。The movable restricting members 6a, 7a, 8a are in the form of pins movably provided along the elongated holes 9 in the direction of arrow A in the figure. Further, in order to automatically set these movable restricting members, one end of a crank arm is connected to the base end portion of this member, and the piston of an air cylinder is connected to the other end. In this case, the movable member is moved via the crank arm by supplying air to the air cylinder.
【００２０】前記規制部材は、金属ピンのような堅い部
材で形成し、これを直接基板の端面に当接させるように
しても、またピンの基板との当接部にゴムなどのクッシ
ョン材を取着しておいても、また、適度の合成と柔軟性
を有するゴムなどの部材で形成しても良い。The regulating member may be formed of a rigid member such as a metal pin, and may be brought into direct contact with the end face of the substrate, or a cushion member such as rubber may be provided at the contact portion of the pin with the substrate. It may be attached, or may be formed of a member such as rubber having proper synthesis and flexibility.
【００２１】次に、保持アームと、キャリアとの間に配
置された搬送ロボットの一例を以下に説明する。この搬
送ロボットは、保持アームと、キャリアとの間を直線的
に移動可能に装置本体に装着された基部を有する。この
基部上には、水平面に沿って回動つ直線移動可能である
と共に上下方向に移動可能な細長い矩形薄板からなる搬
送アームが設けられている。また、この搬送アームの一
端側上面には基板２を上面に吸着可能な真空吸着手段が
形成されている。このような構成の搬送ロボットにおい
ては、以下のようにして保持アームとキヤリアとの間の
基板の授受を果たす。まず、キヤリア内に搬送アームの
一端側を挿入して、この上に基板２を吸着し、保持させ
る。そして、基部を保持アーム３の方に移動させてると
共に、搬送アームを１８０°回動させて、この上に保持
した基板を保持アーム３に対面させる。この状態で基板
が保持アーム上に来るように、搬送アームの一端側を保
持アーム３上に移動させる。そして、搬送アームを下方
に移動させることにより、基板を保持アーム上に載置さ
せ、最後に、搬送アームを保持アーム３の凹所３ｃを介
して後退させて保持アームより引き抜く。このようにし
て、検査前の基板をキャリアから保持アーム３上に搬送
することができ、また逆の動作により、検査済みの基板
を保持アームよりキヤリアに搬送することができる。Next, an example of the transfer robot arranged between the holding arm and the carrier will be described below. This transfer robot has a base portion mounted on the apparatus main body so as to be linearly movable between a holding arm and a carrier. On the base portion, there is provided a transfer arm that is a slender rectangular thin plate that is rotatable and linearly movable along a horizontal plane and is vertically movable. Further, a vacuum suction means capable of sucking the substrate 2 on the upper surface is formed on the upper surface on one end side of the transfer arm. In the transfer robot having such a structure, the substrate is transferred between the holding arm and the carrier as follows. First, one end side of the transfer arm is inserted into the carrier, and the substrate 2 is adsorbed and held thereon. Then, the base is moved toward the holding arm 3 and the transfer arm is rotated by 180 ° so that the substrate held thereon faces the holding arm 3. In this state, one end side of the transfer arm is moved onto the holding arm 3 so that the substrate comes on the holding arm. Then, by moving the transfer arm downward, the substrate is placed on the holding arm, and finally the transfer arm is retracted through the recess 3c of the holding arm 3 and pulled out from the holding arm. In this way, the substrate before inspection can be transferred from the carrier onto the holding arm 3, and by the reverse operation, the inspected substrate can be transferred from the holding arm to the carrier.
【００２２】次に、上記構成の装置を使用して、基板の
外観を検査する操作を説明する。まず、保持アーム３
を、可動規制部材６ａ，７ａ，８ａが開口４から離れた
状態（反Ａ方向の状態）で、凹所３ｃが前方にある状態
で静止させる。そして、前述したような搬送ロボットに
より検査前の基板２を保持アーム３上に載置させる。こ
のとき、基板２が、開口４を閉塞し、規制部材間に位置
するようにして載置されるように、保持アーム３と搬送
ロボットとは粗位置合わせされている。次に、可動規制
部材６ａ，７ａ，８ａを前進させて、基板２を固定規制
部材６ｂ，７ｂ，８ｂ，８ｂに押し付けて、基板２を微
位置合わせする。、この状態で、図示しない真空ポンプ
を駆動させて、吸着機構５を動作させ、基板２を保持部
３ａ上に吸着保持する。この保持された状態において
は、基板２は、後で、装置として形成されたときに動作
領域となる有効領域以外の部分、即ち、周縁部が、保持
部３ａ上に位置し、有効領域は、開口部上に位置してい
る。この保持状態で、保持アーム３を互いに直交する前
記中心軸と回動軸との２軸を中心として最低限度回動さ
せ、上方より光を照射して、基板２の上面を目視検査す
る。この検査の後、保持アームを中心軸を中心として１
８０°回動させて、基板２の裏面を上に向け、同様に目
視検査する。この後、保持アーム２を移動させて、両面
の外観の検査を終了した、基板を前記キャリアもしくは
別のキャリアに搬送する。Next, the operation of inspecting the appearance of the substrate using the apparatus having the above-mentioned structure will be described. First, the holding arm 3
Is stopped with the movable restricting members 6a, 7a, 8a separated from the opening 4 (in the direction opposite to the A direction) with the recess 3c in the front. Then, the substrate 2 before inspection is placed on the holding arm 3 by the transfer robot as described above. At this time, the holding arm 3 and the transfer robot are roughly aligned so that the substrate 2 is placed so as to close the opening 4 and be positioned between the regulating members. Next, the movable regulating members 6a, 7a, 8a are advanced to press the substrate 2 against the fixed regulating members 6b, 7b, 8b, 8b, and the substrate 2 is finely aligned. In this state, a vacuum pump (not shown) is driven to operate the suction mechanism 5 to suck and hold the substrate 2 on the holding portion 3a. In this held state, the substrate 2 has a portion other than the effective area, which becomes an operation area when it is later formed as a device, that is, the peripheral portion is located on the holding portion 3a, and the effective area is It is located above the opening. In this holding state, the holding arm 3 is rotated at least about two axes of the central axis and the rotation axis which are orthogonal to each other, and light is emitted from above to visually inspect the upper surface of the substrate 2. After this inspection, the holding arm 1
The substrate 2 is rotated by 80 ° so that the back surface of the substrate 2 faces upward, and the same visual inspection is performed. After that, the holding arm 2 is moved to convey the substrate, which has undergone the visual inspection on both sides, to the carrier or another carrier.
【００２３】上記構成の基板外観検査装置においては、
基板は、保持アームの保持部上に可動規制部材と固定規
制部材との間で挟持されて位置決めがされると共に保持
されており、さらに吸着機構によっても保持されている
ので、保持能力が優れ、基板の裏面の検査のために、保
持アームを１８０°回動させても、これから基板が脱落
するようなことがない。また、裏面の検査においては、
基板の有効領域は、保持部に形成された開口より露出し
ているので、この検査に保持部が邪魔となるようなこと
がない。In the board appearance inspection device having the above structure,
The substrate is sandwiched between the movable regulation member and the fixed regulation member, positioned and held on the holding portion of the holding arm, and further held by the suction mechanism, so that the holding ability is excellent. Even if the holding arm is rotated by 180 ° for the purpose of inspecting the back surface of the substrate, the substrate will not fall off. Also, in the inspection of the back side,
Since the effective area of the substrate is exposed from the opening formed in the holding portion, the holding portion does not interfere with this inspection.
【００２４】前記実施例では、可動規制部材を円柱状の
ピンにより構成したが、基板の脱落をより確実に防止す
るためには、図２に示すように、可動規制部材（代表的
に符号６ａで示す）の先端部に、基板の周縁部上方に延
出する水平突出部１２を設けることが望ましい。このよ
うな突出部は、例えば、故障等で、規制部材の挟持力や
吸着機構の吸着力が弱くなっている状態で、基板２が１
８０°回動された場合でも、基板の上面と係合して、基
板が保持アームから脱落することを防止できる。このた
めには、基板の隣り合う２辺に対応した規制部材に水平
突出部を設けておくことが好ましい。尚、ここで突出部
とは、必ずしも水平に延出している必要がなく、基板が
回動されたときに、この基板の周縁部の面と係合するよ
うに延出していれば良い。また、この突出部の基板と当
接する部分を、傾斜させると共に弾性体などで形成し、
保持アームの保持部との間で基板を弾性的に挟持させる
ようにしても良い。In the above-described embodiment, the movable regulating member is constituted by the cylindrical pin, but in order to prevent the substrate from coming off more reliably, as shown in FIG. 2, the movable regulating member (typically 6a) is used. It is desirable to provide a horizontal protrusion 12 extending above the peripheral edge of the substrate at the front end of (). Such a projecting portion causes the substrate 2 to move to a position where the clamping force of the regulating member and the suction force of the suction mechanism are weakened due to a failure or the like.
Even when rotated by 80 °, it is possible to prevent the substrate from falling off the holding arm by engaging with the upper surface of the substrate. For this purpose, it is preferable to provide a horizontal protrusion on the regulating member corresponding to the two adjacent sides of the substrate. Here, the protruding portion does not necessarily have to extend horizontally, but may extend so as to engage with the surface of the peripheral portion of the substrate when the substrate is rotated. In addition, the portion of the protruding portion that abuts the substrate is inclined and is formed of an elastic body,
The substrate may be elastically held between the holding arm and the holding portion.
【００２５】尚、上記実施例で、規制部材を自動的に移
動させる場合には、例えば、基板が保持アーム上に載置
されたことを検出する検出手段を保持アームもしくはそ
の周辺に設けておき、この検出手段からの信号により、
保持アームに設けられたエアシリンダにエアを供給し
て、可動規制部材を移動させることにより達成される。
また、この検出信号により、少し時間を遅らせて吸着手
段の真空ポンプを制御するようにしても良い。In the above embodiment, when the regulating member is automatically moved, for example, detection means for detecting that the substrate is placed on the holding arm is provided in the holding arm or its periphery. , The signal from this detection means
This is achieved by supplying air to an air cylinder provided on the holding arm to move the movable restricting member.
Further, the vacuum pump of the suction means may be controlled with a slight delay by this detection signal.
【００２６】[0026]
【発明の効果】本発明の基板外観検査装置によれば、大
型で重量のある、例えばＬＣＤガラス基板のような基板
でも確実に保持することができ、また、裏面を観察する
ために、基板を１８０°回動させても、基板が脱落する
恐れのない。According to the substrate visual inspection apparatus of the present invention, even a large and heavy substrate such as an LCD glass substrate can be reliably held and the substrate can be observed in order to observe the back surface. Even if it is rotated 180 °, there is no risk of the substrate falling off.
【図１】本発明の一実施例に係わる基板外観検査装置に
使用されている保持アームを示す斜視図である。FIG. 1 is a perspective view showing a holding arm used in a substrate visual inspection apparatus according to an embodiment of the present invention.
２…基板、３…保持アーム（保持部材）、４…開口、５
…吸着機構（保持手段）、６ａ，７ａ，８ａ…可動規制
部材、６ｂ，７ｂ，８ｂ，８ｂ…固定規制部材。2 ... Substrate, 3 ... Holding arm (holding member), 4 ... Opening, 5
... suction mechanism (holding means), 6a, 7a, 8a ... movable restricting member, 6b, 7b, 8b, 8b ... fixed restricting member.
Claims (4)
この保持部材の基端部に設けられ、この保持部材を２軸
を中心として夫々回動させる回動機構とを具備し、保持
部材に載置された基板の面方向の位置決めをする規制手
段と、保持部材が回動機構により回動されているとき
に、基板が、この基板の面に対して垂直並びに水平方向
に移動するのを阻止する保持手段とを具備し、前記規制
手段は、少なくとも１つが前記保持部材に基板の面に対
して水平方向に移動可能に設けられた複数の規制部材を
有し、規制部材間で基板を挟持して位置決めすることを
特徴とする基板外観検査装置。1. A holding member for holding a substrate to be inspected,
And a restricting unit that is provided at a base end portion of the holding member and that rotates the holding member around two axes, respectively, and a positioning unit that positions the substrate placed on the holding member in the surface direction. Holding means for preventing the substrate from moving in the vertical and horizontal directions with respect to the surface of the substrate when the holding member is rotated by the rotating mechanism. A substrate appearance inspection apparatus, wherein one of the plurality of regulating members is provided on the holding member so as to be movable in the horizontal direction with respect to the surface of the substrate, and the substrate is sandwiched between the regulating members for positioning.
と当接して基板の保持部材からの脱落を防止するように
基板方向に突出した突出部を有することを特徴とする請
求項１に記載の基板外観検査装置。2. The movable restricting member has a protruding portion that protrudes toward the substrate so as to prevent the substrate from coming off from the holding member by coming into contact with the upper surface of the substrate. The board appearance inspection device described.
ディメンションの開口を有し、この開口を閉塞するよう
にして基板の周縁部が保持部材に支持されることを特徴
とする請求項１もしくは２に記載の基板外観検査装置。3. The holding member has an opening having a dimension slightly smaller than that of the substrate, and the peripheral portion of the substrate is supported by the holding member so as to close the opening. The board appearance inspection device according to 2.
るように開口の周縁部に沿っ配設された複数の吸着機構
を有することを特徴とする請求項４に記載の基板外観検
査装置。4. The substrate appearance inspection apparatus according to claim 4, wherein the holding unit has a plurality of suction mechanisms arranged along the peripheral edge of the opening so as to hold the peripheral edge of the substrate. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09871294A JP3414491B2 (en) | 1994-05-12 | 1994-05-12 | Board holding member and board appearance inspection apparatus using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09871294A JP3414491B2 (en) | 1994-05-12 | 1994-05-12 | Board holding member and board appearance inspection apparatus using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07306153A true JPH07306153A (en) | 1995-11-21 |
| JP3414491B2 JP3414491B2 (en) | 2003-06-09 |
Family
ID=14227134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09871294A Expired - Fee Related JP3414491B2 (en) | 1994-05-12 | 1994-05-12 | Board holding member and board appearance inspection apparatus using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3414491B2 (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000046751A (en) * | 1998-07-31 | 2000-02-18 | Nok Corp | Inspection apparatus |
| JP2006170733A (en) * | 2004-12-15 | 2006-06-29 | Sharp Corp | Method and apparatus for positioning and holding substrate |
| JP2006245252A (en) * | 2005-03-03 | 2006-09-14 | Dainippon Printing Co Ltd | Jig for placing silicon wafer, and surface shape detecting method for fine structure |
| JP2008070238A (en) * | 2006-09-14 | 2008-03-27 | Olympus Corp | Substrate inspection device |
| JP2008078304A (en) * | 2006-09-20 | 2008-04-03 | Olympus Corp | Substrate holding mechanism and substrate inspection apparatus using the same |
| JP2008101959A (en) * | 2006-10-18 | 2008-05-01 | Hioki Ee Corp | Substrate jig board and substrate test-use jig unit embedding the same |
| JP2008116470A (en) * | 2007-12-25 | 2008-05-22 | Olympus Corp | Substrate-inspecting device |
| WO2008105637A1 (en) * | 2007-02-28 | 2008-09-04 | Jusung Engineering Co., Ltd. | Substrate support frame, and substrate processing apparatus including and method of loading and unloading substrate using the same |
| JP2008300389A (en) * | 2007-05-29 | 2008-12-11 | Orc Mfg Co Ltd | Substrate carrier |
| JP2009026859A (en) * | 2007-07-18 | 2009-02-05 | Olympus Corp | Substrate inspection apparatus |
| JP2015513111A (en) * | 2012-04-12 | 2015-04-30 | ケーエルエー−テンカー コーポレイション | System and method for sample inspection and review |
| CN109342459A (en) * | 2018-11-14 | 2019-02-15 | 大连崇达电路有限公司 | High-accuracy printed wiring board appearance quality detecting device load bearing unit |
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-
1994
- 1994-05-12 JP JP09871294A patent/JP3414491B2/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000046751A (en) * | 1998-07-31 | 2000-02-18 | Nok Corp | Inspection apparatus |
| JP2006170733A (en) * | 2004-12-15 | 2006-06-29 | Sharp Corp | Method and apparatus for positioning and holding substrate |
| JP2006245252A (en) * | 2005-03-03 | 2006-09-14 | Dainippon Printing Co Ltd | Jig for placing silicon wafer, and surface shape detecting method for fine structure |
| JP4522889B2 (en) * | 2005-03-03 | 2010-08-11 | 大日本印刷株式会社 | Silicon wafer mounting jig and surface shape detection method of fine structure |
| JP2008070238A (en) * | 2006-09-14 | 2008-03-27 | Olympus Corp | Substrate inspection device |
| JP2008078304A (en) * | 2006-09-20 | 2008-04-03 | Olympus Corp | Substrate holding mechanism and substrate inspection apparatus using the same |
| JP2008101959A (en) * | 2006-10-18 | 2008-05-01 | Hioki Ee Corp | Substrate jig board and substrate test-use jig unit embedding the same |
| WO2008105637A1 (en) * | 2007-02-28 | 2008-09-04 | Jusung Engineering Co., Ltd. | Substrate support frame, and substrate processing apparatus including and method of loading and unloading substrate using the same |
| JP2008300389A (en) * | 2007-05-29 | 2008-12-11 | Orc Mfg Co Ltd | Substrate carrier |
| JP2009026859A (en) * | 2007-07-18 | 2009-02-05 | Olympus Corp | Substrate inspection apparatus |
| JP2008116470A (en) * | 2007-12-25 | 2008-05-22 | Olympus Corp | Substrate-inspecting device |
| JP2015513111A (en) * | 2012-04-12 | 2015-04-30 | ケーエルエー−テンカー コーポレイション | System and method for sample inspection and review |
| US9939386B2 (en) | 2012-04-12 | 2018-04-10 | KLA—Tencor Corporation | Systems and methods for sample inspection and review |
| JP2019220558A (en) * | 2018-06-19 | 2019-12-26 | 株式会社ディスコ | Tape expanding device |
| CN109342459A (en) * | 2018-11-14 | 2019-02-15 | 大连崇达电路有限公司 | High-accuracy printed wiring board appearance quality detecting device load bearing unit |
| WO2023120266A1 (en) * | 2021-12-24 | 2023-06-29 | トヨタ自動車株式会社 | Inspection device and inspection method |
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