JPH0729633Y2 - チップの位置ずれ補正装置 - Google Patents

チップの位置ずれ補正装置

Info

Publication number
JPH0729633Y2
JPH0729633Y2 JP15929588U JP15929588U JPH0729633Y2 JP H0729633 Y2 JPH0729633 Y2 JP H0729633Y2 JP 15929588 U JP15929588 U JP 15929588U JP 15929588 U JP15929588 U JP 15929588U JP H0729633 Y2 JPH0729633 Y2 JP H0729633Y2
Authority
JP
Japan
Prior art keywords
chip
vacuum
positional deviation
pressing
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15929588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0279031U (enrdf_load_stackoverflow
Inventor
渡 秀瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15929588U priority Critical patent/JPH0729633Y2/ja
Publication of JPH0279031U publication Critical patent/JPH0279031U/ja
Application granted granted Critical
Publication of JPH0729633Y2 publication Critical patent/JPH0729633Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
JP15929588U 1988-12-07 1988-12-07 チップの位置ずれ補正装置 Expired - Lifetime JPH0729633Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15929588U JPH0729633Y2 (ja) 1988-12-07 1988-12-07 チップの位置ずれ補正装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15929588U JPH0729633Y2 (ja) 1988-12-07 1988-12-07 チップの位置ずれ補正装置

Publications (2)

Publication Number Publication Date
JPH0279031U JPH0279031U (enrdf_load_stackoverflow) 1990-06-18
JPH0729633Y2 true JPH0729633Y2 (ja) 1995-07-05

Family

ID=31440383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15929588U Expired - Lifetime JPH0729633Y2 (ja) 1988-12-07 1988-12-07 チップの位置ずれ補正装置

Country Status (1)

Country Link
JP (1) JPH0729633Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0279031U (enrdf_load_stackoverflow) 1990-06-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term