JPH0729631Y2 - ドライエッチング装置 - Google Patents

ドライエッチング装置

Info

Publication number
JPH0729631Y2
JPH0729631Y2 JP1986045623U JP4562386U JPH0729631Y2 JP H0729631 Y2 JPH0729631 Y2 JP H0729631Y2 JP 1986045623 U JP1986045623 U JP 1986045623U JP 4562386 U JP4562386 U JP 4562386U JP H0729631 Y2 JPH0729631 Y2 JP H0729631Y2
Authority
JP
Japan
Prior art keywords
sample
dry etching
reaction gas
sample mounting
mounting portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986045623U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62157138U (enrdf_load_stackoverflow
Inventor
栄一 星野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1986045623U priority Critical patent/JPH0729631Y2/ja
Publication of JPS62157138U publication Critical patent/JPS62157138U/ja
Application granted granted Critical
Publication of JPH0729631Y2 publication Critical patent/JPH0729631Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1986045623U 1986-03-27 1986-03-27 ドライエッチング装置 Expired - Lifetime JPH0729631Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986045623U JPH0729631Y2 (ja) 1986-03-27 1986-03-27 ドライエッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986045623U JPH0729631Y2 (ja) 1986-03-27 1986-03-27 ドライエッチング装置

Publications (2)

Publication Number Publication Date
JPS62157138U JPS62157138U (enrdf_load_stackoverflow) 1987-10-06
JPH0729631Y2 true JPH0729631Y2 (ja) 1995-07-05

Family

ID=30864528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986045623U Expired - Lifetime JPH0729631Y2 (ja) 1986-03-27 1986-03-27 ドライエッチング装置

Country Status (1)

Country Link
JP (1) JPH0729631Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60206027A (ja) * 1984-03-30 1985-10-17 Hitachi Ltd プラズマ処理装置
JPS6127334U (ja) * 1984-07-24 1986-02-18 日本電気株式会社 ドライエツチング装置

Also Published As

Publication number Publication date
JPS62157138U (enrdf_load_stackoverflow) 1987-10-06

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