JPH0728692Y2 - ウエハディスク - Google Patents

ウエハディスク

Info

Publication number
JPH0728692Y2
JPH0728692Y2 JP1988084278U JP8427888U JPH0728692Y2 JP H0728692 Y2 JPH0728692 Y2 JP H0728692Y2 JP 1988084278 U JP1988084278 U JP 1988084278U JP 8427888 U JP8427888 U JP 8427888U JP H0728692 Y2 JPH0728692 Y2 JP H0728692Y2
Authority
JP
Japan
Prior art keywords
wafer
cooling medium
disk
wafer mounting
welding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988084278U
Other languages
English (en)
Japanese (ja)
Other versions
JPH025873U (enExample
Inventor
恒雄 平松
良 中矢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1988084278U priority Critical patent/JPH0728692Y2/ja
Publication of JPH025873U publication Critical patent/JPH025873U/ja
Application granted granted Critical
Publication of JPH0728692Y2 publication Critical patent/JPH0728692Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988084278U 1988-06-25 1988-06-25 ウエハディスク Expired - Lifetime JPH0728692Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988084278U JPH0728692Y2 (ja) 1988-06-25 1988-06-25 ウエハディスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988084278U JPH0728692Y2 (ja) 1988-06-25 1988-06-25 ウエハディスク

Publications (2)

Publication Number Publication Date
JPH025873U JPH025873U (enExample) 1990-01-16
JPH0728692Y2 true JPH0728692Y2 (ja) 1995-06-28

Family

ID=31308974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988084278U Expired - Lifetime JPH0728692Y2 (ja) 1988-06-25 1988-06-25 ウエハディスク

Country Status (1)

Country Link
JP (1) JPH0728692Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4919518U (enExample) * 1972-05-18 1974-02-19
JP5151651B2 (ja) * 2008-04-22 2013-02-27 株式会社Ｓｕｍｃｏ 酸素イオン注入装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0458422B1 (en) * 1984-09-19 1996-12-11 Applied Materials, Inc. Apparatus for scanning wafers

Also Published As

Publication number Publication date
JPH025873U (enExample) 1990-01-16

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