JPH0726843Y2 - 半導体素子分離構造 - Google Patents

半導体素子分離構造

Info

Publication number
JPH0726843Y2
JPH0726843Y2 JP1988014925U JP1492588U JPH0726843Y2 JP H0726843 Y2 JPH0726843 Y2 JP H0726843Y2 JP 1988014925 U JP1988014925 U JP 1988014925U JP 1492588 U JP1492588 U JP 1492588U JP H0726843 Y2 JPH0726843 Y2 JP H0726843Y2
Authority
JP
Japan
Prior art keywords
element isolation
polysilicon
nitride film
silicon nitride
isolation structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988014925U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01120340U (OSRAM
Inventor
正博 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP1988014925U priority Critical patent/JPH0726843Y2/ja
Publication of JPH01120340U publication Critical patent/JPH01120340U/ja
Application granted granted Critical
Publication of JPH0726843Y2 publication Critical patent/JPH0726843Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP1988014925U 1988-02-05 1988-02-05 半導体素子分離構造 Expired - Lifetime JPH0726843Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988014925U JPH0726843Y2 (ja) 1988-02-05 1988-02-05 半導体素子分離構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988014925U JPH0726843Y2 (ja) 1988-02-05 1988-02-05 半導体素子分離構造

Publications (2)

Publication Number Publication Date
JPH01120340U JPH01120340U (OSRAM) 1989-08-15
JPH0726843Y2 true JPH0726843Y2 (ja) 1995-06-14

Family

ID=31226532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988014925U Expired - Lifetime JPH0726843Y2 (ja) 1988-02-05 1988-02-05 半導体素子分離構造

Country Status (1)

Country Link
JP (1) JPH0726843Y2 (OSRAM)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55102235A (en) * 1979-01-29 1980-08-05 Nippon Telegr & Teleph Corp <Ntt> Formation of interlayer conductive layer
JPS57204144A (en) * 1981-06-10 1982-12-14 Hitachi Ltd Insulating and isolating method for semiconductor integrated circuit
JPS58153349A (ja) * 1982-03-08 1983-09-12 Nec Corp 半導体装置の製造方法
JPS60241230A (ja) * 1984-05-16 1985-11-30 Hitachi Micro Comput Eng Ltd 半導体装置

Also Published As

Publication number Publication date
JPH01120340U (OSRAM) 1989-08-15

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