JPH07263777A - レーザーガス精製装置 - Google Patents

レーザーガス精製装置

Info

Publication number
JPH07263777A
JPH07263777A JP3077164A JP7716491A JPH07263777A JP H07263777 A JPH07263777 A JP H07263777A JP 3077164 A JP3077164 A JP 3077164A JP 7716491 A JP7716491 A JP 7716491A JP H07263777 A JPH07263777 A JP H07263777A
Authority
JP
Japan
Prior art keywords
laser gas
laser
liquid nitrogen
temperature
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3077164A
Other languages
English (en)
Japanese (ja)
Inventor
Dirk Basting
ディルク バスティング
Fuehrer Gerd Stein
フューラー ゲルト シュタイン
Frank Voss
フランク フォス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAMBDA PHYSIK G ZUR HERSTELLUNG VON LASERN MBH
Lambda Physik AG
Original Assignee
LAMBDA PHYSIK G ZUR HERSTELLUNG VON LASERN MBH
Lambda Physik AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LAMBDA PHYSIK G ZUR HERSTELLUNG VON LASERN MBH, Lambda Physik AG filed Critical LAMBDA PHYSIK G ZUR HERSTELLUNG VON LASERN MBH
Publication of JPH07263777A publication Critical patent/JPH07263777A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP3077164A 1990-03-27 1991-03-18 レーザーガス精製装置 Pending JPH07263777A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4009850.8 1990-03-27
DE4009850A DE4009850C1 (enExample) 1990-03-27 1990-03-27

Publications (1)

Publication Number Publication Date
JPH07263777A true JPH07263777A (ja) 1995-10-13

Family

ID=6403172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3077164A Pending JPH07263777A (ja) 1990-03-27 1991-03-18 レーザーガス精製装置

Country Status (3)

Country Link
US (2) US5136605A (enExample)
JP (1) JPH07263777A (enExample)
DE (1) DE4009850C1 (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4009850C1 (enExample) * 1990-03-27 1991-11-07 Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh, 3400 Goettingen, De
DE4132148C2 (de) * 1991-09-26 1996-11-21 Wb Laser Wegmann Baasel Laser Pumpenanordnung für einen Gasentladungslaser
DE4200990A1 (de) * 1992-01-16 1993-07-22 Linde Ag Verfahren zur abtrennung von dampffoermigen komponenten aus einem dampf-traegergas-gemisch
US5377911A (en) * 1993-06-14 1995-01-03 International Business Machines Corporation Apparatus for producing cryogenic aerosol
US5400603A (en) * 1993-06-14 1995-03-28 International Business Machines Corporation Heat exchanger
US5366156A (en) * 1993-06-14 1994-11-22 International Business Machines Corporation Nozzle apparatus for producing aerosol
DE4428210C2 (de) * 1994-08-09 2002-10-24 Lambda Physik Ag Verfahren zur cryogenischen Reinigung von XeF-Excimerlaser-Gasgemischen sowie Vorrichtung zur Durchführung des Verfahrens
JP3025866B2 (ja) 1995-09-14 2000-03-27 岩谷産業株式会社 レーザーガスの低温精製器
DE19635002A1 (de) * 1996-08-30 1998-03-05 Messer Griesheim Gmbh Verfahren zur Online-Rückgewinnung von Xenon aus Narkosegas
US6490307B1 (en) 1999-03-17 2002-12-03 Lambda Physik Ag Method and procedure to automatically stabilize excimer laser output parameters
US6965624B2 (en) * 1999-03-17 2005-11-15 Lambda Physik Ag Laser gas replenishment method
US6389052B2 (en) 1999-03-17 2002-05-14 Lambda Physik Ag Laser gas replenishment method
US6069909A (en) * 1999-03-08 2000-05-30 Xmr, Inc. Excimer laser with improved window mount
US6727731B1 (en) 1999-03-12 2004-04-27 Lambda Physik Ag Energy control for an excimer or molecular fluorine laser
US6714577B1 (en) 1999-03-17 2004-03-30 Lambda Physik Ag Energy stabilized gas discharge laser
US6381065B1 (en) 1999-03-26 2002-04-30 Tycom (Us) Inc. Optical pump unit for an optical amplifier
US6907058B2 (en) 2000-01-25 2005-06-14 Lambda Physik Ag Energy monitor for molecular fluorine laser
RU2206186C2 (ru) 2000-07-04 2003-06-10 Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований Способ получения коротковолнового излучения из газоразрядной плазмы и устройство для его реализации
US6721345B2 (en) 2000-07-14 2004-04-13 Lambda Physik Ag Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasers
US6804327B2 (en) * 2001-04-03 2004-10-12 Lambda Physik Ag Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
US6998620B2 (en) * 2001-08-13 2006-02-14 Lambda Physik Ag Stable energy detector for extreme ultraviolet radiation detection
CA2430608C (en) 2002-06-03 2012-01-10 Praxair Technology, Inc. Carbon dioxide laser resonator gas
US7094036B2 (en) * 2003-09-24 2006-08-22 The Boc Group Plc Vacuum pumping system
JP2006242484A (ja) * 2005-03-03 2006-09-14 Sumitomo Heavy Ind Ltd 蓄冷材、蓄冷器及び極低温蓄冷式冷凍機
US20110097253A1 (en) * 2009-10-27 2011-04-28 Fluoromer Llc Fluorine purification
CN115693354A (zh) * 2021-07-23 2023-02-03 北京科益虹源光电技术有限公司 激光器的净化方法、系统及装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1207879A (en) * 1982-09-06 1986-07-15 Anthony J. Andrews Condensers for gas purification and fractionation
US4674092A (en) * 1985-03-25 1987-06-16 Coherent, Inc. Miniature cryogenic pump method and apparatus for ion lasers
CA1298959C (en) * 1985-09-28 1992-04-21 Kohzo Hakuta Method of refining rare gas halide excimer laser gas
EP0263994B1 (de) * 1986-09-30 1991-03-06 Siemens Aktiengesellschaft Einrichtung zur Herstellung eines Gasgemisches
JPH02112292A (ja) * 1988-10-20 1990-04-24 Mitsubishi Electric Corp ハロゲンガスレーザのガス制御装置
EP0374287A1 (de) * 1988-12-21 1990-06-27 Coherent General, Inc. Gaslaser
US4977749A (en) * 1989-04-25 1990-12-18 Sercel Jeffrey P Apparatus and method for purification of gases used in exciplex (excimer) lasers
DE3919771A1 (de) * 1989-06-16 1990-12-20 Lambda Physik Forschung Vorrichtung zum reinigen von lasergas
DE4009850C1 (enExample) * 1990-03-27 1991-11-07 Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh, 3400 Goettingen, De
US5073896A (en) * 1991-04-18 1991-12-17 Lumonics Inc. Purification of laser gases

Also Published As

Publication number Publication date
US5430752A (en) 1995-07-04
US5136605A (en) 1992-08-04
DE4009850C1 (enExample) 1991-11-07

Similar Documents

Publication Publication Date Title
JPH07263777A (ja) レーザーガス精製装置
ES2880481T3 (es) Refrigeración por inmersión
US3894171A (en) Electrical transformers
US3921002A (en) Ozone generator
US3585807A (en) Method of and apparatus for pumping gas under cryogenic conditions
ES2081272T1 (es) Metodo y aparato para recuperar refrigerante.
US20180044761A1 (en) Method of purifying and casting materials
RU2757775C2 (ru) Устройство для обработки жидкости, подлежащей анализу
KR20020031350A (ko) 반도체 제조 설비, 반도체 제조 장치 및 반도체 제조 방법
KR0156731B1 (ko) 저온성 액체를 샘플링하는 방법 및 장치
US3272258A (en) Means for keeping a high degree of temperature stability within a chamber of substantial dimensions
US3424230A (en) Cryogenic refrigeration device with temperature controlled diffuser
SU953975A3 (ru) Устройство дл стерилизации жидкостей
US4601040A (en) Condensers
US3216210A (en) Cryostat apparatus
JP7353936B2 (ja) 分析装置及び分析方法
US3330125A (en) Cryogenic method
US20130082409A1 (en) Apparatus and Method for Providing Low Temperature Reaction Conditions
JPH02174901A (ja) 凝集トラップのガス流から微量物質を中間濃縮する装置
US3461040A (en) Apparatus for automatic reduced pressure semi-micro distillation of liquid decomposing at boiling point under atmospheric pressure
JP3806590B2 (ja) 高濃度オゾンガスの定圧供給方法
JPS63287502A (ja) 気体精製装置
SU920439A1 (ru) Криогенно-конденсационное устройство дл отбора проб воздуха с примес ми
SU1011144A1 (ru) Устройство дл очистки газов
JPH11199207A (ja) オゾンビーム発生方法及び装置