JPH0726360Y2 - 基板保持装置 - Google Patents
基板保持装置Info
- Publication number
- JPH0726360Y2 JPH0726360Y2 JP10037490U JP10037490U JPH0726360Y2 JP H0726360 Y2 JPH0726360 Y2 JP H0726360Y2 JP 10037490 U JP10037490 U JP 10037490U JP 10037490 U JP10037490 U JP 10037490U JP H0726360 Y2 JPH0726360 Y2 JP H0726360Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- suction head
- holding device
- substrate holding
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 48
- 230000005611 electricity Effects 0.000 claims description 3
- 230000003068 static effect Effects 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 description 15
- 238000000926 separation method Methods 0.000 description 7
- 238000005468 ion implantation Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000002156 adsorbate Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10037490U JPH0726360Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10037490U JPH0726360Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0456749U JPH0456749U (enrdf_load_stackoverflow) | 1992-05-15 |
| JPH0726360Y2 true JPH0726360Y2 (ja) | 1995-06-14 |
Family
ID=31842979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10037490U Expired - Lifetime JPH0726360Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726360Y2 (enrdf_load_stackoverflow) |
-
1990
- 1990-09-25 JP JP10037490U patent/JPH0726360Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0456749U (enrdf_load_stackoverflow) | 1992-05-15 |
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