JPH07220676A - 気体試料を分析する方法及び装置 - Google Patents
気体試料を分析する方法及び装置Info
- Publication number
- JPH07220676A JPH07220676A JP6244180A JP24418094A JPH07220676A JP H07220676 A JPH07220676 A JP H07220676A JP 6244180 A JP6244180 A JP 6244180A JP 24418094 A JP24418094 A JP 24418094A JP H07220676 A JPH07220676 A JP H07220676A
- Authority
- JP
- Japan
- Prior art keywords
- ions
- ionization chamber
- electrons
- mass spectrometer
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 13
- 150000002500 ions Chemical class 0.000 claims abstract description 152
- 238000000605 extraction Methods 0.000 claims abstract description 30
- 230000007246 mechanism Effects 0.000 claims abstract description 16
- 230000035945 sensitivity Effects 0.000 claims abstract description 14
- 238000004458 analytical method Methods 0.000 claims abstract description 8
- 239000013078 crystal Substances 0.000 claims description 20
- 230000005284 excitation Effects 0.000 claims description 16
- 108010083687 Ion Pumps Proteins 0.000 claims description 8
- 230000003472 neutralizing effect Effects 0.000 claims description 6
- 238000012546 transfer Methods 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 238000013508 migration Methods 0.000 claims description 2
- 230000005012 migration Effects 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims 5
- 238000005452 bending Methods 0.000 claims 4
- 230000027756 respiratory electron transport chain Effects 0.000 claims 1
- 230000008878 coupling Effects 0.000 abstract 2
- 238000010168 coupling process Methods 0.000 abstract 2
- 238000005859 coupling reaction Methods 0.000 abstract 2
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 28
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 238000010884 ion-beam technique Methods 0.000 description 5
- 239000012528 membrane Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000000241 respiratory effect Effects 0.000 description 4
- 150000001768 cations Chemical class 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003534 oscillatory effect Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 206010002091 Anaesthesia Diseases 0.000 description 1
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000037005 anaesthesia Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- -1 oxygen ions Chemical class 0.000 description 1
- 230000035479 physiological effects, processes and functions Effects 0.000 description 1
- 230000002685 pulmonary effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/08—Electron sources, e.g. for generating photo-electrons, secondary electrons or Auger electrons
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
- H01J49/4215—Quadrupole mass filters
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US133592 | 1987-12-14 | ||
| US08/133,592 US5412207A (en) | 1993-10-07 | 1993-10-07 | Method and apparatus for analyzing a gas sample |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07220676A true JPH07220676A (ja) | 1995-08-18 |
Family
ID=22459369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6244180A Pending JPH07220676A (ja) | 1993-10-07 | 1994-10-07 | 気体試料を分析する方法及び装置 |
Country Status (4)
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5670378A (en) * | 1995-02-23 | 1997-09-23 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method for trace oxygen detection |
| US5808299A (en) * | 1996-04-01 | 1998-09-15 | Syagen Technology | Real-time multispecies monitoring by photoionization mass spectrometry |
| US5808308A (en) * | 1996-05-03 | 1998-09-15 | Leybold Inficon Inc. | Dual ion source |
| US5834770A (en) * | 1997-03-21 | 1998-11-10 | Leybold Inficon, Inc. | Ion collecting electrode for total pressure collector |
| US6121609A (en) * | 1998-10-16 | 2000-09-19 | Siemens Aktiengesellschaft | Pulsed mass spectrometer leak valve with controlled energy closure |
| US6355929B1 (en) * | 1998-10-16 | 2002-03-12 | Siemens Energy & Automation, Inc. | Method for forming a seat in a pulsed sampling valve |
| US6239429B1 (en) | 1998-10-26 | 2001-05-29 | Mks Instruments, Inc. | Quadrupole mass spectrometer assembly |
| US6289287B1 (en) | 1999-01-29 | 2001-09-11 | Agilent Technologies, Inc. | Identification of sample component using a mass sensor system |
| US7109476B2 (en) | 1999-02-09 | 2006-09-19 | Syagen Technology | Multiple ion sources involving atmospheric pressure photoionization |
| US7119342B2 (en) * | 1999-02-09 | 2006-10-10 | Syagen Technology | Interfaces for a photoionization mass spectrometer |
| US6630664B1 (en) | 1999-02-09 | 2003-10-07 | Syagen Technology | Atmospheric pressure photoionizer for mass spectrometry |
| JP2002541618A (ja) * | 1999-03-19 | 2002-12-03 | フェイ カンパニ | イオンポンプ用の波型陽極素子 |
| DE60139983D1 (de) * | 2000-03-20 | 2009-11-05 | Draper Lab Charles S | Biegewellensensor |
| JP2003532056A (ja) * | 2000-04-05 | 2003-10-28 | ザ チャールズ スターク ドレイパー ラボラトリー インク | 物質の質量を測定する装置及びその方法 |
| US6737642B2 (en) | 2002-03-18 | 2004-05-18 | Syagen Technology | High dynamic range analog-to-digital converter |
| WO2004079765A2 (en) | 2003-03-03 | 2004-09-16 | Brigham Young University | Novel electro ionization source for orthogonal acceleration time-of-flight mass spectrometry |
| US7064322B2 (en) * | 2004-10-01 | 2006-06-20 | Agilent Technologies, Inc. | Mass spectrometer multipole device |
| US8525106B2 (en) * | 2011-05-09 | 2013-09-03 | Bruker Daltonics, Inc. | Method and apparatus for transmitting ions in a mass spectrometer maintained in a sub-atmospheric pressure regime |
| US9117617B2 (en) * | 2013-06-24 | 2015-08-25 | Agilent Technologies, Inc. | Axial magnetic ion source and related ionization methods |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3560734A (en) * | 1968-06-26 | 1971-02-02 | Edward F Barnett | Quadrupole mass filter with fringing-field penetrating structure |
| US3926209A (en) * | 1973-04-30 | 1975-12-16 | Univ Colorado | Method and inlet control system for controlling a gas flow sample to an evacuated chamber |
| US3895231A (en) * | 1973-04-30 | 1975-07-15 | Univ Colorado | Method and inlet control system for controlling a gas flow sample to an evacuated chamber |
| US4008388A (en) * | 1974-05-16 | 1977-02-15 | Universal Monitor Corporation | Mass spectrometric system for rapid, automatic and specific identification and quantitation of compounds |
| US4018241A (en) * | 1974-09-23 | 1977-04-19 | The Regents Of The University Of Colorado | Method and inlet control system for controlling a gas flow sample to an evacuated chamber |
| US3996464A (en) * | 1975-11-21 | 1976-12-07 | Nasa | Mass spectrometer with magnetic pole pieces providing the magnetic fields for both the magnetic sector and an ion-type vacuum pump |
| DE7639431U1 (de) * | 1975-12-23 | 1977-06-16 | Aei Scientific Apparatus Ltd., Manchester (Grossbritannien) | Massenspektrometer |
| US4134073A (en) * | 1976-07-12 | 1979-01-09 | Honeywell Information Systems Inc. | Clock system having adaptive synchronization feature |
| US4689574A (en) * | 1983-03-04 | 1987-08-25 | Uti Instrument Co. | Electron impact ion source for trace analysis |
| CA1245778A (en) * | 1985-10-24 | 1988-11-29 | John B. French | Mass analyzer system with reduced drift |
| DE3538407A1 (de) * | 1985-10-29 | 1987-04-30 | Spectrospin Ag | Ionen-zyklotron-resonanz-spektrometer |
| JPH07118295B2 (ja) * | 1985-10-30 | 1995-12-18 | 株式会社日立製作所 | 質量分析計 |
| US4755671A (en) * | 1986-01-31 | 1988-07-05 | Isomed, Inc. | Method and apparatus for separating ions of differing charge-to-mass ratio |
| US4731533A (en) * | 1986-10-15 | 1988-03-15 | Vestec Corporation | Method and apparatus for dissociating ions by electron impact |
| JPS63292557A (ja) * | 1987-05-25 | 1988-11-29 | Hitachi Ltd | 質量分析用分析管 |
| US4816685A (en) * | 1987-10-23 | 1989-03-28 | Lauronics, Inc. | Ion volume ring |
| JPH0624105B2 (ja) * | 1987-11-20 | 1994-03-30 | 株式会社日立製作所 | 多重極レンズ |
| JP2753265B2 (ja) * | 1988-06-10 | 1998-05-18 | 株式会社日立製作所 | プラズマイオン化質量分析計 |
| FR2657724A1 (fr) * | 1990-01-26 | 1991-08-02 | Nermag Ste Nouvelle | Source ionique pour spectrometre de masse quadripolaire. |
-
1993
- 1993-10-07 US US08/133,592 patent/US5412207A/en not_active Expired - Fee Related
-
1994
- 1994-09-29 EP EP94307145A patent/EP0647963A3/en not_active Withdrawn
- 1994-10-07 JP JP6244180A patent/JPH07220676A/ja active Pending
- 1994-11-09 TW TW083110375A patent/TW262534B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| US5412207A (en) | 1995-05-02 |
| TW262534B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1995-11-11 |
| EP0647963A3 (en) | 1996-01-10 |
| EP0647963A2 (en) | 1995-04-12 |
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