JPH0720913Y2 - 光処理器 - Google Patents

光処理器

Info

Publication number
JPH0720913Y2
JPH0720913Y2 JP1987044244U JP4424487U JPH0720913Y2 JP H0720913 Y2 JPH0720913 Y2 JP H0720913Y2 JP 1987044244 U JP1987044244 U JP 1987044244U JP 4424487 U JP4424487 U JP 4424487U JP H0720913 Y2 JPH0720913 Y2 JP H0720913Y2
Authority
JP
Japan
Prior art keywords
light
wafer
processing table
illuminance
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987044244U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63152235U (enrdf_load_stackoverflow
Inventor
裕子 鈴木
信二 鈴木
徹治 荒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP1987044244U priority Critical patent/JPH0720913Y2/ja
Publication of JPS63152235U publication Critical patent/JPS63152235U/ja
Application granted granted Critical
Publication of JPH0720913Y2 publication Critical patent/JPH0720913Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987044244U 1987-03-27 1987-03-27 光処理器 Expired - Lifetime JPH0720913Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987044244U JPH0720913Y2 (ja) 1987-03-27 1987-03-27 光処理器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987044244U JPH0720913Y2 (ja) 1987-03-27 1987-03-27 光処理器

Publications (2)

Publication Number Publication Date
JPS63152235U JPS63152235U (enrdf_load_stackoverflow) 1988-10-06
JPH0720913Y2 true JPH0720913Y2 (ja) 1995-05-15

Family

ID=30861867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987044244U Expired - Lifetime JPH0720913Y2 (ja) 1987-03-27 1987-03-27 光処理器

Country Status (1)

Country Link
JP (1) JPH0720913Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0719044Y2 (ja) * 1989-06-22 1995-05-01 千代田化工建設株式会社 蛍光灯照明装置
JP5473430B2 (ja) * 2008-11-14 2014-04-16 利朗 伊藤 照明器具および照明器具を用いた照明システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117836B2 (enrdf_load_stackoverflow) * 1973-06-04 1976-06-04
JPS5559403U (enrdf_load_stackoverflow) * 1978-10-18 1980-04-22
JPS6051812U (ja) * 1983-09-19 1985-04-11 三菱電機株式会社 照明器具

Also Published As

Publication number Publication date
JPS63152235U (enrdf_load_stackoverflow) 1988-10-06

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