JPH0719154Y2 - ウェハーカセットダム装置 - Google Patents

ウェハーカセットダム装置

Info

Publication number
JPH0719154Y2
JPH0719154Y2 JP1990054471U JP5447190U JPH0719154Y2 JP H0719154 Y2 JPH0719154 Y2 JP H0719154Y2 JP 1990054471 U JP1990054471 U JP 1990054471U JP 5447190 U JP5447190 U JP 5447190U JP H0719154 Y2 JPH0719154 Y2 JP H0719154Y2
Authority
JP
Japan
Prior art keywords
cassette
support rod
mounting
cassette mounting
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990054471U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0412648U (show.php
Inventor
修 北川
Original Assignee
三友工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三友工業株式会社 filed Critical 三友工業株式会社
Priority to JP1990054471U priority Critical patent/JPH0719154Y2/ja
Publication of JPH0412648U publication Critical patent/JPH0412648U/ja
Application granted granted Critical
Publication of JPH0719154Y2 publication Critical patent/JPH0719154Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP1990054471U 1990-05-24 1990-05-24 ウェハーカセットダム装置 Expired - Lifetime JPH0719154Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990054471U JPH0719154Y2 (ja) 1990-05-24 1990-05-24 ウェハーカセットダム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990054471U JPH0719154Y2 (ja) 1990-05-24 1990-05-24 ウェハーカセットダム装置

Publications (2)

Publication Number Publication Date
JPH0412648U JPH0412648U (show.php) 1992-01-31
JPH0719154Y2 true JPH0719154Y2 (ja) 1995-05-01

Family

ID=31576564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990054471U Expired - Lifetime JPH0719154Y2 (ja) 1990-05-24 1990-05-24 ウェハーカセットダム装置

Country Status (1)

Country Link
JP (1) JPH0719154Y2 (show.php)

Also Published As

Publication number Publication date
JPH0412648U (show.php) 1992-01-31

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