JPH0717374Y2 - 排ガス処理装置 - Google Patents
排ガス処理装置Info
- Publication number
- JPH0717374Y2 JPH0717374Y2 JP1989067840U JP6784089U JPH0717374Y2 JP H0717374 Y2 JPH0717374 Y2 JP H0717374Y2 JP 1989067840 U JP1989067840 U JP 1989067840U JP 6784089 U JP6784089 U JP 6784089U JP H0717374 Y2 JPH0717374 Y2 JP H0717374Y2
- Authority
- JP
- Japan
- Prior art keywords
- etching gas
- adsorption
- exhaust
- exhaust gas
- adsorbent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005530 etching Methods 0.000 claims description 43
- 238000001179 sorption measurement Methods 0.000 claims description 37
- 239000003463 adsorbent Substances 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 14
- 238000001312 dry etching Methods 0.000 claims description 12
- 238000007599 discharging Methods 0.000 claims description 3
- 239000000460 chlorine Substances 0.000 description 5
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 4
- 239000004327 boric acid Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000002845 discoloration Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 102220491117 Putative postmeiotic segregation increased 2-like protein 1_C23F_mutation Human genes 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989067840U JPH0717374Y2 (ja) | 1989-06-08 | 1989-06-08 | 排ガス処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989067840U JPH0717374Y2 (ja) | 1989-06-08 | 1989-06-08 | 排ガス処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH037930U JPH037930U (enrdf_load_stackoverflow) | 1991-01-25 |
| JPH0717374Y2 true JPH0717374Y2 (ja) | 1995-04-26 |
Family
ID=31601773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989067840U Expired - Lifetime JPH0717374Y2 (ja) | 1989-06-08 | 1989-06-08 | 排ガス処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0717374Y2 (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61194360A (ja) * | 1985-02-22 | 1986-08-28 | Ube Ind Ltd | 三塩化ホウ素吸着装置の破過検知方法 |
-
1989
- 1989-06-08 JP JP1989067840U patent/JPH0717374Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037930U (enrdf_load_stackoverflow) | 1991-01-25 |
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