JPH037930U - - Google Patents

Info

Publication number
JPH037930U
JPH037930U JP6784089U JP6784089U JPH037930U JP H037930 U JPH037930 U JP H037930U JP 6784089 U JP6784089 U JP 6784089U JP 6784089 U JP6784089 U JP 6784089U JP H037930 U JPH037930 U JP H037930U
Authority
JP
Japan
Prior art keywords
etching gas
adsorption column
exhaust
treatment device
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6784089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0717374Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989067840U priority Critical patent/JPH0717374Y2/ja
Publication of JPH037930U publication Critical patent/JPH037930U/ja
Application granted granted Critical
Publication of JPH0717374Y2 publication Critical patent/JPH0717374Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1989067840U 1989-06-08 1989-06-08 排ガス処理装置 Expired - Lifetime JPH0717374Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989067840U JPH0717374Y2 (ja) 1989-06-08 1989-06-08 排ガス処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989067840U JPH0717374Y2 (ja) 1989-06-08 1989-06-08 排ガス処理装置

Publications (2)

Publication Number Publication Date
JPH037930U true JPH037930U (enrdf_load_stackoverflow) 1991-01-25
JPH0717374Y2 JPH0717374Y2 (ja) 1995-04-26

Family

ID=31601773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989067840U Expired - Lifetime JPH0717374Y2 (ja) 1989-06-08 1989-06-08 排ガス処理装置

Country Status (1)

Country Link
JP (1) JPH0717374Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61194360A (ja) * 1985-02-22 1986-08-28 Ube Ind Ltd 三塩化ホウ素吸着装置の破過検知方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61194360A (ja) * 1985-02-22 1986-08-28 Ube Ind Ltd 三塩化ホウ素吸着装置の破過検知方法

Also Published As

Publication number Publication date
JPH0717374Y2 (ja) 1995-04-26

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