JPH037930U - - Google Patents
Info
- Publication number
- JPH037930U JPH037930U JP6784089U JP6784089U JPH037930U JP H037930 U JPH037930 U JP H037930U JP 6784089 U JP6784089 U JP 6784089U JP 6784089 U JP6784089 U JP 6784089U JP H037930 U JPH037930 U JP H037930U
- Authority
- JP
- Japan
- Prior art keywords
- etching gas
- adsorption column
- exhaust
- treatment device
- adsorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 6
- 239000003463 adsorbent Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000001312 dry etching Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Separation Of Gases By Adsorption (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Treating Waste Gases (AREA)
Description
第１図は本考案に係る排ガス処理装置の概略図
、第２図は従来の排ガス処理装置の概略図である
。
１……ドライエツチング装置、２……エツチン
グガス、５……吸着筒、６……吸着剤、６ａ……
排気口、８……検出手段、９……排気ダクト、１
０……透明管、１１……第１の入口、１２……第
２の入口、１３……出口、１４……空気、１５…
…センサ。
FIG. 1 is a schematic diagram of an exhaust gas treatment device according to the present invention, and FIG. 2 is a schematic diagram of a conventional exhaust gas treatment device. 1...Dry etching device, 2...Etching gas, 5...Adsorption cylinder, 6...Adsorbent, 6a...
Exhaust port, 8...Detection means, 9...Exhaust duct, 1
0...Transparent tube, 11...First inlet, 12...Second inlet, 13...Outlet, 14...Air, 15...
...Sensor.
Claims (1)
チングガスを吸着する吸着剤を充填した吸着筒と
、前記吸着剤の吸着能力が喪失したことを検知す
る検出手段と、上記吸着筒に連通する排気ダクト
とを具備する排ガス処理装置において、 上記吸着筒から漏洩したエツチングガスを吸入
する第１の入口と、前記漏洩したエツチングガス
と反応して着色させる空気を外部から導入する第
２の入口と、前記着色されたエツチングガス及び
空気を上記排気ダクトに排出する出口とを有する
透明管を上記吸着筒の排気口に付設したことを特
徴とする排ガス処理装置。 (2) 吸着筒から漏洩したエツチングガスが着色
されたことを検知するセンサを、請求項１記載の
透明管の出口部分に付設したことを特徴とする排
ガス処理装置。[Claims for Utility Model Registration] (1) An adsorption column filled with an adsorbent that adsorbs etching gas discharged from a dry etching device, a detection means for detecting loss of adsorption capacity of the adsorbent, and the above-mentioned An exhaust gas treatment device comprising an exhaust duct communicating with an adsorption column, a first inlet for sucking etching gas leaked from the adsorption column, and introducing air from the outside to react with and color the leaked etching gas. An exhaust gas treatment device characterized in that a transparent tube having a second inlet and an outlet for discharging the colored etching gas and air to the exhaust duct is attached to the exhaust port of the adsorption column. (2) An exhaust gas treatment device characterized in that a sensor for detecting that the etching gas leaking from the adsorption cylinder is colored is attached to the outlet portion of the transparent tube according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989067840U JPH0717374Y2 (en) | 1989-06-08 | 1989-06-08 | Exhaust gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989067840U JPH0717374Y2 (en) | 1989-06-08 | 1989-06-08 | Exhaust gas treatment device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH037930U true JPH037930U (en) | 1991-01-25 |
| JPH0717374Y2 JPH0717374Y2 (en) | 1995-04-26 |
Family
ID=31601773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989067840U Expired - Lifetime JPH0717374Y2 (en) | 1989-06-08 | 1989-06-08 | Exhaust gas treatment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0717374Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61194360A (en) * | 1985-02-22 | 1986-08-28 | Ube Ind Ltd | Detection agent of boron trichloride and method for detecting breakthrough of boron trichloride adsorbing apparatus |
-
1989
- 1989-06-08 JP JP1989067840U patent/JPH0717374Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61194360A (en) * | 1985-02-22 | 1986-08-28 | Ube Ind Ltd | Detection agent of boron trichloride and method for detecting breakthrough of boron trichloride adsorbing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0717374Y2 (en) | 1995-04-26 |