JPH0715722Y2 - 定盤回転駆動用治具 - Google Patents

定盤回転駆動用治具

Info

Publication number
JPH0715722Y2
JPH0715722Y2 JP1989033020U JP3302089U JPH0715722Y2 JP H0715722 Y2 JPH0715722 Y2 JP H0715722Y2 JP 1989033020 U JP1989033020 U JP 1989033020U JP 3302089 U JP3302089 U JP 3302089U JP H0715722 Y2 JPH0715722 Y2 JP H0715722Y2
Authority
JP
Japan
Prior art keywords
driver
surface plate
jig
shaft
drive shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989033020U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02126749U (cs
Inventor
和彦 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SpeedFam Co Ltd
Original Assignee
SpeedFam Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SpeedFam Co Ltd filed Critical SpeedFam Co Ltd
Priority to JP1989033020U priority Critical patent/JPH0715722Y2/ja
Publication of JPH02126749U publication Critical patent/JPH02126749U/ja
Application granted granted Critical
Publication of JPH0715722Y2 publication Critical patent/JPH0715722Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989033020U 1989-03-23 1989-03-23 定盤回転駆動用治具 Expired - Lifetime JPH0715722Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989033020U JPH0715722Y2 (ja) 1989-03-23 1989-03-23 定盤回転駆動用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989033020U JPH0715722Y2 (ja) 1989-03-23 1989-03-23 定盤回転駆動用治具

Publications (2)

Publication Number Publication Date
JPH02126749U JPH02126749U (cs) 1990-10-18
JPH0715722Y2 true JPH0715722Y2 (ja) 1995-04-12

Family

ID=31536353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989033020U Expired - Lifetime JPH0715722Y2 (ja) 1989-03-23 1989-03-23 定盤回転駆動用治具

Country Status (1)

Country Link
JP (1) JPH0715722Y2 (cs)

Also Published As

Publication number Publication date
JPH02126749U (cs) 1990-10-18

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