JPH0715648B2 - 機械の位置修正用の追跡制御装置 - Google Patents

機械の位置修正用の追跡制御装置

Info

Publication number
JPH0715648B2
JPH0715648B2 JP63174850A JP17485088A JPH0715648B2 JP H0715648 B2 JPH0715648 B2 JP H0715648B2 JP 63174850 A JP63174850 A JP 63174850A JP 17485088 A JP17485088 A JP 17485088A JP H0715648 B2 JPH0715648 B2 JP H0715648B2
Authority
JP
Japan
Prior art keywords
machine
control
bearing unit
control signal
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63174850A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6432314A (en
Inventor
ハイランド クラウス‐ペーター
Original Assignee
バリー コントロールス ゲゼルシヤフト ミツト ベシユレンクター ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by バリー コントロールス ゲゼルシヤフト ミツト ベシユレンクター ハフツング filed Critical バリー コントロールス ゲゼルシヤフト ミツト ベシユレンクター ハフツング
Publication of JPS6432314A publication Critical patent/JPS6432314A/ja
Publication of JPH0715648B2 publication Critical patent/JPH0715648B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Automatic Control Of Machine Tools (AREA)
JP63174850A 1987-07-16 1988-07-12 機械の位置修正用の追跡制御装置 Expired - Lifetime JPH0715648B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3723466.8 1987-07-16
DE19873723466 DE3723466A1 (de) 1987-07-16 1987-07-16 Nachstelleinrichtung zum korrigieren der lage einer maschine

Publications (2)

Publication Number Publication Date
JPS6432314A JPS6432314A (en) 1989-02-02
JPH0715648B2 true JPH0715648B2 (ja) 1995-02-22

Family

ID=6331653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63174850A Expired - Lifetime JPH0715648B2 (ja) 1987-07-16 1988-07-12 機械の位置修正用の追跡制御装置

Country Status (5)

Country Link
US (1) US4941265A (enExample)
EP (1) EP0299374A3 (enExample)
JP (1) JPH0715648B2 (enExample)
DD (1) DD271970A5 (enExample)
DE (1) DE3723466A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NZ199915A (en) * 1981-03-11 1985-07-12 Unilever Plc Treating edible oils to raise melting point thereof
US5068971A (en) * 1990-03-23 1991-12-03 Simco Industries, Inc. Adjustable portable coordinate measuring machine
JPH0830743B2 (ja) * 1991-03-07 1996-03-27 株式会社ミツトヨ レベリング装置
DE4114566C2 (de) * 1991-05-04 1999-07-08 Randolf Paul Rolff Verfahren zur Inbetriebnahme einer mit einem magnetgelagerten Rotor ausgerüsteten Maschine sowie Schaltung zur Durchführung dieses Verfahrens
JP2902205B2 (ja) * 1992-03-06 1999-06-07 株式会社ミツトヨ 空間誤差補正装置
US5347723A (en) * 1992-12-10 1994-09-20 Brown & Sharpe Mfg. Co. Air bearing control system
JP3265670B2 (ja) * 1993-01-21 2002-03-11 株式会社ニコン ステージ装置、ステージ駆動方法、及び露光装置
GB2281779B (en) * 1993-09-14 1997-04-23 Rank Taylor Hobson Ltd Metrological instrument
US6089525A (en) * 1997-10-07 2000-07-18 Ultratech Stepper, Inc. Six axis active vibration isolation and payload reaction force compensation system
GB2339287B (en) 1998-07-09 2002-12-24 Taylor Hobson Ltd Transducer circuit
US6566835B1 (en) * 1999-10-20 2003-05-20 Makino Milling Machine Co., Ltd. Nc machine tool, and method of controlling nc machine tool
DE10229823B4 (de) * 2002-06-28 2012-08-30 Carl Zeiss Industrielle Messtechnik Gmbh Dynamische Neigungskorrektur bei Koordinatenmessgeräten
DE102005039094B4 (de) * 2005-08-08 2009-03-19 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zum Führen eines Maschinenteils entlang einer definierten Bewegungsbahn über einer Werkstücksoberfläche
DE102005054290A1 (de) * 2005-11-11 2007-05-16 Bosch Rexroth Mechatronics Schnell verfahrender Gewindetrieb
US7866021B2 (en) * 2006-05-31 2011-01-11 Jac Property Holdings, Llc Methods and assemblies for manufacturing components
DE102007030202A1 (de) * 2007-06-27 2009-01-22 Vistec Semiconductor Systems Gmbh Koordinaten-Messmaschine mit Schwingungsentkopplung und Verfahren zur Schwingungsentkopplung einer Koordinaten-Messmaschine
DE102017116400A1 (de) * 2017-07-20 2019-01-24 Logicdata Electronic & Software Entwicklungs Gmbh Elektrisch verstellbares Tischsystem

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3633011A (en) * 1968-08-29 1972-01-04 Ibm Method and apparatus for precisely contouring a workpiece imprecisely positioned on a supporting fixture
GB1393035A (en) * 1971-07-09 1975-05-07 Olivetti & Co Spa Precision measuring apparatus with aerostatic bearings
DE2420928A1 (de) * 1974-04-26 1975-11-06 Mitsubishi Heavy Ind Ltd Koordinaten-messgeraet fuer eine exklusive propeller-bearbeitungsmaschine
US3918298A (en) * 1974-07-29 1975-11-11 Mts System Corp Multiple actuator control system
JPS5862509A (ja) * 1981-10-09 1983-04-14 Showa Electric Wire & Cable Co Ltd 除振台の制御方法
JPS5777905A (en) * 1980-10-31 1982-05-15 Mitsutoyo Mfg Co Ltd Measurement of three-dimensional measuring machine
GB2099151B (en) * 1981-02-14 1985-09-04 Lk Tool Co Ltd Measuring machine
FR2548402B1 (fr) * 1983-06-29 1986-03-14 Gen Mecanique Thermique Appareil de comparaison par methode de zero et son utilisation pour reglage des machines-outils
US4610089A (en) * 1985-12-05 1986-09-09 The Warner & Swasey Company Bridge type coordinate measuring machine
GB2186946A (en) * 1986-02-25 1987-08-26 Rank Taylor Hobson Ltd Vibration isolation means
US4821205A (en) * 1986-05-30 1989-04-11 Eaton Corporation Seismic isolation system with reaction mass

Also Published As

Publication number Publication date
EP0299374A2 (de) 1989-01-18
DD271970A5 (de) 1989-09-20
US4941265A (en) 1990-07-17
JPS6432314A (en) 1989-02-02
DE3723466A1 (de) 1989-01-26
EP0299374A3 (de) 1990-04-11
DE3723466C2 (enExample) 1989-05-24

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