JPH0713213Y2 - 化成装置 - Google Patents
化成装置Info
- Publication number
- JPH0713213Y2 JPH0713213Y2 JP7329287U JP7329287U JPH0713213Y2 JP H0713213 Y2 JPH0713213 Y2 JP H0713213Y2 JP 7329287 U JP7329287 U JP 7329287U JP 7329287 U JP7329287 U JP 7329287U JP H0713213 Y2 JPH0713213 Y2 JP H0713213Y2
- Authority
- JP
- Japan
- Prior art keywords
- chemical conversion
- semiconductor wafer
- conversion head
- head
- conversion device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 title claims description 63
- 238000006243 chemical reaction Methods 0.000 title claims description 61
- 239000004065 semiconductor Substances 0.000 claims description 22
- 239000007788 liquid Substances 0.000 claims description 14
- 238000005260 corrosion Methods 0.000 claims description 6
- 230000007797 corrosion Effects 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 19
- 239000002131 composite material Substances 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 5
- 229910052745 lead Inorganic materials 0.000 description 5
- 238000005868 electrolysis reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- -1 ammonium borate saturated ethylene glycol Chemical class 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Chemical Treatment Of Metals (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7329287U JPH0713213Y2 (ja) | 1987-05-15 | 1987-05-15 | 化成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7329287U JPH0713213Y2 (ja) | 1987-05-15 | 1987-05-15 | 化成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63183267U JPS63183267U (enrdf_load_stackoverflow) | 1988-11-25 |
| JPH0713213Y2 true JPH0713213Y2 (ja) | 1995-03-29 |
Family
ID=30917498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7329287U Expired - Lifetime JPH0713213Y2 (ja) | 1987-05-15 | 1987-05-15 | 化成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0713213Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-05-15 JP JP7329287U patent/JPH0713213Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63183267U (enrdf_load_stackoverflow) | 1988-11-25 |
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