JPH0711466Y2 - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPH0711466Y2
JPH0711466Y2 JP15471488U JP15471488U JPH0711466Y2 JP H0711466 Y2 JPH0711466 Y2 JP H0711466Y2 JP 15471488 U JP15471488 U JP 15471488U JP 15471488 U JP15471488 U JP 15471488U JP H0711466 Y2 JPH0711466 Y2 JP H0711466Y2
Authority
JP
Japan
Prior art keywords
wafer
processing
semiconductor wafer
semiconductor
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15471488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0275724U (enExample
Inventor
大二朗 工藤
Original Assignee
エム・シー・エレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エム・シー・エレクトロニクス株式会社 filed Critical エム・シー・エレクトロニクス株式会社
Priority to JP15471488U priority Critical patent/JPH0711466Y2/ja
Publication of JPH0275724U publication Critical patent/JPH0275724U/ja
Application granted granted Critical
Publication of JPH0711466Y2 publication Critical patent/JPH0711466Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP15471488U 1988-11-28 1988-11-28 プラズマ処理装置 Expired - Lifetime JPH0711466Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15471488U JPH0711466Y2 (ja) 1988-11-28 1988-11-28 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15471488U JPH0711466Y2 (ja) 1988-11-28 1988-11-28 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH0275724U JPH0275724U (enExample) 1990-06-11
JPH0711466Y2 true JPH0711466Y2 (ja) 1995-03-15

Family

ID=31431692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15471488U Expired - Lifetime JPH0711466Y2 (ja) 1988-11-28 1988-11-28 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0711466Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114613692A (zh) * 2020-12-09 2022-06-10 中国科学院微电子研究所 半导体加工设备

Also Published As

Publication number Publication date
JPH0275724U (enExample) 1990-06-11

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