JPH0710489Y2 - 原料供給機構 - Google Patents
原料供給機構Info
- Publication number
- JPH0710489Y2 JPH0710489Y2 JP5039788U JP5039788U JPH0710489Y2 JP H0710489 Y2 JPH0710489 Y2 JP H0710489Y2 JP 5039788 U JP5039788 U JP 5039788U JP 5039788 U JP5039788 U JP 5039788U JP H0710489 Y2 JPH0710489 Y2 JP H0710489Y2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- crucible
- box body
- metal
- supply mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002994 raw material Substances 0.000 title claims description 31
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 26
- 238000001451 molecular beam epitaxy Methods 0.000 description 5
- 210000000078 claw Anatomy 0.000 description 4
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5039788U JPH0710489Y2 (ja) | 1988-04-13 | 1988-04-13 | 原料供給機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5039788U JPH0710489Y2 (ja) | 1988-04-13 | 1988-04-13 | 原料供給機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01162231U JPH01162231U (enrdf_load_stackoverflow) | 1989-11-10 |
JPH0710489Y2 true JPH0710489Y2 (ja) | 1995-03-08 |
Family
ID=31276449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5039788U Expired - Lifetime JPH0710489Y2 (ja) | 1988-04-13 | 1988-04-13 | 原料供給機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0710489Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-04-13 JP JP5039788U patent/JPH0710489Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01162231U (enrdf_load_stackoverflow) | 1989-11-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4923353A (en) | Apparatus for automated cassette handling | |
US4875825A (en) | Method for automated cassette handling | |
EP0556193B1 (en) | Method and apparatus for transferring articles between two controlled environments | |
JP2003536247A (ja) | 材料搬送システム | |
WO1999033726A1 (en) | Smif pod door and port door removal and return system | |
US4694571A (en) | Apparatus for automatically changing X-ray films | |
JPH0710489Y2 (ja) | 原料供給機構 | |
JPS59222569A (ja) | 半導体基質上に耐熱金属の薄いフイルムを溶着する方法及び装置 | |
JP4177114B2 (ja) | プリアライナー及び格納ポッド・アクセス機構を備える集積回路基板ハンドラー | |
US20100028111A1 (en) | Variable-Size Load Port and Method for Operating the Same | |
US4532816A (en) | Sample vessel | |
US2744629A (en) | Method and apparatus for processing chemicals | |
JPH03274711A (ja) | 磁気吸着装置 | |
US6551405B1 (en) | Tool and method for in situ vapor phase deposition source material reloading and maintenance | |
JPS63190338A (ja) | ホルダ供給装置 | |
JP2695299B2 (ja) | 半導体製造装置 | |
JPH0269955A (ja) | マスクローディング機構 | |
US2570984A (en) | Ambient pressure-responsive clamping means | |
JP2003133386A (ja) | 基板搬入出装置 | |
JPH0437689A (ja) | 分子線エピタキシー装置 | |
JP2920781B2 (ja) | 熱処理装置 | |
JPS63243273A (ja) | ロ−ドロツク式真空処理装置 | |
JPH0447954Y2 (enrdf_load_stackoverflow) | ||
JPS6258654A (ja) | 半導体製造装置 | |
JPH1050623A (ja) | 化学気相成長装置 |