JPH0447954Y2 - - Google Patents

Info

Publication number
JPH0447954Y2
JPH0447954Y2 JP1983191394U JP19139483U JPH0447954Y2 JP H0447954 Y2 JPH0447954 Y2 JP H0447954Y2 JP 1983191394 U JP1983191394 U JP 1983191394U JP 19139483 U JP19139483 U JP 19139483U JP H0447954 Y2 JPH0447954 Y2 JP H0447954Y2
Authority
JP
Japan
Prior art keywords
wafer
gripping piece
base
movable gripping
wafer holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983191394U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6099531U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19139483U priority Critical patent/JPS6099531U/ja
Publication of JPS6099531U publication Critical patent/JPS6099531U/ja
Application granted granted Critical
Publication of JPH0447954Y2 publication Critical patent/JPH0447954Y2/ja
Granted legal-status Critical Current

Links

JP19139483U 1983-12-12 1983-12-12 ウエハーホルダ Granted JPS6099531U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19139483U JPS6099531U (ja) 1983-12-12 1983-12-12 ウエハーホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19139483U JPS6099531U (ja) 1983-12-12 1983-12-12 ウエハーホルダ

Publications (2)

Publication Number Publication Date
JPS6099531U JPS6099531U (ja) 1985-07-06
JPH0447954Y2 true JPH0447954Y2 (enrdf_load_stackoverflow) 1992-11-12

Family

ID=30412158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19139483U Granted JPS6099531U (ja) 1983-12-12 1983-12-12 ウエハーホルダ

Country Status (1)

Country Link
JP (1) JPS6099531U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678244U (enrdf_load_stackoverflow) * 1979-11-07 1981-06-25

Also Published As

Publication number Publication date
JPS6099531U (ja) 1985-07-06

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