JPH01162231U - - Google Patents

Info

Publication number
JPH01162231U
JPH01162231U JP5039788U JP5039788U JPH01162231U JP H01162231 U JPH01162231 U JP H01162231U JP 5039788 U JP5039788 U JP 5039788U JP 5039788 U JP5039788 U JP 5039788U JP H01162231 U JPH01162231 U JP H01162231U
Authority
JP
Japan
Prior art keywords
raw material
supply mechanism
raw
material supply
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5039788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0710489Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5039788U priority Critical patent/JPH0710489Y2/ja
Publication of JPH01162231U publication Critical patent/JPH01162231U/ja
Application granted granted Critical
Publication of JPH0710489Y2 publication Critical patent/JPH0710489Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP5039788U 1988-04-13 1988-04-13 原料供給機構 Expired - Lifetime JPH0710489Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5039788U JPH0710489Y2 (ja) 1988-04-13 1988-04-13 原料供給機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5039788U JPH0710489Y2 (ja) 1988-04-13 1988-04-13 原料供給機構

Publications (2)

Publication Number Publication Date
JPH01162231U true JPH01162231U (enrdf_load_stackoverflow) 1989-11-10
JPH0710489Y2 JPH0710489Y2 (ja) 1995-03-08

Family

ID=31276449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5039788U Expired - Lifetime JPH0710489Y2 (ja) 1988-04-13 1988-04-13 原料供給機構

Country Status (1)

Country Link
JP (1) JPH0710489Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0710489Y2 (ja) 1995-03-08

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