JPH069488Y2 - 反応管終端の気密シ−ル部冷却装置 - Google Patents

反応管終端の気密シ−ル部冷却装置

Info

Publication number
JPH069488Y2
JPH069488Y2 JP1985184520U JP18452085U JPH069488Y2 JP H069488 Y2 JPH069488 Y2 JP H069488Y2 JP 1985184520 U JP1985184520 U JP 1985184520U JP 18452085 U JP18452085 U JP 18452085U JP H069488 Y2 JPH069488 Y2 JP H069488Y2
Authority
JP
Japan
Prior art keywords
reaction tube
rubber packing
ring
water
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985184520U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6292635U (enExample
Inventor
竜彦 古門
利一 狩野
茂 武田
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1985184520U priority Critical patent/JPH069488Y2/ja
Publication of JPS6292635U publication Critical patent/JPS6292635U/ja
Application granted granted Critical
Publication of JPH069488Y2 publication Critical patent/JPH069488Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1985184520U 1985-12-02 1985-12-02 反応管終端の気密シ−ル部冷却装置 Expired - Lifetime JPH069488Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985184520U JPH069488Y2 (ja) 1985-12-02 1985-12-02 反応管終端の気密シ−ル部冷却装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985184520U JPH069488Y2 (ja) 1985-12-02 1985-12-02 反応管終端の気密シ−ル部冷却装置

Publications (2)

Publication Number Publication Date
JPS6292635U JPS6292635U (enExample) 1987-06-13
JPH069488Y2 true JPH069488Y2 (ja) 1994-03-09

Family

ID=31132274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985184520U Expired - Lifetime JPH069488Y2 (ja) 1985-12-02 1985-12-02 反応管終端の気密シ−ル部冷却装置

Country Status (1)

Country Link
JP (1) JPH069488Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2671979B2 (ja) * 1986-05-30 1997-11-05 東京エレクトロン株式会社 加熱装置

Also Published As

Publication number Publication date
JPS6292635U (enExample) 1987-06-13

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