JPH069487Y2 - ウェハ周辺露光装置 - Google Patents

ウェハ周辺露光装置

Info

Publication number
JPH069487Y2
JPH069487Y2 JP1988138181U JP13818188U JPH069487Y2 JP H069487 Y2 JPH069487 Y2 JP H069487Y2 JP 1988138181 U JP1988138181 U JP 1988138181U JP 13818188 U JP13818188 U JP 13818188U JP H069487 Y2 JPH069487 Y2 JP H069487Y2
Authority
JP
Japan
Prior art keywords
wafer
light
peripheral portion
lens system
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988138181U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0260229U (en:Method
Inventor
徹治 荒井
信二 鈴木
正人 住谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP1988138181U priority Critical patent/JPH069487Y2/ja
Publication of JPH0260229U publication Critical patent/JPH0260229U/ja
Application granted granted Critical
Publication of JPH069487Y2 publication Critical patent/JPH069487Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988138181U 1988-10-25 1988-10-25 ウェハ周辺露光装置 Expired - Lifetime JPH069487Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988138181U JPH069487Y2 (ja) 1988-10-25 1988-10-25 ウェハ周辺露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988138181U JPH069487Y2 (ja) 1988-10-25 1988-10-25 ウェハ周辺露光装置

Publications (2)

Publication Number Publication Date
JPH0260229U JPH0260229U (en:Method) 1990-05-02
JPH069487Y2 true JPH069487Y2 (ja) 1994-03-09

Family

ID=31400283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988138181U Expired - Lifetime JPH069487Y2 (ja) 1988-10-25 1988-10-25 ウェハ周辺露光装置

Country Status (1)

Country Link
JP (1) JPH069487Y2 (en:Method)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6060724A (ja) * 1983-09-14 1985-04-08 Toshiba Corp 半導体露光装置
JPS6173330A (ja) * 1984-09-18 1986-04-15 Nec Corp 半導体デバイス製造装置

Also Published As

Publication number Publication date
JPH0260229U (en:Method) 1990-05-02

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