JPH069011Y2 - 蒸着用るつぼ - Google Patents

蒸着用るつぼ

Info

Publication number
JPH069011Y2
JPH069011Y2 JP5069689U JP5069689U JPH069011Y2 JP H069011 Y2 JPH069011 Y2 JP H069011Y2 JP 5069689 U JP5069689 U JP 5069689U JP 5069689 U JP5069689 U JP 5069689U JP H069011 Y2 JPH069011 Y2 JP H069011Y2
Authority
JP
Japan
Prior art keywords
crucible
vapor deposition
sintered
pellet
open
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5069689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02142463U (US20100056889A1-20100304-C00004.png
Inventor
俊 西尾
潤一 吉田
Original Assignee
ホーヤ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ホーヤ株式会社 filed Critical ホーヤ株式会社
Priority to JP5069689U priority Critical patent/JPH069011Y2/ja
Publication of JPH02142463U publication Critical patent/JPH02142463U/ja
Application granted granted Critical
Publication of JPH069011Y2 publication Critical patent/JPH069011Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5069689U 1989-04-28 1989-04-28 蒸着用るつぼ Expired - Lifetime JPH069011Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5069689U JPH069011Y2 (ja) 1989-04-28 1989-04-28 蒸着用るつぼ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5069689U JPH069011Y2 (ja) 1989-04-28 1989-04-28 蒸着用るつぼ

Publications (2)

Publication Number Publication Date
JPH02142463U JPH02142463U (US20100056889A1-20100304-C00004.png) 1990-12-03
JPH069011Y2 true JPH069011Y2 (ja) 1994-03-09

Family

ID=31569466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5069689U Expired - Lifetime JPH069011Y2 (ja) 1989-04-28 1989-04-28 蒸着用るつぼ

Country Status (1)

Country Link
JP (1) JPH069011Y2 (US20100056889A1-20100304-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008100299A (ja) * 2006-10-17 2008-05-01 Hoya Corp 蒸着材料除去装置および蒸着材料除去方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008100299A (ja) * 2006-10-17 2008-05-01 Hoya Corp 蒸着材料除去装置および蒸着材料除去方法

Also Published As

Publication number Publication date
JPH02142463U (US20100056889A1-20100304-C00004.png) 1990-12-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term