JPH068555Y2 - ガスクロマトグラフを用いた精製ガス中の微量不純物成分の測定装置 - Google Patents
ガスクロマトグラフを用いた精製ガス中の微量不純物成分の測定装置Info
- Publication number
- JPH068555Y2 JPH068555Y2 JP1987011926U JP1192687U JPH068555Y2 JP H068555 Y2 JPH068555 Y2 JP H068555Y2 JP 1987011926 U JP1987011926 U JP 1987011926U JP 1192687 U JP1192687 U JP 1192687U JP H068555 Y2 JPH068555 Y2 JP H068555Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- flow path
- column
- introduction flow
- supply line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012535 impurity Substances 0.000 title claims description 12
- 239000007789 gas Substances 0.000 claims description 57
- 239000012159 carrier gas Substances 0.000 claims description 13
- 238000005070 sampling Methods 0.000 claims description 8
- 238000005259 measurement Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Treatment Of Liquids With Adsorbents In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987011926U JPH068555Y2 (ja) | 1987-01-29 | 1987-01-29 | ガスクロマトグラフを用いた精製ガス中の微量不純物成分の測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987011926U JPH068555Y2 (ja) | 1987-01-29 | 1987-01-29 | ガスクロマトグラフを用いた精製ガス中の微量不純物成分の測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63120157U JPS63120157U (OSRAM) | 1988-08-03 |
| JPH068555Y2 true JPH068555Y2 (ja) | 1994-03-02 |
Family
ID=30799584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987011926U Expired - Lifetime JPH068555Y2 (ja) | 1987-01-29 | 1987-01-29 | ガスクロマトグラフを用いた精製ガス中の微量不純物成分の測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH068555Y2 (OSRAM) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5835807B2 (ja) * | 1975-06-24 | 1983-08-05 | トウシバタンガロイ カブシキガイシヤ | スロ−アウエイシキノ シヨウメンフライス |
| JPS5769250A (en) * | 1980-10-18 | 1982-04-27 | Yuji Takayama | Method for injecting sample into caplicary column |
-
1987
- 1987-01-29 JP JP1987011926U patent/JPH068555Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63120157U (OSRAM) | 1988-08-03 |
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