JPH06795Y2 - 微動回転ステージ - Google Patents

微動回転ステージ

Info

Publication number
JPH06795Y2
JPH06795Y2 JP1987135111U JP13511187U JPH06795Y2 JP H06795 Y2 JPH06795 Y2 JP H06795Y2 JP 1987135111 U JP1987135111 U JP 1987135111U JP 13511187 U JP13511187 U JP 13511187U JP H06795 Y2 JPH06795 Y2 JP H06795Y2
Authority
JP
Japan
Prior art keywords
movable
fine movement
thin
input arm
rotary stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987135111U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6440087U (enrdf_load_stackoverflow
Inventor
穣治 岩田
英一 河野
良治 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1987135111U priority Critical patent/JPH06795Y2/ja
Publication of JPS6440087U publication Critical patent/JPS6440087U/ja
Application granted granted Critical
Publication of JPH06795Y2 publication Critical patent/JPH06795Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP1987135111U 1987-09-03 1987-09-03 微動回転ステージ Expired - Lifetime JPH06795Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987135111U JPH06795Y2 (ja) 1987-09-03 1987-09-03 微動回転ステージ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987135111U JPH06795Y2 (ja) 1987-09-03 1987-09-03 微動回転ステージ

Publications (2)

Publication Number Publication Date
JPS6440087U JPS6440087U (enrdf_load_stackoverflow) 1989-03-09
JPH06795Y2 true JPH06795Y2 (ja) 1994-01-05

Family

ID=31394452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987135111U Expired - Lifetime JPH06795Y2 (ja) 1987-09-03 1987-09-03 微動回転ステージ

Country Status (1)

Country Link
JP (1) JPH06795Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2780817B2 (ja) * 1989-08-31 1998-07-30 住友重機械工業株式会社 精密ステージ装置

Also Published As

Publication number Publication date
JPS6440087U (enrdf_load_stackoverflow) 1989-03-09

Similar Documents

Publication Publication Date Title
US10133021B2 (en) Positioning unit and apparatus for adjustment of an optical element
US20090141258A1 (en) Imaging Device in a Projection Exposure Machine
WO2002016993A1 (fr) Dispositif de maintien d'element optique
JPS62276612A (ja) 位置決め装置
JP2001343575A (ja) 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法。
JP2003318103A (ja) リソグラフィシステムでの反作用負荷を管理する方法、システム、および装置
JP2004525780A (ja) 超精密位置決めシステム
US7486382B2 (en) Imaging device in a projection exposure machine
JPH0373236B2 (enrdf_load_stackoverflow)
JPH06795Y2 (ja) 微動回転ステージ
EP0240058A1 (en) Positioning device comprising a Z-manipulator and a O-manipulator
JP2780817B2 (ja) 精密ステージ装置
JPH0527034Y2 (enrdf_load_stackoverflow)
JP2002072057A (ja) 調整部品の面調整装置
JP2690510B2 (ja) あおりステージ
JPH0543439Y2 (enrdf_load_stackoverflow)
JPH0240594A (ja) あおりステージ
JP2677294B2 (ja) 圧電アクチュエータおよびそれを用いたステージ装置
JPH0536582A (ja) 位置決めステージ装置
JP2614662B2 (ja) 微動機構
JPH0560935A (ja) 光フアイバ光線入射位置調整装置
JPS60130124A (ja) 回転微動機構
JPH0557556B2 (enrdf_load_stackoverflow)
JPH071452B2 (ja) 微細位置決め装置
JPH071449B2 (ja) 微細位置決め装置