JPH067817Y2 - 回転塗布装置 - Google Patents

回転塗布装置

Info

Publication number
JPH067817Y2
JPH067817Y2 JP4389787U JP4389787U JPH067817Y2 JP H067817 Y2 JPH067817 Y2 JP H067817Y2 JP 4389787 U JP4389787 U JP 4389787U JP 4389787 U JP4389787 U JP 4389787U JP H067817 Y2 JPH067817 Y2 JP H067817Y2
Authority
JP
Japan
Prior art keywords
disc
paint
disk
spin coating
cradle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4389787U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63152684U (enExample
Inventor
正彦 琴寄
俊雄 柏木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Origin Electric Co Ltd
Original Assignee
Origin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Origin Electric Co Ltd filed Critical Origin Electric Co Ltd
Priority to JP4389787U priority Critical patent/JPH067817Y2/ja
Publication of JPS63152684U publication Critical patent/JPS63152684U/ja
Application granted granted Critical
Publication of JPH067817Y2 publication Critical patent/JPH067817Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP4389787U 1987-03-25 1987-03-25 回転塗布装置 Expired - Lifetime JPH067817Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4389787U JPH067817Y2 (ja) 1987-03-25 1987-03-25 回転塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4389787U JPH067817Y2 (ja) 1987-03-25 1987-03-25 回転塗布装置

Publications (2)

Publication Number Publication Date
JPS63152684U JPS63152684U (enExample) 1988-10-06
JPH067817Y2 true JPH067817Y2 (ja) 1994-03-02

Family

ID=30861194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4389787U Expired - Lifetime JPH067817Y2 (ja) 1987-03-25 1987-03-25 回転塗布装置

Country Status (1)

Country Link
JP (1) JPH067817Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0759312B2 (ja) * 1989-12-08 1995-06-28 オリジン電気株式会社 スピンナ装置

Also Published As

Publication number Publication date
JPS63152684U (enExample) 1988-10-06

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