JPH065418Y2 - 超高真空導入用ランプハウジング - Google Patents

超高真空導入用ランプハウジング

Info

Publication number
JPH065418Y2
JPH065418Y2 JP3727988U JP3727988U JPH065418Y2 JP H065418 Y2 JPH065418 Y2 JP H065418Y2 JP 3727988 U JP3727988 U JP 3727988U JP 3727988 U JP3727988 U JP 3727988U JP H065418 Y2 JPH065418 Y2 JP H065418Y2
Authority
JP
Japan
Prior art keywords
lamp
ring
housing body
housing
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3727988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01142458U (enrdf_load_stackoverflow
Inventor
仁志 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP3727988U priority Critical patent/JPH065418Y2/ja
Publication of JPH01142458U publication Critical patent/JPH01142458U/ja
Application granted granted Critical
Publication of JPH065418Y2 publication Critical patent/JPH065418Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP3727988U 1988-03-22 1988-03-22 超高真空導入用ランプハウジング Expired - Lifetime JPH065418Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3727988U JPH065418Y2 (ja) 1988-03-22 1988-03-22 超高真空導入用ランプハウジング

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3727988U JPH065418Y2 (ja) 1988-03-22 1988-03-22 超高真空導入用ランプハウジング

Publications (2)

Publication Number Publication Date
JPH01142458U JPH01142458U (enrdf_load_stackoverflow) 1989-09-29
JPH065418Y2 true JPH065418Y2 (ja) 1994-02-09

Family

ID=31263860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3727988U Expired - Lifetime JPH065418Y2 (ja) 1988-03-22 1988-03-22 超高真空導入用ランプハウジング

Country Status (1)

Country Link
JP (1) JPH065418Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH01142458U (enrdf_load_stackoverflow) 1989-09-29

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