JPS61176764U - - Google Patents

Info

Publication number
JPS61176764U
JPS61176764U JP6025385U JP6025385U JPS61176764U JP S61176764 U JPS61176764 U JP S61176764U JP 6025385 U JP6025385 U JP 6025385U JP 6025385 U JP6025385 U JP 6025385U JP S61176764 U JPS61176764 U JP S61176764U
Authority
JP
Japan
Prior art keywords
chamber
observation window
ion
shutter
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6025385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6025385U priority Critical patent/JPS61176764U/ja
Publication of JPS61176764U publication Critical patent/JPS61176764U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
JP6025385U 1985-04-24 1985-04-24 Pending JPS61176764U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6025385U JPS61176764U (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6025385U JPS61176764U (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Publications (1)

Publication Number Publication Date
JPS61176764U true JPS61176764U (enrdf_load_stackoverflow) 1986-11-04

Family

ID=30587427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6025385U Pending JPS61176764U (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Country Status (1)

Country Link
JP (1) JPS61176764U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0792062A (ja) * 1993-03-04 1995-04-07 Natl Res Inst For Metals 透過型電子顕微鏡用薄膜試料のその場作製および観察 方法並びにその装置
JP2010080382A (ja) * 2008-09-29 2010-04-08 Jeol Ltd 薄膜試料作成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0792062A (ja) * 1993-03-04 1995-04-07 Natl Res Inst For Metals 透過型電子顕微鏡用薄膜試料のその場作製および観察 方法並びにその装置
JP2010080382A (ja) * 2008-09-29 2010-04-08 Jeol Ltd 薄膜試料作成装置

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