JPH0542614Y2 - - Google Patents

Info

Publication number
JPH0542614Y2
JPH0542614Y2 JP15803488U JP15803488U JPH0542614Y2 JP H0542614 Y2 JPH0542614 Y2 JP H0542614Y2 JP 15803488 U JP15803488 U JP 15803488U JP 15803488 U JP15803488 U JP 15803488U JP H0542614 Y2 JPH0542614 Y2 JP H0542614Y2
Authority
JP
Japan
Prior art keywords
quadrupole mass
flange
mass spectrometer
vacuum
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15803488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0279554U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15803488U priority Critical patent/JPH0542614Y2/ja
Publication of JPH0279554U publication Critical patent/JPH0279554U/ja
Application granted granted Critical
Publication of JPH0542614Y2 publication Critical patent/JPH0542614Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Electron Tubes For Measurement (AREA)
JP15803488U 1988-12-06 1988-12-06 Expired - Lifetime JPH0542614Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15803488U JPH0542614Y2 (enrdf_load_stackoverflow) 1988-12-06 1988-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15803488U JPH0542614Y2 (enrdf_load_stackoverflow) 1988-12-06 1988-12-06

Publications (2)

Publication Number Publication Date
JPH0279554U JPH0279554U (enrdf_load_stackoverflow) 1990-06-19
JPH0542614Y2 true JPH0542614Y2 (enrdf_load_stackoverflow) 1993-10-27

Family

ID=31438001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15803488U Expired - Lifetime JPH0542614Y2 (enrdf_load_stackoverflow) 1988-12-06 1988-12-06

Country Status (1)

Country Link
JP (1) JPH0542614Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0279554U (enrdf_load_stackoverflow) 1990-06-19

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