JPH0542614Y2

JPH0542614Y2 -

Info

Publication number: JPH0542614Y2
Application number: JP15803488U
Authority: JP
Priority date: 1988-12-06
Filing date: 1988-12-06
Publication date: 1993-10-27
Anticipated expiration: 2003-10-27
Also published as: JPH0279554U

Description

【考案の詳細な説明】本考案は、気相薄膜成長装置における、分子流
の密度組成の検出を精度よく効率的に行なうため
の四重極質量分析器用真空容器に関する。[Detailed Description of the Invention] The present invention relates to a vacuum vessel for a quadrupole mass spectrometer for accurately and efficiently detecting the density composition of a molecular flow in a vapor phase thin film growth apparatus.

［従来の技術］第２図に従来の実施例を示す。１は成長室、２
は差動排気室、３は四重極質量分析器、４はコリ
メータ、５，６は排気口、７は分子線源、８は分
子線である。排気口５から排気された成長室１内
に設置された分子線源７から放射された分子線８
をコリメータ４で制限し、排気口６から差動排気
された排気室２内の四重極質量分析器３で分子線
を分析する。[Prior Art] FIG. 2 shows a conventional embodiment. 1 is the growth chamber, 2
3 is a differential exhaust chamber, 3 is a quadrupole mass spectrometer, 4 is a collimator, 5 and 6 are exhaust ports, 7 is a molecular beam source, and 8 is a molecular beam. Molecular beam 8 emitted from the molecular beam source 7 installed in the growth chamber 1 which is exhausted from the exhaust port 5
is limited by a collimator 4, and the molecular beam is analyzed by a quadrupole mass spectrometer 3 in an exhaust chamber 2 which is differentially pumped from an exhaust port 6.

［考案が解決しようとする問題点］上記のような従来の装置では次のような欠点が
ある。[Problems to be solved by the invention] The conventional device as described above has the following drawbacks.

気相薄膜成長装置の真空容器とは別に四重極
質量分析器用の真空容器の作る必要があり、高
価で大掛かりになつていた。 It was necessary to make a vacuum container for the quadrupole mass spectrometer separately from the vacuum container for the vapor phase thin film growth apparatus, which was expensive and large-scale.

コリメータの穴の径、形を変えることができ
ず、分析の自由度をせばめていた。 It was not possible to change the diameter and shape of the collimator hole, limiting the degree of freedom in analysis.

本考案の目的は上記のような欠点のない真空
容器を提供することである。 The object of the invention is to provide a vacuum container that does not have the above-mentioned disadvantages.

［問題点を解決するための手段］本考案の質量分析器用真空容器は、運動方向が
ある定まつた立体角の中にある分子だけを抽出す
るためにコリメータが一方の端部開口部に着脱自
在に取付けられ、他方の端部に気相薄膜成長室に
取付けるための真空用フランジを備え、このフラ
ンジの中央には四重極質量分析器を挿入するため
の開口と内部を高真空に保つための差動排気口が
設けられていることを特徴とする。[Means for solving the problem] The vacuum container for a mass spectrometer of the present invention has a collimator attached to and detached from the opening at one end in order to extract only molecules within a fixed solid angle in the direction of motion. It can be attached freely, and the other end has a vacuum flange for attaching it to the vapor phase thin film growth chamber, and the center of this flange has an opening for inserting a quadrupole mass spectrometer and maintains a high vacuum inside. It is characterized by a differential exhaust port.

［実施例］第１図に本考案の１実施例を示す。図において
符号１〜８は第２図に示した従来のものと同様な
ので説明を省略する。９，１０，１１は真空用シ
ール材である。[Example] FIG. 1 shows an example of the present invention. In the figure, reference numerals 1 to 8 are the same as those of the conventional device shown in FIG. 2, so the explanation thereof will be omitted. 9, 10, and 11 are vacuum sealing materials.

本考案においては、差動排気室２をフランジ
２′を有する筒状体とし、成長室１の壁の開口中
に挿入し、開口周辺の壁と真空用シール１０を介
して気密に接合したものである。また質量分析器
３も端部にフランジ３′を有し、これを排気室２
の端部開口から挿入して排気室２の端部壁に真空
シール１１を介して接合する。排気口６はフラン
ジ２′中を通つて排気室２の内部に連通している。
コリメータ４は排気室２のフランジ２′と反対側
の端部に取外し可能に取付けられる。 In the present invention, the differential pumping chamber 2 is a cylindrical body having a flange 2', inserted into an opening in the wall of the growth chamber 1, and airtightly joined to the wall around the opening via a vacuum seal 10. It is. The mass spectrometer 3 also has a flange 3' at the end, which is connected to the exhaust chamber 2.
It is inserted into the end opening of the exhaust chamber 2 and joined to the end wall of the exhaust chamber 2 via a vacuum seal 11. The exhaust port 6 communicates with the interior of the exhaust chamber 2 through the flange 2'.
The collimator 4 is removably attached to the end of the exhaust chamber 2 opposite to the flange 2'.

［考案の効果］このような構造によつて、取り付け用フランジに直接差動排気用排気口
を設けたため、その大きさのフランジをもつ成
長室ならば自由に取り付け、取り外しができる
ようになつた。[Effects of the idea] With this structure, the differential exhaust outlet was provided directly on the mounting flange, so it became possible to freely attach and remove it in any growth chamber with a flange of that size. .

コリメータ部を真空シール材を介してボルト
押えで着脱自在に取付けたため、穴の径、形を
容易に変更することが可能になつた。 Since the collimator section is detachably attached with a bolt holder via a vacuum sealing material, it is now possible to easily change the diameter and shape of the hole.

[Brief explanation of the drawing]

第１図は本考案装置の１実施例の概略図であ
り、第２図は従来の装置の構成図を示す。１……成長室、２……差動排気室、３……四重
極質量分析器、４……コリメータ、５，６……排
気口、７……分子線源、８……分子線、９，１
０，１１……真空用シール材。 FIG. 1 is a schematic diagram of one embodiment of the device of the present invention, and FIG. 2 is a diagram showing the configuration of a conventional device. 1... Growth chamber, 2... Differential exhaust chamber, 3... Quadrupole mass spectrometer, 4... Collimator, 5, 6... Exhaust port, 7... Molecular beam source, 8... Molecular beam, 9,1
0,11... Vacuum sealing material.

Claims

[Scope of utility model registration request]

A collimator is removably attached to an opening at one end in order to extract only molecules whose direction of motion is within a certain solid angle, and a vacuum is attached to the other end to attach to the vapor phase thin film growth chamber. A quadrupole mass spectrometer is equipped with a flange for use in quadrupole mass spectrometry, and the center of the flange is provided with an opening for inserting a quadrupole mass spectrometer and a differential exhaust port for maintaining a high vacuum inside. A handy vacuum container.