JPH0650750Y2 - 振動形差圧センサ - Google Patents
振動形差圧センサInfo
- Publication number
- JPH0650750Y2 JPH0650750Y2 JP2623389U JP2623389U JPH0650750Y2 JP H0650750 Y2 JPH0650750 Y2 JP H0650750Y2 JP 2623389 U JP2623389 U JP 2623389U JP 2623389 U JP2623389 U JP 2623389U JP H0650750 Y2 JPH0650750 Y2 JP H0650750Y2
- Authority
- JP
- Japan
- Prior art keywords
- support base
- groove
- sensor chip
- differential pressure
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 28
- 238000005530 etching Methods 0.000 claims description 27
- 239000004065 semiconductor Substances 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 4
- 239000002585 base Substances 0.000 description 16
- 238000005259 measurement Methods 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000000059 patterning Methods 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000003513 alkali Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 241000269820 Euthynnus affinis Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2623389U JPH0650750Y2 (ja) | 1989-03-08 | 1989-03-08 | 振動形差圧センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2623389U JPH0650750Y2 (ja) | 1989-03-08 | 1989-03-08 | 振動形差圧センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02118237U JPH02118237U (enrdf_load_stackoverflow) | 1990-09-21 |
| JPH0650750Y2 true JPH0650750Y2 (ja) | 1994-12-21 |
Family
ID=31247678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2623389U Expired - Lifetime JPH0650750Y2 (ja) | 1989-03-08 | 1989-03-08 | 振動形差圧センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650750Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-03-08 JP JP2623389U patent/JPH0650750Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02118237U (enrdf_load_stackoverflow) | 1990-09-21 |
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