JPH0567169B2 - - Google Patents
Info
- Publication number
- JPH0567169B2 JPH0567169B2 JP61270085A JP27008586A JPH0567169B2 JP H0567169 B2 JPH0567169 B2 JP H0567169B2 JP 61270085 A JP61270085 A JP 61270085A JP 27008586 A JP27008586 A JP 27008586A JP H0567169 B2 JPH0567169 B2 JP H0567169B2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- sensor chip
- pressure
- groove
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27008586A JPS63122925A (ja) | 1986-11-13 | 1986-11-13 | 半導体圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27008586A JPS63122925A (ja) | 1986-11-13 | 1986-11-13 | 半導体圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63122925A JPS63122925A (ja) | 1988-05-26 |
| JPH0567169B2 true JPH0567169B2 (enrdf_load_stackoverflow) | 1993-09-24 |
Family
ID=17481323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27008586A Granted JPS63122925A (ja) | 1986-11-13 | 1986-11-13 | 半導体圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63122925A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2820202B1 (fr) * | 2001-01-31 | 2004-06-04 | Snecma Moteurs | Capteur de pression et moteur de fusee l'incorporant |
| JP5515258B2 (ja) * | 2008-03-17 | 2014-06-11 | 株式会社デンソー | 圧力センサチップおよび圧力センサ |
| JP5935352B2 (ja) | 2012-01-27 | 2016-06-15 | 富士電機株式会社 | Ｓｏｎ構造を有する物理量センサの製造方法。 |
| JP6665589B2 (ja) * | 2016-03-02 | 2020-03-13 | オムロン株式会社 | 圧力センサチップ及び圧力センサ |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5817421B2 (ja) * | 1979-02-02 | 1983-04-07 | 日産自動車株式会社 | 半導体圧力センサ |
-
1986
- 1986-11-13 JP JP27008586A patent/JPS63122925A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63122925A (ja) | 1988-05-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6813956B2 (en) | Double stop structure for a pressure transducer | |
| US6662658B2 (en) | Whiffletree accelerometer | |
| US4236137A (en) | Semiconductor transducers employing flexure frames | |
| US4050049A (en) | Solid state force transducer, support and method of making same | |
| EP0672898B1 (en) | Semiconductor pressure sensor with polysilicon diaphragm and single-crystal gage elements and fabrication method therefor | |
| JPH0750789B2 (ja) | 半導体圧力変換装置の製造方法 | |
| JPH0567169B2 (enrdf_load_stackoverflow) | ||
| JP2005055313A (ja) | 半導体圧力センサ装置 | |
| JP2822486B2 (ja) | 感歪センサおよびその製造方法 | |
| US6308575B1 (en) | Manufacturing method for the miniaturization of silicon bulk-machined pressure sensors | |
| US9964458B2 (en) | Pressure sensor device with anchors for die shrinkage and high sensitivity | |
| US7343806B2 (en) | Pressure sensor featuring pressure loading of the fastening element | |
| JP2021060336A (ja) | センサ素子 | |
| JPH10148593A (ja) | 圧力センサ及び静電容量型圧力センサチップ | |
| JPH0526983Y2 (enrdf_load_stackoverflow) | ||
| JPH1022511A (ja) | 半導体圧力センサ及びその製造方法 | |
| JPH064301Y2 (ja) | 半導体圧力センサ | |
| JPH01236659A (ja) | 半導体圧力センサ | |
| JPH11201845A (ja) | 半導体式圧力センサ | |
| CN222353382U (zh) | 一种用于高温多量程的压力传感器 | |
| JP2000275271A (ja) | 半導体加速度センサ | |
| JP3552963B2 (ja) | 圧力センサ | |
| JP3120388B2 (ja) | 半導体圧力変換器 | |
| JPH06347353A (ja) | 半導体圧力センサ | |
| JPH02151076A (ja) | 半導体圧力センサ及びその製造方法 |